Electroplating apparatus with electrolyte agitation

Patent metadata

Field	Value
Publication number	US-10227706-B2
Application number	US-201514806255-A
Country	US
Kind code	B2
Filing date	Jul 22, 2015
Priority date	Jul 22, 2015
Publication date	Mar 12, 2019
Grant date	Mar 12, 2019

Abstract

Electroplating apparatus agitates electrolyte to provide high velocity fluid flows at the surface of a wafer. The apparatus includes a paddle which provides uniform high mass transfer over the entire wafer, even with a relatively large gap between the paddle and the wafer. Consequently, the processor may have an electric field shield positioned between the paddle and the wafer for effective shielding at the edges of the wafer. The influence of the paddle on the electric field across the wafer is reduced as the paddle is spaced relatively farther from the wafer.

First claim

The invention claimed is:

1. An electroplating processor, comprising:
a vessel;
a head having a wafer holder, with the head movable to position the wafer holder in the vessel;
a contact ring on the head having a plurality of electrical contacts positioned for making electrical contact with a wafer held by the wafer holder;
at least one anode in the vessel;
a paddle in the vessel, with the paddle having a plurality of upright ribs, with substantially all of the ribs having a height HH, and with the ribs having a pitch spacing PP greater than 16 mm, and with ratio of HH:PP equal to 0.35 to 0.5;
a paddle actuator attached to the paddle for moving the paddle horizontally within the vessel; and
a shield in between the wafer holder and the paddle, the shield comprising an annular ring of di-electric material in the vessel, the shield oriented in a horizontal plane, for shielding edges of a wafer held in the wafer holder.

2. The electroplating processor of claim 1 with the wafer holder holding a wafer at a processing position, with a gap of 4-6 mm between a lower surface of the wafer and a top surface of the ribs.

3. The electroplating processor of claim 1 with each rib having a tapering upright section joined perpendicularly to a base having a flat bottom surface, and with an opening of 4-6 mm between bases of adjacent ribs.

4. The electroplating processor of claim 3 with each base having a width BW and with BW equal to 70 to 95% of HH.

5. The electroplating processor of claim 1 with PP equal to 18 to 22 mm.

6. The electroplating processor of claim 1 with each rib having a tapering upright section joined perpendicularly to a base having a flat bottom surface.

7. The electroplating processor of claim 6 with the paddle actuator moving the paddle from a first position, wherein the shield overlies a first rib of the paddle, to a second position wherein the shield does not overlie the first rib.

8. The electroplating processor of claim 1 wherein the paddle is round and comprises a di-electric material, and substantially all of the ribs are equally spaced apart.

9. The electroplating processor of claim 5 with HH:PP equal to 0.4 to 0.5.

10. An electroplating processor, comprising:
a vessel;
a head having a wafer holder, with the head movable to position the wafer holder in the vessel;
a contact ring on the head having a plurality of electrical contacts positioned for making electrical contact with a wafer held by the wafer holder;
at least one anode in the vessel;
a paddle in the vessel, with the paddle having a plurality of equally spaced apart upright ribs, with substantially all of the ribs having a height HH, and with the ribs having a pitch spacing PP equal to 16 to 22 mm, and with ratio of HH:PP equal to 0.35 to 0.5 and with each rib having a tapering upright section joined perpendicularly to a base having a flat bottom surface;
the wafer holder holding a wafer at a processing position, with a gap of 4-6 mm between a lower surface of the wafer and a top surface of the upright section of substantially each rib;
a paddle actuator attached to the paddle for moving the paddle horizontally within the vessel;
a seal on the contact ring at a vertical level above the ribs; and
a shield in between the wafer and the paddle, the shield comprising an annular ring of di-electric material in the vessel, the shield oriented in a horizontal plane, for shielding edges of a wafer held in the wafer holder.

11. The electroplating processor of claim 1 with the paddle comprising a circular di-electric material.

12. The electroplating processor of claim 1 with the paddle at a fixed vertical position in the vessel.

13. The electroplating processor of claim 1 further including a seal on the contact ring at a vertical level above the ribs.

14. An electroplating processor, comprising:
a vessel;
a head having a wafer holder, with the head movable to position the wafer holder in the vessel;
a contact ring on the head having a plurality of electrical contacts positioned for making electrical contact with a wafer held by the wafer holder;
at least one anode in the vessel;
a paddle in the vessel, with the paddle having a plurality of equally spaced apart upright ribs, with substantially all of the ribs having a height HH, and with the ribs having a pitch spacing PP greater than 16 mm, and with ratio of HH:PP equal to 0.35 to 0.5, and with each rib having a tapering upright section joined perpendicularly to a base having a flat bottom surface;
a paddle actuator attached to the paddle for moving the paddle horizontally within the vessel;
a shield in the vessel, the shield comprising an annular ring of di-electric material in the vessel, the shield oriented in a horizontal plane, for shielding edges of a wafer held in the wafer holder.

15. The electroplating processor of claim 14 wherein the tapering section has curved surfaces.

16. The electroplating processor of claim 14 with the wafer holder holding a wafer at a processing position, with a gap of 4-6 mm between a lower surface of the wafer and a top surface of the ribs.

17. The electroplating processor of claim 14 with each base having a width equal to 70 to 95% of HH.

18. The electroplating processor of claim 14 with PP equal to 18 to 22 mm.

19. The electroplating processor of claim 14 with the paddle actuator moving the paddle from a first position, wherein the shield overlies a first rib of the paddle, to a second position wherein the shield does not overlie the first rib.

Assignees

• Applied Materials Inc

Inventors

• Wilson Gregory J
• Mchugh Paul R

Classifications

• C25D21/10 Primary

  Agitating of electrolytes; Moving of racks · CPC title

• C25D17/005

  Contacting devices · CPC title

• C25D17/08

  Supporting} racks {, i.e. not for suspending · CPC title

• C25D17/00

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title

• C25D5/08

  Electroplating with moving electrolyte e.g. jet electroplating {(using locally applied jets of electrolyte C25D5/026)} · CPC title