Micromirror arrangement and projection device

Patent metadata

Field	Value
Publication number	US-10222609-B2
Application number	US-201515318523-A
Country	US
Kind code	B2
Filing date	May 29, 2015
Priority date	Jun 13, 2014
Publication date	Mar 5, 2019
Grant date	Mar 5, 2019

Abstract

A micromirror assembly is described as including a spring-mounted mirror and at least one stop unit, which is designed to restrict a movement of the mirror in the event of a movement of the mirror in a predefined direction out of its idle position. Furthermore, the invention relates to a projection device.

First claim

What is claimed is:

1. A micromirror assembly, comprising:
a spring-mounted mirror, wherein:
a reflective exterior bottom surface of the spring-mounted mirror, when the spring-mounted mirror is in an idle position, extends in first and second directions in a plane; and
the spring-mounted mirror is deflectable out of its idle position to move at least in a third direction that is perpendicular to the plane; and

a stop unit arranged relative to the spring-mounted mirror so that the movement of the mirror in the third direction when deflected out of its idle position is restricted to a limiting distance, wherein the stop unit includes a plurality of stops that each (a) is at least one of in a same plane as and attached to the mirror and (b) extends longitudinally away from a lateral edge of the mirror in a direction that is parallel to an axis of rotation of the mirror.

2. The micromirror assembly as recited in claim 1 , further comprising:
a housing, wherein the stop unit includes at least one counter bearing that is coupled to the housing.

3. The micromirror assembly as recited in claim 1 , further comprising:
at least one torsion spring for spring-mounting the mirror, wherein the at least one torsion spring is situated in one of:
the axis of rotation of the mirror, and
a parallel axis that is parallel to the axis of rotation of the mirror and is above the mirror.

4. The micromirror assembly as recited in claim 3 , wherein each of the plurality of stops is, in the third direction, at a predefined distance from the at least one torsion spring.

5. The micromirror assembly as recited in claim 3 , further comprising:
a drive frame that includes at least two rails sandwiching the at least one torsion spring and that is above the mirror, wherein:
the plurality of stops include, on each of two opposite sides of the mirror, at least two respective stops that each extends longitudinally away from a respective lateral edge of the mirror in a respective direction that is parallel to the axis of rotation of the mirror on each side of the mirror;
an axis of symmetry of the plurality of stops is parallel to the axis of rotation of the mirror; and
each of the rails is mechanically coupled to at least two of the stops.

6. The micromirror assembly as recited in claim 2 , wherein the plurality of stops are formed with the mirror in one piece from a substrate.

7. The micromirror assembly as recited in claim 6 , wherein the substrate includes a silicon substrate.

8. The micromirror assembly as recited in claim 2 , wherein the counter bearing is an optical base of the micromirror assembly.

9. The micromirror assembly as recited in claim 2 , wherein the counter bearing is situated on the micromirror assembly in such a way that, when the mirror is in its idle position, a distance between the stops and the counter bearing in the third direction is less than 100 μm.

10. The micromirror assembly as recited in claim 2 , wherein the counter bearing is situated on the micromirror assembly in such a way that, when the mirror is in its idle position, a distance between the stops and the counter bearing in the third direction is less than 50 μm.

11. The micromirror assembly as recited in claim 2 , wherein:
the counter bearing is situated on the micromirror assembly in such a way that the counter bearing and the mirror are situated flush in one plane; and
the counter bearing includes, in an area of the stops, a recess with a thickness, in the third direction, of less than 100 μm.

12. The micromirror assembly as recited in claim 2 , wherein:
the counter bearing is situated on the micromirror assembly in such a way that the counter bearing and the mirror are situated flush in one plane; and
the counter bearing includes, in an area of the stops, a recess with a thickness, in the third direction, of less than 50 μm.

13. The micromirror assembly as recited in claim 2 , wherein:
the plurality of stops are coupled to the mirror and are, in the third direction, set back from the reflective exterior surface of the mirror at a distance of less than 100 μm from the counter bearing when the mirror is in its idle position.

14. The micromirror assembly as recited in claim 2 , wherein:
the plurality of stops are coupled to the mirror and are, in the third direction, set back from the reflective exterior surface of the mirror at a distance of less than 50 μm from the counter bearing when the mirror is in its idle position.

15. A projection device, comprising:
at least one light source;
a micromirror assembly that includes:
a spring-mounted mirror arranged to reflect light from the at least one light source, wherein:
a reflective exterior bottom surface of the spring-mounted mirror, when the spring-mounted mirror is in an idle position, extends in first and second directions in a plane; and
the spring-mounted mirror is deflectable out of its idle position to move at least in a third direction that is perpendicular to the plane; and

a stop unit arranged relative to the spring-mounted mirror so that the movement of the mirror in the third direction when deflected out of its idle position is restricted to a limiting distance, wherein the stop unit includes a plurality of stops that each (a) is at least one of in a same plane as and attached to the mirror and (b) extends longitudinally away from a lateral edge of the mirror in a direction that is parallel to an axis of rotation of the mirror; and

a control unit for controlling the at least one micromirror assembly.

16. The micromirror assembly as recited in claim 2 , wherein, when the spring-mounted mirror is in its idle position, the counter bearing is, in the third direction, at a first distance from the plurality of stops, and the micromirror assembly is arranged so that the counter bearing can abut against at least one of the plurality of stops in the third direction in response to deflection of the spring-mounted mirror out of its idle position.

17. The micromirror assembly as recited in claim 2 , wherein, when the spring-mounted mirror is in its idle position, a gap separates the counter bearing from the plurality of stops in the third direction, and the micromirror assembly is arranged for the gap to close and the counter bearing to abut against one or more of the plurality of stops in the third direction when the spring-mounted mirror is deflected out of its idle position.

18. The micromirror assembly as recited in claim 17 , wherein the spring-mounted mirror is arranged to, when deflected out of its idle position, rotate about the axis of rotation, which extends in one of the first and second directions so that opposite edges of the spring-mounted mirror deflect in opposite directions, perpendicularly to the first and second directions.

19. A micromirror assembly comprising:
a spring-mounted mirror, wherein:
a reflective exterior surface of the spring-mounted mirror, when the spring-mounted mirror is in an idle position, extends in first and second directions in a plane; and
the spring-mounted mirror is deflectable out of its idle position to move at least in a third direction that is perpendicular to the plane;

a frame that (a) is arranged relative to the mirror so that the movement of the mirror in the third direction when deflected out of its idle position is restricted to a limiting distance, (b) extends in parallel to the first and second directions and (c) includes a recess; and
within the recess, a transparent pane, at least a part of which is arranged under the mirror and an exter

Assignees

• Bosch Gmbh Robert

Inventors

• Straub Rainer
• Pinter Stefan
• Baader Johannes
• Duell Andreas
• Njimonzie Frederic Njikam
• Muchow Joerg
• Grutzeck Helmut
• Mark Stefan

Classifications

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• H04N9/312

  Driving therefor (driving of electronic spatial light modulators in displays other than projection devices G09G3/34, G09G3/36; control of liquid crystal elements G02F1/133; control of micromechanical modulators G02B26/08) · CPC title

• B81B3/004

  Angular deflection · CPC title