Systems and methods for thermally controlling sensors

Patent metadata

Field	Value
Publication number	US-10222394-B2
Application number	US-201615229509-A
Country	US
Kind code	B2
Filing date	Aug 5, 2016
Priority date	Sep 22, 2015
Publication date	Mar 5, 2019
Grant date	Mar 5, 2019

Abstract

A sensor is compensated by selectively activating a temperature element to drive temperature within the thermal envelope encompassing the sensor towards an operating temperature and applying a compensation to output of the sensor based at least in part on the operating temperature. The initial ambient temperature is estimated and the operating temperature is selected from a set of predetermined temperatures based on the estimate. The current ambient temperature is estimated and a new operating temperature selected when the current ambient temperature is within a threshold of the operating temperature. Correspondingly, the temperature element is selectively activated to drive temperature within the thermal envelope towards the new operating temperature and an appropriate compensation is applied to the sensor output.

First claim

What is claimed is:

1. A method for compensating a sensor, comprising:
providing a sensor assembly including the sensor, a temperature sensor and a temperature element contained within a thermal envelope;
selecting an operating temperature;
selectively activating the temperature element to drive temperature within the thermal envelope towards the selected operating temperature;
applying a first compensation to an output of the sensor based at least in part on the selected operating temperature and
estimating current ambient temperature based at least in part on quantifying energy supplied to the temperature element.

2. The method of claim 1 , further comprising determining a difference between the selected operating temperature and the estimated current ambient temperature and applying a second compensation to the output of the sensor based at least in part on the determined difference between selected operating temperature and estimated current ambient temperature.

3. The method of claim 1 , further comprising selectively activating the temperature element to compensate for hysteresis.

4. The method of claim 1 , wherein selectively activating the temperature element comprises operating the temperature element at a duty cycle.

5. The method of claim 4 , wherein quantifying energy supplied to the temperature element comprises characterizing the duty cycle.

6. The method of claim 1 , wherein quantifying energy supplied to the temperature element comprising quantifying energy delivered to maintain the thermal envelope at the operating temperature.

7. The method of claim 1 , further comprising estimating an initial ambient temperature based at least in part on an output from the temperature sensor prior to selectively activating the temperature element.

8. The method of claim 7 , further comprising selecting the operating temperature based at least in part on the estimated initial ambient temperature.

9. The method of claim 1 , further comprising selecting the operating temperature based at least in part on the estimated current ambient temperature.

10. The method of claim 1 , wherein the operating temperature is selected from a set of predetermined temperatures.

11. The method of claim 10 , further comprising changing from a first operating temperature to a second operating temperature when the estimated current ambient temperature is within a threshold of the first operating temperature.

12. The method of claim 10 , further comprising determining compensations to be applied to a motion sensor output for each temperature of the set of predetermined temperatures.

13. The method of claim 10 , further comprising selectively activating the thermal element to drive temperature within the thermal envelope towards a supplemental operating temperature.

14. The method of claim 13 , further comprising performing a calibration routine at the supplemental operating temperature to determine a compensation for the supplemental operating temperature.

15. The method of claim 14 , further comprising applying the compensation for the supplemental operating temperature to the output of the sensor.

16. The method of claim 14 , further comprising performing calibration routines at a plurality of supplemental operating temperatures to determine compensations for each of the supplemental operating temperatures.

17. The method of claim 1 , wherein the thermal element is selected from the group consisting of a heating element, a cooling element and a heating and cooling element.

18. The method of claim 1 , wherein the sensor is an inertial sensor.

19. The method of claim 1 , wherein the sensor is implemented using a micro electro-mechanical system (MEMS).

20. A sensor device comprising:
a sensor assembly including a sensor,
a temperature sensor and a temperature element contained within a thermal envelope; and
a controller configured to:
select an operating temperature;
selectively activate the temperature element to drive temperature within the thermal envelope towards the selected operating temperature;
apply a first compensation to an output of the sensor based at least in part on the selected operating temperature; and
estimate current ambient temperature based at least in part on quantifying energy supplied to the temperature element.

Assignees

• Invensense Inc

Inventors

• Katginari Karthik
• Heshmati Ardalan
• Shen Jianwei

Classifications

• G01C19/56

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• G01P1/006 Primary

  used for thermal compensation · CPC title

• G01P21/00

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title

• G01C21/166

  Mechanical, construction or arrangement details of inertial navigation systems · CPC title