Detection device comprising an improved cold finger

Patent metadata

Field	Value
Publication number	US-10222267-B2
Application number	US-201615282696-A
Country	US
Kind code	B2
Filing date	Sep 30, 2016
Priority date	Jul 18, 2013
Publication date	Mar 5, 2019
Grant date	Mar 5, 2019

Abstract

The detection device comprises a cold finger which performs the thermal connection between a detector and a cooling system. The cold finger comprises at least one side wall at least partially formed by an area made from the amorphous metal alloy. Advantageously, the whole of the cold finger is made from the amorphous metal alloy.

First claim

The invention claimed is:

1. A detection device comprising:
a readout circuit formed in a first semiconductor substrate,
a detection circuit hybridized on a first main surface of the readout circuit,
a cooling system thermally connected to the detection circuit and to the readout circuit,
a cold finger configured to enable cooling of the readout circuit by the cooling system,
wherein the cold finger comprises at least one side wall defining a confinement channel of a cooling gas originating from the cooling system, said at least one side wall being at least partially formed by an area made from amorphous metal alloy so as to form a thermal insulator.

2. The detection device according to claim 1 , wherein the area made from amorphous metal alloy forms a ring.

3. The detection device according to claim 2 , wherein the at least one side wall is completely formed by an amorphous metal alloy.

4. The detection device according to claim 3 , wherein the cold finger comprises a top formed from crystalline metal and connected to the readout circuit.

5. The detection device according to claim 1 , wherein the amorphous metal alloy is chosen from Zirconium/Aluminium/Nickel/Copper alloys, Zirconium/Titanium/Copper/Nickel/Beryllium alloys, Iron/Nickel/Phosphorus/Boron alloys, Iron/Boron alloys, Iron/Nickel/Chromium/Phosphorus/Boron alloys, Palladium/Nickel/Copper/Phosphorus alloys, Palladium/Nickel/Phosphorus alloys, Iron/Cobalt/Yttrium/Boron alloys, and Cobalt/Nickel/Iron/Silicon/Boron alloys.

6. The detection device according to claim 5 , wherein the amorphous metal alloy is chosen from Zr 55 Al 10 Ni 5 Cu 30 alloys, Zr 41 Ti 14 Cu 12 Ni 10 Be 23 alloys, Fe 80 B 20 alloys, Fe 40 Ni 40 P 14 B 6 and Fe 32 Ni 36 Cr 14 P 12 B 6 alloys, Pd 40 Ni 10 Cu 30 P 20 alloys, Pd 40 Ni 40 P 20 alloys, Fe 42 /Co 30 /Y 6 /B 22 or Fe 43 /Co 4,5 /Cr 16,5 /Mo 16,5 /C 14 /B 4 /Y 1,5 or (Fe 43 /Cr 5 /Co 5 /Mo 12,5 /Mn 11,2 /C 15,8 /B 5,9 ) 98,15 /Y 1,5 alloys, and Co 58 Ni 10 Fe 5 Si 11 B 16 alloys.

7. The detection device according to claim 1 , wherein said area made from amorphous metal alloy is a whole height of said at least one side wall.

8. The detection device according to claim 1 , wherein all side walls of the cold finger are at least partially formed by the area made from amorphous metal alloy.

9. The detection device according to claim 1 , wherein said cold finger comprises only one side wall, and said only one side wall is completely made from said amorphous metal alloy.

10. The detection device according to claim 1 , wherein said cold finger comprises more than one side wall, and all of the side walls are completely made from said amorphous metal alloy.

11. The detection device according to claim 1 , wherein said area made from amorphous metal alloy does not comprise metal in its monocrystalline or polycrystalline form.

12. The detection device according to claim 1 , wherein said at least one side wall does not comprise metal in its monocrystalline or polycrystalline form.

13. The detection device according to claim 1 , wherein said cold finger does not comprise metal in its monocrystalline or polycrystalline form.

14. The detection device according to claim 1 , wherein the cold finger comprises a top connected to the readout circuit, the top being formed in the amorphous metal alloy.

Assignees

• Soc Fr De Detecteurs Infrarouges—Sofradir
• Univ Grenoble Alpes
• Univ Grenoble Aples

Inventors

• Cassaigne Pierre
• Lenain Alexis
• Gravier Sébastien
• Kapelski Georges

Classifications

• C22C19/07

  based on cobalt · CPC title

• C22C38/30

  with cobalt · CPC title

• C22C38/22

  with molybdenum or tungsten · CPC title

• C22C16/00

  Alloys based on zirconium · CPC title

• C22C45/008

  with Fe, Co or Ni as the major constituent (C22C45/02, C22C45/04 take precedence) · CPC title