Devices including a near field transducer and at least one associated adhesion layer

Patent metadata

Field	Value
Publication number	US-10217482-B2
Application number	US-201715606040-A
Country	US
Kind code	B2
Filing date	May 26, 2017
Priority date	May 25, 2014
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

Devices that include a near field transducer (NFT), the NFT having a disc and a peg, and the peg having five surfaces thereof; and at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer including one or more of the following: yttrium (Y), tin (Sn), iron (Fe), copper (Cu), carbon (C), holmium (Ho), gallium (Ga), silver (Ag), ytterbium (Yb), chromium (Cr), tantalum (Ta), iridium (Ir), zirconium (Zr), yttrium (Y), scandium (Sc), cobalt (Co), silicon (Si), nickel (Ni), molybdenum (Mo), niobium (Nb), palladium (Pd), titanium (Ti), rhenium (Re), osmium (Os), platinum (Pt), aluminum (Al), ruthenium (Ru), rhodium (Rh), vanadium (V), germanium (Ge), tin (Sn), magnesium (Mg), iron (Fe), copper (Cu), tungsten (W), hafnium (Hf), carbon (C), boron (B), holmium (Ho), antimony (Sb), gallium (Ga), manganese (Mn), silver (Ag), indium (In), bismuth (Bi), zinc (Zn), ytterbium (Yb), and combinations thereof.

First claim

What is claimed is:

1. A device comprising:
a near field transducer (NFT), the NFT having a disc and a peg, and the peg having five surfaces thereof; and
at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer comprising one or more of the following: chromium (Cr), tantalum (Ta), iridium (Ir), zirconium (Zr), yttrium (Y), scandium (Sc), cobalt (Co), silicon (Si), nickel (Ni), molybdenum (Mo), niobium (Nb), palladium (Pd), titanium (Ti), rhenium (Re), osmium (Os), platinum (Pt), aluminum (Al), ruthenium (Ru), rhodium (Rh), vanadium (V), germanium (Ge), tin (Sn), magnesium (Mg), iron (Fe), copper (Cu), tungsten (W), hafnium (Hf), carbon (C), boron (B), holmium (Ho), antimony (Sb), gallium (Ga), manganese (Mn), silver (Ag), indium (In), bismuth (Bi), zinc (Zn), ytterbium (Yb), combinations thereof.

2. The device according to claim 1 , wherein the NFT comprises gold or an alloy thereof.

3. The device according to claim 1 , wherein the at least one adhesion layer is located on a surface of the peg that is along an axis having a core of a waveguide and a write pole.

4. The device according to claim 3 , wherein the at least one adhesion layer is located adjacent the core of the waveguide.

5. The device according to claim 3 further comprising at least one additional adhesion layer located on a surface of the peg that is perpendicular to the axis having the core and the write pole.

6. The device according to claim 1 , wherein all surfaces of the peg except the air bearing surface have an adhesion layer thereon.

7. The device according to claim 1 , wherein all five surfaces of the peg have an adhesion layer thereon.

8. The device according to claim 1 , wherein the at least one adhesion layer has a thickness from about 1 to 60 Å.

9. A device comprising:
an energy source;
a near field transducer (NFT) configured to receive energy from the energy source, the NFT having a disc and a peg, and the peg having five surfaces thereof; and
at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer having a thickness from about 10 Å to about 35 Å, and the adhesion layer comprising one or more of the following: boron (B), aluminum (Al), indium (In), or combinations thereof.

10. The device according to claim 9 , wherein the at least one adhesion layer has a thickness from about 10 Å to about 30 Å.

11. The device according to claim 9 , wherein the at least one adhesion layer has a thickness from about 2 Å to about 30 Å.

12. The device according to claim 9 , wherein the NFT comprises gold or an alloy thereof.

13. The device according to claim 9 , wherein the NFT comprises silver (Ag) or an alloy thereof.

14. The device according to claim 9 , wherein the NFT comprises copper (Cu) or alloys thereof.

15. The device according to claim 9 , wherein the energy source comprises a laser.

16. The device according to claim 9 further comprising a waveguide, the waveguide configured to receive the energy from the energy source and couple it into the NFT.

17. The device according to claim 16 , wherein the at least one adhesion layer is located on a surface of the peg that is along an axis having the core of the waveguide.

18. The device according to claim 17 , wherein the at least one adhesion layer is located adjacent the core of the waveguide.

19. A method comprising:
forming a structure, the structure comprising:
a bottom adhesion layer;
a peg and disc structure on the bottom adhesion layer, the peg and disc structure having both top surfaces and side surfaces;
a second adhesion layer on the top and side surfaces of the peg and disc structure;
a capping layer on the second adhesion layer; and
an amorphous carbon layer on the capping layer; and

removing at least a portion of the second adhesion layer via vertical ion milling and chemical mechanical polishing wherein the amorphous carbon layer functions as a stop layer for the second adhesion layer.

Assignees

• Seagate Technology Llc

Inventors

• Sankar Vijay Karthik
• Zhao Tong
• Zhao Yongjun
• Kautzky Michael C
• Brickner Hui
• Sahoo Sarbeswar

Classifications

• G11B5/6088 Primary

  Optical waveguide in or on flying head · CPC title

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• B05B1/36

  Outlets for discharging by overflow · CPC title

• G11B5/85

  Coating a support with a magnetic layer by vapour deposition · CPC title

• G11B7/24059

  specially adapted for near-field recording or reproduction · CPC title