Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system

Patent metadata

Field	Value
Publication number	US-10215712-B2
Application number	US-201414556231-A
Country	US
Kind code	B2
Filing date	Nov 30, 2014
Priority date	Sep 2, 2009
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

First claim

With this in mind, we claim:

1. A spinning wafer inspection system including an automatic beam steering and shaping mechanism which combines beam shaping and beam steering of said beam in a single beam shaping/steering module, said beam steering and shaping mechanism configured to enable adjustment of position, angle, size, and spot scaling and magnification of said beam;
wherein said beam shaping/steering module comprises said beam traversing at least one prism group comprising at least a first prism and a second prism, one of said first and said second prism being rotatable, a second of said first and said second prism being rotatable and translatable, each said prism group affecting both anamorphic magnification and beam direction/shear of said beam in one direction; and
said beam steering and shaping mechanism comprising;

a partially reflecting mirror and a beam splitter for splitting an incoming laser beam into two channels;
two cameras, each positioned on one of the two channels;
wherein the two channels are optimized, a first channel for measuring tilt angle and a second channel for measuring shear position.

2. The inspection system of claim 1 , wherein said at least one prism group is a prism pair.

3. The inspection system of claim 1 , wherein said at least one prism group contains more than two prisms.

4. The inspection system of claim 1 , wherein said beam shaping/steering module comprises said beam traversing two prism groups arranged in series, said two prism groups being oriented orthogonally to each other such that said two prism groups affect both anamorphic magnification and beam direction/shear independently in two orthogonal directions.

5. The inspection system of claim 1 , wherein said adjustment of angle comprises adjustment in a desired range between 0.1 urad and 100 urad.

6. The inspection system of claim 1 , wherein said adjustment of magnification comprises magnification in the range of about 0.4 to 2.6.

7. The inspection system of claim 1 , wherein said beam steering and shaping mechanism is configured to enable implementation of a control algorithm that provides feedback about tilt and shear.

8. The inspection system of claim 7 , wherein said control algorithm includes an iterative process that checks after a first adjustment and runs it again if output is not within said desired range.

9. An automatic beam shaping/steering module,
said automatic beam shaping/steering module suitable for being used on a spinning wafer inspection system;
said automatic beam steering and shaping module configured to enable adjustment of position, angle, size, and spot scaling and magnification of said beam;

wherein said beam shaping/steering module comprises said beam traversing at least one prism group comprising at least a first prism and a second prism, one of said first and said second prism being rotatable, a second of said first and said second prism being rotatable and translatable, each said prism group affecting both anamorphic magnification and beam direction/shear of said beam in one direction; and
said beam steering and shaping mechanism comprising;

a partially reflecting mirror and a beam splitter for splitting an incoming laser beam into two channels;
two cameras, each positioned on one of the two channels;
wherein the two channels are optimized, a first channel for measuring tilt angle and a second channel for measuring shear position.

Assignees

• Wolters Christian
• Whiteside Bret
• Romanovsky Anatoly
• Kla Tencor Corp

Inventors

• Wolters Christian
• Whiteside Bret
• Romanovsky Anatoly

Classifications

• G01N21/8806

  Specially adapted optical and illumination features · CPC title

• G01N2201/0633

  Directed, collimated illumination · CPC title

• G02B27/0972

  Prisms (prisms per se G02B5/04) · CPC title

• G01N21/9501 Primary

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title