Trimmable links for selectively setting transducer impedance

Patent metadata

Field	Value
Publication number	US-10215651-B2
Application number	US-201615056367-A
Country	US
Kind code	B2
Filing date	Feb 29, 2016
Priority date	Feb 29, 2016
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

Systems and methods are disclosed herein for selectively configuring an impedance of a transducer. A configurable transducer system is provided that can include a first region configured for receiving an applied stress and one or more sensing branches in communication with the first region. Each sensing branch can include an active piezoresistive area; three or more conduction paths configured in electrical communication with the active piezoresistive area; one or more trimmable links configured in parallel communication with at least two of the three or more conduction paths; and two or more connection terminals in electrical communication with the three or more conduction paths. The trimmable links are configured to be selectively opened to set a value of nominal impedance associated with the active piezoresistive area based on a desired impedance of the configurable transducer.

First claim

I claim:

1. A method, comprising:
determining a desired impedance for a configurable transducer, the configurable transducer comprising one or more sensing branches, each sensing branch comprising:
an active piezoresistive area;
three or more independent conduction paths configured in electrical communication with different regions of the active piezoresistive area;
one or more trimmable links configured in parallel communication with at least two of the three or more conduction paths; and
two or more connection terminals configured in electrical communication with the three or more conduction paths; and

selectively opening, based on the desired impedance, one or more of the trimmable links to selectively set a value of nominal impedance associated with the active piezoresistive area.

2. The method of claim 1 , wherein the three or more conduction paths are configured in electrical communication with different and independent regions of the active piezoresistive area such that corresponding finite nominal impedances are configured between each of the three or more conduction paths.

3. The method of claim 1 , wherein each sensing branch is further configured to include:
at least one configurable resistor in electrical communication with one or more of the conduction paths and one or more of the connection terminals, wherein the at least one configurable resistor includes one or more of:
a configurable resistor trimmable link in a series configuration, and
a configurable resistor trimmable link in a parallel configuration; and

wherein the selectively opening includes opening one or more configurable resistor trimmable link to set a value of nominal impedance associated with the configurable resistor.

4. The method of claim 1 , wherein the one or more sensing branches are combined in a Wheatstone bridge configuration in communication with a region configured for receiving an applied stress.

5. The method of claim 4 , wherein the region for receiving the applied stress comprises a diaphragm.

6. The method of claim 1 , wherein selectively opening comprises removing one or more pre-configured series or parallel shorts after initial manufacturing of the configurable transducer.

7. The method of claim 1 , wherein the configurable transducer is configured as a pressure sensor.

8. A configurable transducer system, comprising:
a first region configured for receiving an applied stress;
one or more sensing branches in communication with the first region, each sensing branch comprising:
an active piezoresistive area;
three or more independent conduction paths configured in electrical communication with different regions of the active piezoresistive area;
one or more trimmable links configured in parallel communication with at least two of the three or more conduction paths; and
two or more connection terminals in electrical communication with the three or more conduction paths;

wherein one or more of the trimmable links are configured to be selectively opened to set a value of nominal impedance associated with the active piezoresistive area based on a desired impedance of the configurable transducer.

9. The configurable transducer system of claim 8 , further comprising:
an input voltage source connected to one or more of the connection terminals.

10. The configurable transducer system of claim 8 , wherein the three or more conduction paths are in electrical communication with different and independent regions of the active piezoresistive area such that corresponding finite nominal impedances are between each of the three or more conduction paths.

11. The configurable transducer system of claim 8 , wherein each sensing branch further includes:
at least one configurable resistor in electrical communication with one or more of the conduction paths and one or more of the connection terminals, wherein the at least one configurable resistor includes one or more of:
a configurable resistor trimmable link in a series configuration, and
a configurable resistor trimmable link in a parallel configuration; and

wherein the selectively opening includes opening one or more configurable resistor trimmable links to set a value of nominal impedance associated the configurable resistor.

12. The configurable transducer system of claim 8 , wherein the one or more sensing branches form a Wheatstone bridge configuration.

13. The configurable transducer system of claim 8 , wherein the first region comprises a diaphragm.

14. The configurable transducer system of claim 8 , wherein the zero or more of the trimmable links include one or more series and parallel shorts.

15. The configurable transducer system of claim 8 , wherein the configurable transducer is configured for measuring a pressure.

16. The configurable transducer system of claim 8 , further comprising one or more low-TC (low-temperature coefficient) resistors.

17. The configurable transducer system of claim 8 , wherein the trimmable links are laser trimmable.

Assignees

• Kulite Semiconductor Products Inc

Inventors

• Hilton John P

Classifications

• G01L9/0052 Primary

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L9/06

  of piezo-resistive devices · CPC title