Method of placing window in thin polishing pad

Patent metadata

Field	Value
Publication number	US-10213894-B2
Application number	US-201615054849-A
Country	US
Kind code	B2
Filing date	Feb 26, 2016
Priority date	Feb 26, 2016
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

A polishing pad includes a polishing layer stack that has a polishing surface, a bottom surface, and an aperture from the polishing surface to the bottom surface. The polishing layer stack includes a polishing layer that has the polishing surface. A fluid-impermeable layer spans the aperture and the polishing pad. A first adhesive layer of a first adhesive material is in contact with and secures the bottom surface of the polishing layer to the fluid-impermeable layer. The first adhesive layer spans the aperture and the polishing pad. The light-transmitting body is positioned in the aperture and has a lower surface in contact with, is secured to the first adhesive layer, and is spaced apart from a side-wall of the aperture by a gap. An adhesive sealant of a different second material is disposed in and laterally fills the gap.

First claim

What is claimed is:

1. A method of making a polishing pad, comprising:
forming an aperture through a polishing layer stack from a polishing surface to a bottom surface of the polishing layer stack to expose a first adhesive layer that is positioned on and contacts the bottom surface of the polishing layer stack and spans the aperture and the polishing pad, the polishing layer stack including a polishing layer having the polishing surface, wherein the first adhesive layer secures the bottom surface of the polishing layer stack to a fluid-impermeable layer that layer spans the aperture and the polishing pad, wherein forming the aperture comprises peeling a disposable cover away from the first adhesive layer while leaving a majority of the first adhesive layer in the aperture on the fluid-impermeable layer, wherein the disposable cover is a different material than the polishing layer;
positioning a pre-formed light-transmitting body in the aperture in the polishing layer stack such that a lower surface of the light-transmitting body contacts and adheres to the first adhesive layer;
dispensing an adhesive sealant into a gap that separates the light-transmitting body from side-walls of the aperture to laterally fill the gap; and
curing the adhesive sealant.

Assignees

• Applied Materials Inc

Inventors

• Hu Yongqi
• Narendrnath Kadthala Ramaya
• Terry Thomas Lawrence

Classifications

• B24B37/205 Primary

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B37/24

  characterised by the composition or properties of the pad materials · CPC title