Composite substrate

Patent metadata

Field	Value
Publication number	US-10211389-B2
Application number	US-201615001501-A
Country	US
Kind code	B2
Filing date	Jan 20, 2016
Priority date	Jul 25, 2013
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

In the composite substrate 10 , the piezoelectric substrate 12 and the support substrate 14 are bonded by direct bonding using an ion beam. One surface of the piezoelectric substrate 12 is a negatively-polarized surface 12 a and another surface of the piezoelectric substrate 12 is a positively-polarized surface 12 b . An etching rate at which the negatively-polarized surface 12 a is etched with a strong acid may be higher than an etching rate at which the positively-polarized surface 12 b is etched with the strong acid. The positively-polarized surface 12 b of the piezoelectric substrate 12 is directly bonded to the support substrate 14 . The negatively-polarized surface 12 a of the piezoelectric substrate 12 may be etched with the strong acid.

First claim

What is claimed is:

1. A composite substrate comprising:
a piezoelectric substrate, one surface of which is a negatively-polarized surface and another surface of which is a positively-polarized surface; and
a support substrate bonded to the positively-polarized surface of the piezoelectric substrate by direct bonding;
wherein the piezoelectric substrate is a lithium tantalate substrate or a lithium niobate substrate, and the support substrate is a silicon substrate or a glass substrate.

2. The composite substrate according to claim 1 ,
wherein the negatively-polarized surface of the piezoelectric substrate is etched with a strong acid, and
wherein an etching rate at which the negatively-polarized surface is etched with the strong acid is higher than an etching rate at which the positively-polarized surface is etched with the strong acid, and an etching rate at which the support substrate is etched with the strong acid is higher than the etching rate at which the negatively-polarized surface is etched with the strong acid.

3. The composite substrate according to claim 2 ,
wherein the strong acid is hydrofluoric nitric acid or hydrofluoric acid.

4. The composite substrate according to claim 1 ,
wherein the support substrate has a thermal expansion coefficient smaller than a thermal expansion coefficient of the piezoelectric substrate.

Assignees

• Ngk Insulators Ltd
• Ngk Ceram Device Co Ltd

Inventors

• Tai Tomoyoshi
• Hori Yuji
• Yamadera Takahiro
• Hattori Ryosuke
• Suzuki Kengo

Classifications

• H03H3/10

  for obtaining desired frequency or temperature coefficient · CPC title

• H03H9/02834

  of temperature influence (cut angles H03H9/02543) · CPC title

• H03H9/02574 Primary

  of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate · CPC title

• H01L41/277

  Electricity · mapped topic

• H01L41/312

  Electricity · mapped topic