Nano avalanche photodiode architecture for photon detection

Patent metadata

Field	Value
Publication number	US-10211359-B2
Application number	US-201615356152-A
Country	US
Kind code	B2
Filing date	Nov 18, 2016
Priority date	Feb 20, 2014
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

An integrated circuit includes a substrate material that includes an epitaxial layer, wherein the substrate material and the epitaxial layer form a first semiconductor material with the epitaxial layer having a first conductivity type. At least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material forms a junction crossing region with the first semiconductor material. The nanowire and the first semiconductor material form an avalanche photodiode (APD) in the junction crossing region to enable single photon detection. In an alternative configuration, the APD is formed as a p-i-n crossing region where n represents an n-type material, i represents an intrinsic layer, and p represents a p-type material.

First claim

What is claimed is:

1. A method comprising:
forming a substrate material;
forming an epitaxial layer on the substrate material, wherein the substrate material and the epitaxial layer form a first semiconductor material having a first conductivity type; and
forming at least one nanowire on the epitaxial layer, the at least one nanowire comprising a second semiconductor material having a second conductivity type doped differently than the first conductivity type of the first semiconductor material, wherein the at least one nanowire is formed on the epitaxial layer to run from a given edge of the first semiconductor material to an opposite edge of the semiconductor material to form a junction crossing region with the first semiconductor material, the at least one nanowire and the first semiconductor material forming an avalanche photodiode (APD) in the junction crossing region to enable single photon detection.

2. The method of claim 1 , wherein the first conductivity type is a p-type and the second conductivity type is an n-type or the first conductivity type is an n-type and the second conductivity type is a p-type.

3. The method of claim 1 , wherein forming the at least one nanowire on the epitaxial layer comprises growing the at least one nanowire on the epitaxial layer via deposition or growing the at least one nanowire at a different location than the epitaxial layer and placing the at least one nanowire on the epitaxial layer after growth.

4. The method of claim 1 , further comprising forming a Bragg mirror above the substrate and below the epitaxial layer to increase detector sensitivity.

5. The method of claim 1 , wherein the APD forms a resonant cavity to increase photon detection sensitivity of the APD.

6. The method of claim 1 , wherein the at least one nanowire is fabricated at about 2 to 100 nanometers in diameter and 5 to 250 nanometers in length.

7. The method of claim 1 , wherein forming the at least one nanowire on the epitaxial layer comprises forming a plurality of nanowires on the epitaxial layer to form a plurality of junction crossing regions with the first semiconductor material in a given area of the epitaxial layer, wherein the plurality of junction crossing regions form an integrated circuit pixel for photon detection.

8. The method of claim 7 , further comprising forming a plurality of junction crossing regions with the first semiconductor material in respective areas of the epitaxial layer to form a plurality of integrated circuit pixels on the epitaxial layer to form a pixilated sensor array for photon detection.

9. The method of claim 1 , wherein at least one of the first or second semiconductor materials is Silicon (Si) and at least one of the first or second semiconductor materials is selected from a group consisting of: Ge, InGaAs, InGaAs x P 1-x , CdS, CdSe ZnS, and ZnSe to enable photon detection in the near infrared wavelength range, wherein x is a number greater than or equal to zero and where (Ge) is Germanium, (In) is Indium, (Ga) is Gallium, (As) is Arsenic, (P) is Phosphorus, (Cd) is Cadmium, (Se) is Selenium, (Zn) is Zinc, and (S) is Sulfur.

10. The method of claim 1 , wherein at least one of the first or second semiconductor materials is Si and at least one of the first or second semiconductor materials is selected from a group consisting of: PbS, PbSe, InSb, GaSb, CdS, CdSe, HgCdSe, HgCdS, and HgCdTe to enable photon detection in the medium or long infrared wavelength range, where (Pb) is Lead, (Sb) is Antimony, (Hg) is Mercury, (S) is sulfur, (Se) is Selenium, (In) is Indium, (Ga) is Gallium, (Cd) is Cadmium, and (Te) is Tellurium.

11. The method of claim 1 , wherein at least one of the first or second semiconductor materials is Si and at least one of the first or second semiconductor materials is selected from a group consisting of: PbSe x S 1-x , Cd x Hg 1-x S, Pb x Hg 1-x S, CdSe x S 1-x , As 2 S x Se 5-x , GeSe x S y Te (1-x-y) , CuAlS 2-x Se x , As x Se 1-x Ge 5 , AgGaSe 2 —GeSe 2 , and AgGaS 2 —GeS 2 to enable tunable wavelength characteristics, wherein x and y are numbers greater than or equal to zero and where (Cu) is Copper, (Al) is Aluminum, (As) is Arsenic, (Ge) is Germanium, (Pb) is Lead, (S) is sulfur, (Se) is Selenium, (In) is Indium, (Ga) is Gallium, (Cd) is Cadmium, (Sb) is Antimony, (Hg) is Mercury and (Ag) is Silver.

Assignees

• Singh Narsingh B
• Veliadis John V
• Nechay Bettina
• Berghmans Andre
• Knuteson David J
• Kahler David
• Wagner Brian
• Sherwin Marc
• Northrop Grumman Systems Corp

Inventors

• Singh Narsingh B
• Veliadis John V
• Nechay Bettina
• Berghmans Andre
• Knuteson David J
• Kahler David
• Wagner Brian
• Sherwin Marc

Classifications

• H01L31/02327

  Electricity · mapped topic

• H01L27/1446

  Electricity · mapped topic

• H01L31/18

  Electricity · mapped topic

• H01L31/0336

  Electricity · mapped topic

• H01L31/1075 Primary

  Electricity · mapped topic