Semiconductor devices with raised doped crystalline structures

Patent metadata

Field	Value
Publication number	US-10211327-B2
Application number	US-201515567579-A
Country	US
Kind code	B2
Filing date	May 19, 2015
Priority date	May 19, 2015
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

Semiconductor devices including an elevated or raised doped crystalline structure extending from a device layer are described. In embodiments, III-N transistors include raised crystalline n+ doped source/drain structures on either side of a gate stack. In embodiments, an amorphous material is employed to limit growth of polycrystalline source/drain material, allowing a high quality source/drain doped crystal to grow from an undamaged region and laterally expand to form a low resistance interface with a two-degree electron gas (2DEG) formed within the device layer. In some embodiments, regions of damaged GaN that may spawn competitive polycrystalline overgrowths are covered with the amorphous material prior to commencing raised source/drain growth.

First claim

What is claimed:

1. A transistor, comprising:
a non-silicon device material disposed over a crystalline substrate;
a gate stack disposed on a top surface of the device material and over a channel region of the device material;
an amorphous material disposed over the substrate and adjacent to, and covering a portion of, a sidewall of the device material;
a raised doped crystalline material disposed on the top surface of the device material, and wrapping around the sidewall of the device material; and
contact metallization coupled to the raised doped crystalline material.

2. The transistor of claim 1 , wherein the raised doped crystalline material includes a single crystal extending between the top surface and sidewall of the device material.

3. The transistor of claim 1 , wherein the raised doped crystalline material has a dislocation density no more than 10 12 cm −2 .

4. The transistor of claim 1 , wherein the device material comprises a surface damaged region; and
the amorphous material covers at least some of the surface damaged region.

5. The transistor of claim 1 , wherein:
the non-silicon device material comprises an III-N heterojunction that forms a 2DEG within the device material;
the raised doped crystalline material comprises an n+ doped III-N crystal disposed on the c-plane of the device material; and
the n+ doped III-N crystal wraps around the sidewall of the device material, extending over the III-N heterojunction and electrically coupling with the 2DEG.

6. The transistor of claim 5 , wherein:
the III-N heterojunction comprises an AlN polarization layer disposed on GaN;
the raised doped crystalline material is disposed over a top surface of the AlN polarization layer; and
at least a portion of the raised doped crystalline material wrapping around the sidewall is disposed directly on GaN.

7. The transistor of claim 5 , wherein:
the amorphous material is disposed within a recess in the device material; and
a top surface of the amorphous material is recessed below the 2DEG.

8. The transistor of claim 7 , wherein the raised doped crystalline material is in direct contact with the amorphous material.

9. The transistor of claim 5 , wherein the device material comprises a raised III-N crystalline body extending laterally over a portion of the amorphous material.

10. The transistor of claim 9 , wherein the raised doped crystalline material is in direct contact with the amorphous material.

11. The transistor of claim 10 , wherein:
the substrate is silicon;
the amorphous material and the device material are disposed over a (100 ) surface of the substrate;
the gate stack comprises a gate electrode disposed on a gate dielectric; and
the gate stack is insulated from the raised doped crystalline material by a dielectric spacer.

12. A semiconductor device, comprising:
a crystalline substrate;
an amorphous material disposed over the substrate;
an elevated structure having crystallinity different than the substrate and disposed in one or more first trench in the amorphous material and laterally extending over a portion of the amorphous material;
one or more device layers having the same crystallinity as the elevated structure disposed over a top surface of the elevated structure, but absent from at least a portion of a sidewall of the elevated structure;
a raised doped source/drain material having the same crystallinity as the elevated structure disposed over a top surface of the one or more device layers, and further wrapping around the elevated structure to contact the portion of a sidewall not covered by the one or more device layers; and
contact metallization coupled to the raised source/drain material.

13. The semiconductor device of claim 12 , wherein:
the raised doped source/drain material comprises a single crystal extending between the sidewall and the contact metallization.

14. The semiconductor device of claim 12 , wherein a number of crystal defects at the sidewall is greater than the number of crystal defects at the top surface of the one or more device layers.

15. The semiconductor device of claim 14 , wherein a dislocation density of the raised doped source/drain material is not more than one order of magnitude greater than that of the elevated structure.

16. The semiconductor device of claim 15 , wherein the raised doped source/drain material has a dislocation density no more than 10 12 cm −2 .

Assignees

• Intel Corp

Inventors

• Radosavljevic Marko
• Dasgupta Sansaptak
• Gardner Sanaz K
• Sung Seung Hoon
• Then Han Wui
• Chau Robert S

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3256

  Microstructure · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/276

  Lateral overgrowth · CPC title