Photonic chip with reflecting structure for folded optical path

Patent metadata

Field	Value
Publication number	US-10209442-B2
Application number	US-201815978418-A
Country	US
Kind code	B2
Filing date	May 14, 2018
Priority date	May 17, 2017
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

Optical coupling of a photonic chip to an external device by use of a system with two lenses. The photonic chip comprises a light guide layer supported by a substrate and covered by an encapsulation layer, and a lens integrated into either the front face or the back face. The light guide layer includes a wave guide coupled to a surface grating coupler. An arrangement of one or several reflecting structures each on either the front face or the back face, is provided. This arrangement comprises a reflecting structure on the back face and is made so as to assure propagation of light between the surface grating coupler, and the lens along an optical path having at least one fold. The invention also covers the fabrication method of such a photonic chip.

First claim

The invention claimed is:

1. A photonic chip comprising:
a light guide layer supported by a substrate and covered with an encapsulation layer,
a front face on the side of the encapsulation layer, and
a back face on the side of the substrate,

wherein the light guide layer includes a waveguide and a surface grating coupler, the surface grating coupler being configured to receive light from the waveguide and to form a light beam directed towards either the front face or the back face,
wherein the photonic chip further comprises a lens which is integrated at either the front face or the back face and which is configured to modify the mode size of light passing through it from or to the surface grating coupler, and
wherein the photonic chip further comprises an arrangement of one or several reflecting structures, each on either the front face or the back face, said arrangement comprising a reflecting structure on the back face and being made so as to propagate light between the surface grating coupler and the lens along an optical path having at least one fold.

2. The photonic chip according to claim 1 , in which a reflecting structure of said arrangement is a metallic layer arranged on either the front face or the back face.

3. The photonic chip according to claim 1 , in which a reflecting structure of said arrangement is a distributed Bragg grating formed on either the front face or the back face.

4. The photonic chip according to claim 1 , in which the lens is integrated on the front face, the surface grating coupler is configured to redirect the light beam towards the back face and said arrangement comprises along the optical path a single reflecting structure on the back face.

5. The photonic chip according to claim 1 , in which the lens is integrated on the front face, the surface grating coupler is configured to redirect the light beam towards the front face and said arrangement comprises along the optical path a first reflecting structure on the front face and a second reflecting structure on the back face.

6. The photonic chip according to claim 1 , in which the lens is integrated on the back face, the surface grating coupler is configured to redirect the light beam towards the back face and said arrangement comprises along the optical path a first reflecting structure on the back face and a second reflecting structure on the front face.

7. The photonic chip according to claim 1 , in which the lens is integrated on the back face, the surface grating coupler is configured to redirect the light beam towards the front face and said arrangement comprises along the optical path a first reflecting structure on the front face, a second reflecting structure on the back face and a third reflecting structure on the front face.

8. The photonic chip according to claim 1 , in which the encapsulation layer is a silicon oxide layer, a silicon nitride layer or a layer composed of a mix of silicon oxide and silicon nitride.

9. The photonic chip according to claim 1 , in which the light guide layer is supported on an insulation layer and in which an anti-reflection layer is interposed between the substrate and the insulation layer.

10. The photonic chip according to claim 1 , in which the substrate is made of glass.

11. A method of fabricating a photonic chip comprising a surface grating coupler and having a front face and a back face, the method including the step of forming a lens on either the front face or the back face, said lens being configured to modify the mode size of light passing through it from or to the surface grating coupler, and the step of forming an arrangement of one or several reflecting structures each on either the front face or the back face, said arrangement comprising a reflecting structure on the back face and being formed to propagate light between the surface grating coupler and the lens along an optical path having at least one fold.

Assignees

• Commissariat Energie Atomique
• Commisariat A Lenergie Atomique Et Aux Energies Alternatives

Inventors

• Menezo Sylvie
• Bernabe Stéphane
• Grosse Philippe

Classifications

• G02B6/12002 Primary

  Three-dimensional structures · CPC title

• G02B6/4214

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title

• G02B6/34

  utilising prism or grating {(G02B6/293 takes precedence)} · CPC title

• G02B2006/12102

  Lens · CPC title

• G02B6/12004

  Combinations of two or more optical elements · CPC title