Production method for deposition mask

Patent metadata

Field	Value
Publication number	US-10208373-B2
Application number	US-201514714175-A
Country	US
Kind code	B2
Filing date	May 15, 2015
Priority date	Nov 15, 2012
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

A production method for a deposition mask is provided. The production method includes the steps of: forming a mask member having a structure in which a thin-board magnetic metal member having a through hole and a resin film contact tightly with each other; forming a mark that has a specified depth by irradiating a part of the film through the through hole of the mask member with laser beams; and forming an opening pattern that penetrates the film by irradiating a predetermined position with laser beams, using the mark as a reference.

First claim

What is claimed is:

1. A production method for a deposition mask, the deposition mask comprising:
a resin film in which multiple opening patterns each having a shape and dimensions that are the same as those of a corresponding one of multiple thin film patterns to be formed in a substrate are formed at positions corresponding to the multiple thin film patterns; and
a sheet magnetic metal member in which multiple through holes each sized to include the corresponding opening pattern are formed, the magnetic metal member contacting tightly with the resin film,
the production method comprising the sequential steps of:
forming a mask member having a structure in which the magnetic metal member having the through holes and the resin film before forming the opening patterns, contact tightly with each other;
placing the mask member and a reference substrate on a stage of a laser machining apparatus with the resin film of the mask member contacting tightly with the reference substrate, the reference substrate having a reference pattern, the laser machining apparatus including a first mask in which multiple first through holes for forming the opening patterns are provided at predetermined positions around, as a center, an optical axis of the laser machining apparatus, and a second mask in which a second through hole for forming a mark having a specified shape and a specified depth is provided so that the second through hole is centered on the optical axis;
using an imaging device included in the laser machining apparatus to image the reference pattern and centering the reference pattern on the optical axis;
forming the mark by irradiating a part of the film through a corresponding one of the through holes of the mask member with a laser beam using the second through hole of the second mask, the part being positioned correspondingly to that of the reference patterns of the reference substrate;
using the imaging device to image the mark and centering the mark on the optical axis; and
forming, at the same time, the opening patterns that penetrate the film by irradiating predetermined positions around the mark as a center with laser beams using the first through holes of the first mask.

2. The production method for the deposition mask, according to claim 1 ,
wherein the magnetic metal member includes multiple through holes separated by bridges and arranged in a line, multiple lines of which are provided at a specified array pitch, and
wherein one opening pattern is formed in each of the through holes.

3. The production method for the deposition mask, according to claim 1 , wherein multiple opening patterns are formed in one through hole.

4. The production method for the deposition mask, according to claim 1 , wherein the mark is formed by shots of laser beams, the number of which is less than the number of shots of the laser beams irradiated to form the opening pattern.

5. The production method for the deposition mask, according to claim 1 , wherein the mark is formed with the laser beams with irradiation energy lower than that of the laser beams for forming the opening pattern.

6. The production method for the deposition mask, according to claim 1 , further comprising, between the step of forming the mask member and the step of forming the mark, the step of connecting one end face of a frame having an opening sized to include the multiple through holes of the magnetic metal member, with a peripheral part of the magnetic metal member on a side opposite to a side on which the film contacts tightly.

Assignees

• V Tech Co Ltd

Inventors

• Mizumura Michinobu

Classifications

• C23C16/042

  using masks · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23F1/02

  Local etching · CPC title

• B23K26/066

  by using masks · CPC title

• B05B15/00

  Details of spraying plant or spraying apparatus not otherwise provided for; Accessories · CPC title