Substrate lifting device, substrate packaging apparatus and substrate packaging method

Patent metadata

Field	Value
Publication number	US-10205133-B2
Application number	US-201615329166-A
Country	US
Kind code	B2
Filing date	Jul 28, 2016
Priority date	Jan 21, 2016
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

A substrate lifting device, a substrate packaging apparatus and a substrate packaging method are provided. The substrate lifting device is for lifting a first substrate when the first substrate is aligned to a second substrate, and includes a rotatable mechanism, a rotatable rod, a nozzle and a gas providing mechanism. The rotatable rod is rotatable about the rotatable mechanism. The nozzle is on the rotatable rod. The gas providing mechanism ejects a gas from the nozzle to lift the first substrate.

First claim

What is claimed is:

1. A substrate packaging method for packaging a first substrate and a second substrate using
a substrate packaging apparatus which comprises: a machine table; and a substrate lifting device, wherein the substrate lifting device comprises: a rotatable mechanism, a rotatable rod, a nozzle and a gas providing mechanism; wherein the rotatable rod is rotatable about the rotatable mechanism, the nozzle is on the rotatable rod, and the gas providing mechanism ejects a gas from the nozzle to lift the first substrate; and the nozzle of the substrate lifting device is oriented towards the first substrate,
wherein the substrate packaging method comprises:
detecting whether the first substrate is absorbed by the machine table of the substrate packaging apparatus or not;
rotating the rotatable rod of the substrate packaging apparatus to locate between the first substrate and the second substrate when determining that the first substrate is not absorbed by the machine table; and
opening the nozzle of the substrate packaging apparatus to enable gas ejected out of the nozzle to flow upwardly and lift the first substrate.

2. The substrate packaging method according to claim 1 , wherein the first substrate is an OLED evaporation substrate; the substrate lifting device of the substrate packaging apparatus comprises a plurality of nozzles; a gas pipe is on the rotatable rod and the plurality of nozzles is in communication with the gas pipe and is arranged along the gas pipe; the substrate lifting device further comprises a plurality of sliders that is slidable along the rotatable rod and the plurality of nozzles is on the plurality of sliders; and the rotatable rod is calibrated;
the substrate packaging method further comprises:
adjusting the plurality of sliders to enable the gas ejected out of the plurality of nozzles to reach regions of the first substrate except for a region of an OLED on the first substrate.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Sun Zhongyuan
• Zhou Xiang

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0438

  Apparatus for making assemblies not otherwise provided for, e.g. package constructions · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H01L21/6838

  Electricity · mapped topic

• H01L51/56 Primary

  Electricity · mapped topic