Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US10203598B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10203598-B2 |
| Application number | US-201615295914-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 17, 2016 |
| Priority date | Oct 16, 2015 |
| Publication date | Feb 12, 2019 |
| Grant date | Feb 12, 2019 |
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The disclosure provides a method of inking a polymer pen lithography tip array (“PPL tip array”), including applying an ink composition to a PPL tip array using at least two spray applicators to deposit the ink as a non-uniform ink layer. The disclosure further provides a method of depositing at least two ink compositions on PPL tip array, including applying a first ink to a first defined area using a first spray applicator, and applying a second ink to a second defined area using a second spray applicator. The disclosure further provides a method of scaling a linear ink composition gradient provided by at least two spray applicators to a PPL tip array having a length, L, including positioning the spray applicators at a distance of about 5.0 L to about 8.0 L relative to the surface of the PPL tip array, positioning the spray applicators at a distance of about 0.5 L to about 3.0 L relative to each other, and applying an ink composition.
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What is claimed is: 1. A method of inking a polymer pen lithography tip array (“PPL tip array”), comprising: applying an ink composition to a defined area of the PPL tip array using at least two spray applicators to deposit the ink composition as a non-uniform ink layer onto the PPL tip array. 2. The method of claim 1 , wherein the non-uniform ink layer comprises a concentration gradient of an ink composition. 3. The method of claim 1 , wherein the non-uniform ink layer comprises a compositional gradient of two or more ink compositions applied by the at least two spray applicators. 4. The method of claim 2 , wherein the gradient comprises a linear gradient. 5. The method of claim 2 , wherein the gradient comprises a non-linear gradient. 6. The method of claim 2 , wherein the non-uniform ink layer comprises a linear gradient and a non-linear gradient. 7. The method of claim 1 , wherein the non-uniform ink layer comprises a non-uniform quantity of ink applied across the array. 8. The method of claim 1 , wherein the non-uniform ink layer comprises a compositional gradient of two or more ink compositions across a first dimension of the PPL array and an ink quantity gradient across a second dimension of the PPL array. 9. A method of depositing at least two ink compositions on a polymer pen lithography tip array (“PPL tip array”), comprising: applying a first ink composition to a first defined area of the PPL tip array using a first spray applicator; and applying a second ink composition to a second defined area of the PPL tip array using a second spray applicator, thereby providing a mixture of ink compositions on the PPL tip array. 10. The method of claim 9 , wherein the first defined area and the second defined area are separate. 11. The method of claim 9 , wherein the first defined area and the second defined area overlap. 12. The method of claim 9 , wherein the mixture of ink compositions on the PPL tip array comprises a non-uniform ink layer. 13. The method of claim 12 , wherein the non-uniform ink layer comprises an ink compositional gradient. 14. The method of claim 13 , wherein the gradient comprises a linear gradient. 15. The method of claim 13 , wherein the gradient comprises a non-linear gradient. 16. The method of claim 13 , wherein the non-uniform ink layer comprises a linear gradient and a non-linear gradient. 17. The method of claim 9 , wherein the first composition and second composition are applied concurrently. 18. The method of claim 12 , wherein the non-uniform ink layer comprises a compositional gradient of the first and second ink compositions across a first dimension of the PPL array and an ink quantity gradient across a second dimension of the PPL array. 19. A method of scaling a linear ink compositional gradient provided by at least two spray applicators to a polymer pen lithography tip array (“PPL tip array”) having a length, L, comprising: positioning the at least two spray applicators at a distance of about 5.0 L to about 8.0 L relative to the surface of the PPL tip array; positioning the at least two spray applicators at a distance of about 0.5 L to about 3.0 L relative to each other; and applying an ink composition to the PPL tip array from the at least two spray applicators. 20. The method of claim 19 , wherein the spray applicators are positioned at a distance of about 6.20 L to about 6.30 L relative to the surface of the PPL tip array.
Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title
compositions varying with a gradient parallel to the surface · CPC title
Special surface effect · CPC title
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