Ring modulators with low-loss and large free spectral range (fsr) on a silicon-on-insulator (soi) platform
US-2024369864-A1 · Nov 7, 2024 · US
US10203583B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10203583-B2 |
| Application number | US-201815906280-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 27, 2018 |
| Priority date | Aug 21, 2015 |
| Publication date | Feb 12, 2019 |
| Grant date | Feb 12, 2019 |
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Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.
Opening claim text (preview).
What is claimed is: 1. An optical waveguide element comprising: a substrate; and a waveguide layer formed on the substrate and comprising lithium niobate, wherein the waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part, wherein a maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part, wherein a width of the ridge part is 0.1 times or more and less than 1.0 time the wavelength of the light, and wherein a thickness of the ridge part is 0.6 times or more and less than 1.5 times the wavelength of the light. 2. The optical waveguide element as claimed in claim 1 , wherein the maximum thickness of the slab part is 0.2 times or more the wavelength of the light. 3. The optical waveguide element as claimed in claim 1 , wherein sides of the ridge part are inclined by 70° or more. 4. An optical modulator comprising: an optical waveguide element including: a substrate; and a waveguide layer formed on the substrate and comprising lithium niobate; and a multimode interference branching waveguide in which a propagation loss is larger in a m=1 mode than in a m=0 mode, the multimode interference branching waveguide being connected to the optical waveguide element, wherein the waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part, and wherein a maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part. 5. The optical modulator as claimed in claim 4 , wherein the maximum thickness of the slab part is 0.2 times or more the wavelength of the light. 6. The optical modulator as claimed in claim 4 , wherein a thickness of the ridge part is 0.6 times or more and less than 1.5 times the wavelength of the light.
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