Directed self-assembly of electronic components using diamagnetic levitation

Patent metadata

Field	Value
Publication number	US-10199247-B2
Application number	US-201515519190-A
Country	US
Kind code	B2
Filing date	Oct 16, 2015
Priority date	Oct 16, 2014
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

Embodiments of the invention relate generally to directed self-assembly (DSA) and, more particularly, to the DSA of electronic components using diamagnetic levitation.

First claim

What is claimed is:

1. A method of assembling a plurality of diamagnetic components, the method comprising:
depositing a plurality of diamagnetic components onto a magnetic stage, the magnetic stage comprising a plurality of magnets arranged in an array; and
applying a vibratory force to the magnetic stage,
wherein, applying the vibratory force moves at least one of the plurality of diamagnetic components to a stable levitation node of the magnetic stage.

2. The method of claim 1 , wherein the plurality of magnets are arranged in an array selected from a group consisting of: a checkerboard array with alternating north and south poles and a two-dimensional Halbach array.

3. The method of claim 1 , wherein the plurality of magnets includes at least one magnet selected from a group consisting of: neodymium magnets and samarium-cobalt magnets.

4. The method of claim 1 , wherein applying the vibratory force includes repeatedly applying the vibratory force.

5. The method of claim 1 , wherein applying the vibratory force causes each of the stable levitation nodes to be filled by no more than one diamagnetic component.

6. The method of claim 1 , wherein the number of diamagnetic components is greater than the number of stable levitation nodes, such that application of the vibratory force causes a single diamagnetic component to fill each of the stable levitation nodes and any diamagnetic components not filling a stable levitation node to fall off the magnetic stage.

7. The method of claim 1 , wherein each of the diamagnetic components includes a layer of non-diamagnetic material atop a layer of diamagnetic material.

8. The method of claim 7 , further comprising:
applying an additional vibratory force to the magnetic stage, such that the plurality of diamagnetic components acquire a common vertical orientation.

9. The method of claim 8 , wherein the common vertical orientation is defined as the layer of diamagnetic material being disposed between the magnetic stage and the layer of non-diamagnetic material.

10. The method of claim 8 , wherein the additional vibratory force includes a series of short vibratory pulses, each series separated by a pause.

11. The method of claim 1 , further comprising:
transferring a portion of the plurality of diamagnetic components to a substrate.

12. The method of claim 11 , wherein the transferring includes:
applying a substrate to the portion of the plurality of diamagnetic components; and
fixing the substrate to each of the diamagnetic components to which the substrate is applied.

13. The method of claim 1 , further comprising:
removing the layer of diamagnetic material from the layer of non-diamagnetic material of each of the diamagnetic components transferred to the substrate.

14. The method of claim 13 , wherein the transferring includes:
placing a first substrate between the magnetic stage and the portion of the plurality of diamagnetic components;
transferring the portion of the plurality of diamagnetic components to a surface of the first substrate;
placing a second substrate above the portion of the plurality of diamagnetic components;
transferring the portion of the plurality of diamagnetic components to a surface of the second substrate; and
fixing the portion of the plurality of diamagnetic components to the surface of the second substrate.

15. The method of claim 14 , further comprising:
removing the diamagnetic material from the layer of non-diamagnetic material of each of the diamagnetic components transferred to the surface of the second substrate.

16. The method of claim 1 , wherein at least one of the plurality of diamagnetic components is selected from a group consisting of: a semiconductor die bonded to a pyrolytic graphite (PG) sheet and a gallium nitride (GaN) light emitting diode (LED) bonded to a PG sheet.

17. The method of claim 16 , wherein the PG sheet has a thickness between about 300 micrometers and about 1000 micrometers.

18. The method of claim 17 , wherein the PG sheet has a thickness between about 400 micrometers and about 700 micrometers.

19. A system for directed self-assembly of diamagnetic components, the system comprising:
a magnetic stage comprising:
a plurality of magnetic devices arranged in an array with alternating and opposite magnetic orientations; and
a surface disposed above the plurality of magnetic devices; and

at least one device operable to deliver a vibratory force to the magnetic stage,
wherein the vibratory force is sufficient to move a diamagnetic component on the surface of the magnetic stage to a stable levitation node of the magnetic stage.

20. A method of assembling a plurality of diamagnetic components, the method comprising:
depositing a plurality of diamagnetic components onto a magnetic stage, the magnetic stage comprising a plurality of magnets arranged in an array; and
repeatedly applying a vibratory force to the magnetic stage to move at least one of the plurality of diamagnetic components to one of a plurality of stable levitation nodes of the magnetic stage but no more than one diamagnetic component to each of the plurality of stable levitation nodes,
wherein the plurality of magnets are arranged in an array selected from a group consisting of: a checkerboard array with alternating north and south poles and a two-dimensional Halbach array and applying the vibratory force causes each of the stable levitation nodes to be filled by no more than one diamagnetic component.

Assignees

• Rensselaer Polytech Inst

Inventors

• Tkachenko Anton
• Lu James Jian-Qiang

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P14/00

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• H10W72/0198

  batch processes · CPC title

• H10P72/0438 Primary

  Apparatus for making assemblies not otherwise provided for, e.g. package constructions · CPC title

• H02N15/00

  Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for (electric or magnetic devices for holding work on machine tools B23Q3/15 {; monorail vehicle propulsion or suspension B60L13/00}; sliding or levitation devices for railway systems B61B13/08; material handling devices associated with conveyors incorporating devices with electrostatic or magnetic grippers B65G47/92; separating thin or filamentary articles from piles using magnetic force B65H3/16; delivering thin or filamentary articles from magnetic holders by air blast or suction B65H29/24; bearings using magnetic or electric supporting means F16C32/04; relieving bearing loads using magnetic means F16C39/06; magnets H01F7/00; dynamo-electric clutches or brakes H02K49/00 {; electric furnaces with simultaneous levitation and heating H05B6/32}) · CPC title