Ceramic heater, heater electrode, and method for manufacturing ceramic heater

Patent metadata

Field	Value
Publication number	US-10199245-B2
Application number	US-201313848776-A
Country	US
Kind code	B2
Filing date	Mar 22, 2013
Priority date	Mar 28, 2012
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

The electrostatic chuck includes a discoidal alumina ceramic substrate and a heater electrode and an electrostatic electrode embedded in the alumina ceramic substrate. The top surface of the alumina ceramic substrate is a wafer-mounting face. The heater electrode has a pattern, for example, of a single continuous line so as to realize electric wiring over the entire surface of the alumina ceramic substrate. Upon the application of a voltage, the heater electrode generates heat and heats the wafer W. The heater electrode is made of a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in molybdenum.

First claim

What is claimed is:

1. A ceramic heater, comprising:
an alumina ceramic substrate; and
a heater electrode embedded in the alumina ceramic substrate, the heater electrode comprising molybdenum,
wherein the heater electrode contains a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in the molybdenum.

2. The ceramic heater according to claim 1 , wherein the alumina ceramic substrate is manufactured by adding magnesium fluoride as a sintering aid to alumina particles and firing the alumina particles, and the heater electrode is manufactured by using an electrode material containing a molybdenum powder, a titanium powder, and an alumina powder together with an acrylic binder.

3. A heater electrode adapted to be embedded in a ceramic heater made of an alumina ceramic, the heater electrode comprising molybdenum,
wherein the heater electrode contains a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in the molybdenum.

4. A method for manufacturing a ceramic heater, comprising:
(a) charging a forming die with a slurry containing an alumina powder, magnesium fluoride serving as a sintering aid, a solvent, a dispersant, and a gelling agent, inducing a chemical reaction of the gelling agent in the forming die to cause gelation of the slurry, and removing a compact from the forming die, thus forming first and second ceramic compacts;
(b) drying, degreasing, and then calcining the first and second ceramic compacts to form first and second ceramic calcined compacts;
(c) printing a paste containing a molybdenum powder and a titanium powder to a surface of one of the first and second ceramic calcined compacts; and
(d) hot-press firing the first and second ceramic calcined compacts with the printed paste interposed therebetween at a temperature in the range of 1120° C. to 1300° C.;
the ceramic heater comprising an alumina ceramic substrate, and a heater electrode embedded in the alumina ceramic substrate, the heater electrode comprising molybdenum,
wherein the heater electrode contains a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in the molybdenum.

5. A method for manufacturing a ceramic heater, comprising:
(a) charging a forming die with a slurry containing an alumina powder, magnesium fluoride serving as a sintering aid, a solvent, a dispersant, and a gelling agent, inducing a chemical reaction of the gelling agent in the forming die to cause gelation of the slurry, and removing a compact from the forming die, thus forming first and second ceramic compacts;
(b) printing a paste containing a molybdenum powder and a titanium powder to a surface of one of the first and second ceramic compacts;
(c) drying, degreasing, and then calcining the first and second ceramic compacts to form first and second ceramic calcined compacts; and
(d) hot-press firing the first and second ceramic calcined compacts at a temperature in the range of 1120° C. to 1300° C. while a portion to which the paste is printed is interposed therebetween;
the ceramic heater comprising an alumina ceramic substrate, and a heater electrode embedded in the alumina ceramic substrate, the heater electrode comprising molybdenum,
wherein the heater electrode contains a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in the molybdenum.

6. The method for manufacturing a ceramic heater according to claim 4 , wherein the paste in an application of the paste is a mixture of a molybdenum powder, a titanium powder, an aluminum powder, and an acrylic binder.

7. The method for manufacturing a ceramic heater according to claim 5 , wherein the paste in an application of the paste is a mixture of a molybdenum powder, a titanium powder, an aluminum powder, and an acrylic binder.

8. The method for manufacturing a ceramic heater according to claim 4 , wherein the titanium powder is a ground powder.

9. The method for manufacturing a ceramic heater according to claim 5 , wherein the titanium powder is a ground powder.

10. The method for manufacturing a ceramic heater according to claim 4 , wherein the titanium powder has an average particle size in a range of 1.0 to 4.0 μm.

11. The method for manufacturing a ceramic heater according to claim 5 , wherein the titanium powder has an average particle size in a range of 1.0 to 4.0 μm.

Assignees

• Ngk Insulators Ltd

Inventors

• Nobori Kazuhiro
• Kimura Takuji
• Watanabe Reo

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H01L21/6831

  Electricity · mapped topic

• H01L21/67103 Primary

  Electricity · mapped topic

• H05B3/02

  Details · CPC title