Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner

Patent metadata

Field	Value
Publication number	US-10197925-B2
Application number	US-201414199758-A
Country	US
Kind code	B2
Filing date	Mar 6, 2014
Priority date	May 24, 2004
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

An optical module includes: a first holding device with a circumference extending in a first circumferential direction; and a plurality of first supporting devices configured to support a first optical element, the first supporting devices being fixed at the circumference of the first holding device. Along the first circumferential direction, at least one of the first supporting devices is located in a non-equidistant manner between two neighboring first supporting devices. The optical module is configured to be used in a microlithography objective.

First claim

The invention claimed is:

1. An optical module comprising:
a first holding device with a circumference extending in a first circumferential direction; and
a plurality of first bipods configured to fully support a first optical element, the first bipods being fixed at the circumference of the first holding device,
wherein:
for each first bipod, the bipod comprises a first leg and a second leg that is inclined relative to the first leg;
along the first circumferential direction, for each bipod: a) the first leg is followed by the second leg; and b) the second leg is followed by a first leg of the next first bipod;
along the first circumferential direction, at least one of the first bipods is located in a non-equidistant manner between two neighboring first bipods such that the first legs are unevenly distributed along the circumferential direction; and
the optical module is configured to be used in a microlithography objective.

2. The optical module of claim 1 , wherein the first optical element has a shape selected from a group consisting of a shape asymmetric along the first circumferential direction, a shape non rotationally symmetric along the first circumferential direction, a shape having a recess forming a light passage, and a shape having a recess causing an asymmetry of the optical element.

3. The optical module of claim 2 , wherein the optical module comprises more than two of the first bipods.

4. The optical module of claim 2 , wherein the optical module comprises three of the first bipods.

5. The optical module of claim 1 , further comprising a plurality of second supporting devices,
wherein:
the second supporting devices are configured to support a second optical element;
the second supporting devices are fixed at a circumference of the first holding device;
the first bipods do not contact the second supporting devices; and
the first optical element is separate from the second optical element, or the first optical element is non-contiguous with the second optical element.

6. The optical module of claim 5 , wherein, along the first circumferential direction, one of the first bipods is located in a non-equidistant manner between two neighboring second supporting devices.

7. The optical module of claim 5 , wherein:
a first assembly space is defined by a first shell formed if the first bipods were displaced through 360° about a central axis and along the first circumferential direction;
a second assembly space is defined by a second shell formed if the second supporting devices were displaced through 360° along the first circumferential direction; and
the outer surface of the first shell intersects the outer surface of the second shell so that the first assembly space intersects the second assembly space or penetrates the second assembly space.

8. The optical module of claim 7 , further comprising at least one third supporting device configured to support a third optical element, wherein the at least one third supporting device is fixed at a circumference of the first holding device, a third assembly space is defined by a third shell formed if the at least one third supporting device were displaced through 360° along the first circumferential direction, and the third assembly space intersects at least one of the first assembly space and the second assembly space.

9. The optical module of claim 7 , wherein:
the first shell has an outer surface having a first end located at the circumference of the first holding device at a first level along the central axis and a second end located adjacent the first optical element at a second level along the central axis;
the second end of the first shell is opposite the first end of the first shell and the second level being spaced from the first level along the central axis;
the second shell has an outer surface having a first end located at the circumference of the first holding device and a second end adjacent the second optical element; and
the second end of the second shell is opposite the first end of the second shell.

10. The optical module of claim 7 , wherein the first shell is in the shape of a truncated cone, and the second shell is in the shape of a truncated cone.

11. The optical module of claim 7 , wherein the first shell is in the shape of a cylinder, and the second shell is in the shape of a cylinder.

12. The optical module of claim 7 , wherein the first shell is in the shape of a toroidal body, and the second shell is in the shape of a toroidal body.

13. The optical module of claim 5 , wherein the first circumferential direction lies in a first plane and at least one of the following holds:
at least one device selected from the group consisting of the at least one first bipod and at least one of the second supporting devices extends at least in a first direction which runs perpendicular to the first circumferential direction in the first plane; and
at least one device selected from the group consisting of the at least one first bipod and at least one of the second supporting devices extends at least in a second direction which runs perpendicular to the first plane.

14. The optical module of claim 5 , wherein at least one supporting device is fixed detachably to the first holding device, the at least one supporting device being selected from the group consisting of one of the first bipods, one of the second supporting devices, and a combination thereof.

15. The optical module of claim 14 , wherein the at least one supporting device includes at least one connection element for the connection of the at least one supporting device to the first holding device.

16. The optical module of claim 5 , wherein:
at least one of the first bipods is connected to a first contact element of the first holding device,
at least one of the second supporting devices is connected to a second contact element of the first holding device,
the first contact element and the second contact element being arranged substantially in a common second plane, which runs parallel to a first plane in which the first circumferential direction lies.

17. The optical module of claim 5 , wherein at least one supporting device is fixed to the first holding device so as to be adjustable, the at least one supporting device being selected from the group consisting of the at least one first bipod, at least one of the second supporting devices, and a combination thereof.

18. The optical module of claim 5 , wherein at least one supporting device is designed for the adjustment of the position of the optical element supported by the at least one supporting device, the at least one supporting device being selected from the group consisting of one of the first bipods, at least one of the second supporting devices, and a combination thereof.

19. The optical module of claim 5 , wherein, for at least one optical element, a plurality of the first and second supporting devices are fixed to the first holding device and are designed for a statically determined support of the at least one optical element.

20. The optical module of claim 5 , wherein at least one supporting device is designed in the manner of a bipod, the at least one supporting device being selected from the group consisting of one of the first bipods, one of the second supporting devices, and a combination thereof.

21. The optical module of claim 5 , further comprising a mounting device for at least one optical element selected from the group consisting of the first optical element and the second optical

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Kugler Jens
• Sorg Franz
• Kwan Yim-Bun Patrick

Classifications

• G02B7/023

  permitting adjustment · CPC title

• G02B7/026

  using retaining rings or springs (G02B7/027 takes precedence) · CPC title

• G02B17/0615

  off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry · CPC title

• G02B7/00

  Mountings, adjusting means, or light-tight connections, for optical elements · CPC title

• G02B17/0605

  using two curved mirrors (G02B17/0668, G02B17/0694 take precedence) · CPC title