Carrier-resolved multiple dipole line magnet photo-hall system

Patent metadata

Field	Value
Publication number	US-10197640-B2
Application number	US-201615281968-A
Country	US
Kind code	B2
Filing date	Sep 30, 2016
Priority date	Sep 30, 2016
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

The present invention provides a high-sensitivity, carrier-resolved photo-Hall and photoelectromagnet (PEM) system utilizing multiple parallel dipole line (PDL) magnet systems. In one aspect of the invention, a Hall measurement apparatus is provided. The Hall measurement apparatus includes: a measurement chamber (e.g., a cryostat); a Hall module having at least one freely-rotating cylindrical magnet within the measurement chamber; a motor-driven cylindrical magnet adjacent to the at least one freely-rotating cylindrical magnet; an optical module for photo-Hall measurement, a set of electronics instruments and a data and signal analysis program for n-th harmonics lock-in detection of magnetoresistance signal and a control program. The system yields majority carrier type, density and mobility and, with illumination, minority carrier mobility and density.

First claim

What is claimed is:

1. A Hall measurement apparatus, comprising:
a measurement chamber;
at least one freely-rotating cylindrical magnet within the measurement chamber;
a motor-driven cylindrical magnet adjacent to the at least one freely-rotating cylindrical magnet; and
a sample mounting structure configured to mount a device under test adjacent to the at least one freely-rotating cylindrical magnet.

2. The Hall measurement apparatus, wherein the measurement chamber comprises a cryostat.

3. The Hall measurement apparatus of claim 1 , further comprising:
a motor; and
a drive shaft connecting the motor to the motor-driven cylindrical magnet.

4. The Hall measurement apparatus of claim 3 , wherein the motor is outside of the measurement chamber.

5. The Hall measurement apparatus of claim 4 , wherein the motor-driven cylindrical magnet is outside the measurement chamber.

6. The Hall measurement apparatus of claim 4 , wherein the motor-driven cylindrical magnet is inside the measurement chamber.

7. The Hall measurement apparatus of claim 6 , wherein the drive shaft is connected to the motor-driven cylindrical magnet inside the cryostat chamber and to the motor outside the measurement chamber.

8. The Hall measurement apparatus of claim 1 , wherein the measurement chamber and the sample mounting structure each comprise windows therein.

9. The Hall measurement apparatus of claim 1 , comprising at least one first freely-rotating cylindrical magnet and at least one second freely-rotating cylindrical magnet within the measurement chamber.

10. The Hall measurement apparatus of claim 9 , wherein the sample mounting structure is present in between the at least one first freely-rotating cylindrical magnet and the at least one second freely-rotating cylindrical magnet.

11. A Hall measurement system, comprising:
a Hall measurement apparatus having a measurement chamber, at least one freely-rotating cylindrical magnet within the measurement chamber, a motor-driven cylindrical magnet adjacent to the at least one freely-rotating cylindrical magnet, and a sample mounting structure configured to mount a device under test adjacent to the at least one freely-rotating cylindrical magnet; and
an optical module configured to illuminate the sample mounting structure.

12. The Hall measurement system of claim 11 , wherein the measurement chamber comprises a cryostat.

13. The Hall measurement system of claim 11 , wherein the optical module further comprises:
at least one light source configured to generate light that travels along a light path to the sample mounting structure.

14. The Hall measurement system of claim 13 , wherein the at least one light source is selected from the group consisting of: a laser, a broad band light source, and combinations thereof.

15. The Hall measurement system of claim 13 , further comprising:
a continuous neutral density filter along the light path between the at least one light source and the sample mounting structure.

16. The Hall measurement system of claim 13 , further comprising:
a photodetector for monitoring an intensity of the light illuminating the sample mounting structure; and
a beam splitter along the light path between the at least one light source and the sample mounting structure configured to split the light to the sample mounting structure and to the photodetector.

17. The Hall measurement system of claim 13 , further comprising:
a reflectivity sub-module for measuring a reflectivity of a sample; and
an absorption sub-module for measuring an absorption of the sample.

18. The Hall measurement system of claim 17 , wherein the reflectivity sub-module and the absorption sub-module are located within the optical module orthogonal to the light path, and wherein the Hall measurement system further comprises:
a mirror along the light path between the at least one light source and the sample mounting structure configured to divert the light path toward either the reflectivity sub-module or the absorption sub-module.

19. The Hall measurement system of claim 11 , further comprising:
an electronics instrument module comprising a switch matrix system with buffer amplifiers to connect terminals of the device under test to source and measure units, wherein the source and measure units comprise: a voltage and current source, an amp-meter for measuring current through the device under test, and a voltmeter to measure voltage across a pair of selected terminals of the device under test.

20. The Hall measurement system of claim 19 , wherein the voltmeter comprises an analog to digital converter.

21. The Hall measurement system of claim 19 , further comprising:
a data and signal analysis module for processing data from the device under test; and
a control program for controlling the Hall measurement system, the optical module, the electronics instrument module, and the data and signal analysis module.

22. A method for Hall measurements, the method comprising:
providing a Hall system comprising i) a Hall measurement apparatus having a measurement chamber, at least one freely-rotating cylindrical magnet within the measurement chamber, a motor-driven cylindrical magnet adjacent to the at least one freely-rotating cylindrical magnet, and a sample mounting structure, and (ii) an optical module configured to illuminate the sample mounting structure;
mounting a device under test to the sample mounting structure adjacent to the at least one freely-rotating cylindrical magnet;
rotating the motor-driven cylindrical magnet and the at least one freely-rotating cylindrical magnet;
illuminating the device under test using the optical module; and
measuring longitudinal and transverse magnetoresistance of the device under test.

23. The method of claim 22 , wherein the Hall system further comprises iii) a data and signal analysis module, the method further comprising:
generating a Fourier spectra of the longitudinal and transverse magnetoresistance of the device under test using the data and signal analysis module; and
performing n-th harmonics lock-in detection of the longitudinal and transverse magnetoresistance of the device under test.

24. The method of claim 23 , further comprising:
calculating majority and minority carrier densities and mobilities using the data and signal analysis module from an n-th harmonic component of the longitudinal and transverse magnetoresistance of the device under test.

Assignees

• IBM

Inventors

• Gunawan Oki

Classifications

• G01R33/032

  using magneto-optic devices, e.g. Faraday {or Cotton-Mouton effect} · CPC title

• G01R33/07

  Hall effect devices · CPC title

• G01R33/12 Primary

  Measuring magnetic properties of articles or specimens of solids or fluids (involving magnetic resonance G01R33/20) · CPC title