Probe card loading apparatus and probe card managing system including the same

Patent metadata

Field	Value
Publication number	US-10197617-B2
Application number	US-201514955432-A
Country	US
Kind code	B2
Filing date	Dec 1, 2015
Priority date	Dec 24, 2014
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

A loading apparatus is provided which includes a package jig, a transfer unit, and a load port. The package jig is fixed to a package. The transfer unit includes a hand for holding the package jig and transferring the package. The package transferred by the transfer unit is loaded on the load port. The load port and the hand include first alignment pins and first alignment sockets for aligning the package to the load port.

First claim

What is claimed is:

1. A loading apparatus comprising:
a package jig configured to fix to a package, the package jig including,
a case configured to surround an edge of the package and having first alignment holes adjacent to the edge of the package; and
a handle configured to connect to the case and positioned on the package;

a transfer unit including a hand for holding the package jig and configured to transfer the package; and
a load port on which the package transferred by the transfer unit is loaded, the load port and the hand comprising,
first alignment pins and first alignment sockets for aligning the package to the load port.

2. The loading apparatus of claim 1 ,
wherein the load port further comprises:
second alignment pins between the first alignment pins and extending into the first alignment holes.

3. The loading apparatus of claim 2 , wherein the first alignment pins are longer in length than the second alignment pins.

4. The loading apparatus of claim 2 , wherein the first alignment pins and the second alignment pins are aligned in the same direction.

5. The loading apparatus of claim 2 , wherein a height where the second alignment pins are positioned is lower than a height where the first alignment pins are positioned.

6. The loading apparatus of claim 2 , wherein the hand further comprises:
clamps between the first alignment sockets and configured to fix the handle.

7. The loading apparatus of claim 6 , wherein the handle has second alignment holes, and
wherein the hand further comprises:
third alignment pins between the clamps and provided in the second alignment holes.

8. The loading apparatus of claim 7 , wherein the third alignment pins are shorter in length than the clamps and the first alignment sockets.

9. The loading apparatus of claim 6 , wherein the first alignment sockets are longer in length than the clamps.

10. The loading apparatus of claim 1 , wherein the load port further comprises reflection plates at the outside of the first alignment pins, and
wherein the hand further comprises:
location sensors at the outside of the first alignment sockets and aligned to the reflection plates.

11. A probe card managing system comprising:
a stocker configured to keep a probe card;
a tester configured to test a substrate connected with the probe card; and
a card loading apparatus configured to transfer the probe card to the stocker and to load the probe card on the substrate,
the card loading apparatus comprising:
a probe card jig configured to fix to a probe card, the probe card jig including,
a case configured to surround an edge of the probe card and having first alignment holes adjacent to the edge of the probe card, and
a handle configured to connect to the case and positioned on the probe card;

a transfer unit including a hand configured to hold the probe card jig and configured to transfer the probe card; and
a load port on which the probe card transferred by the transfer unit is loaded,

the load port and the hand comprising:
first alignment pins and first alignment sockets configured to align the probe card to the load port.

12. The probe card managing system of claim 11 , further comprising:
a carrier transfer apparatus configured to transfer at least one carrier on which the probe card is loaded, and
wherein the carrier comprises:
a first housing;
at least one first rack in a housing and having a hole opened in an entrance direction of the housing; and
support blocks on the first rack along an edge of the hole and configured to support the probe card.

13. The probe card managing system of claim 12 ,
wherein the load port further comprises guide pins adjacent to the support blocks and provided in the first alignment holes.

14. The probe card managing system of claim 12 , wherein the stocker comprises:
a plurality of second racks configured to receive the probe card;
a transfer port configured to transfer the probe card provided on the second racks to the card loading apparatus; and
a carrier opener configured to open the carrier to provide the probe card to the second racks.

15. The probe card managing system of claim 12 , wherein the carrier transfer apparatus comprises:
a first carrier transfer apparatus configured to transfer the carrier manually; and
a second carrier transfer apparatus configured to transfer the carrier automatically, and
further comprising:
jeep towers between the first and second carrier transfer apparatuses and configured to elevate the carrier.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Youngin
• Kim Jongsam
• Park Byung-Soo
• Park Sookil
• Yoo Byungkook
• Lee Younghyen
• Jeong Seong Sil
• Choi Wooseong

Classifications

• G01R31/2893

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R31/2601 Primary

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R31/2889 Primary

  Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence) · CPC title

• H10P72/3216 Primary

  using a general scheme of a conveying path within a factory · CPC title