Membrane microfluidic valve and process for manufacturing a membrane microfluidic valve

Patent metadata

Field	Value
Publication number	US-10197189-B2
Application number	US-201414289298-A
Country	US
Kind code	B2
Filing date	May 28, 2014
Priority date	May 31, 2013
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

A microfluidic valve includes: a first structural layer and a second structural layer; a microfluidic circuit having a first microfluidic conduit and a second microfluidic conduit, which are defined in a superficial portion of the first structural layer, are adjacent, and are separated by a wall; a membrane set between the first structural layer and the second structural layer and delimiting the microfluidic circuit on one side; and a recess containing a gaseous fluid in the second structural layer. The membrane is movable in response to an actuation stimulus between a closed position, in which the first and second microfluidic conduits are fluidly decoupled, and an open position, in which the membrane is at least in part retracted into the recess and the first and second microfluidic conduits are fluidly coupled by means of a fluidic passage defined between the wall and the membrane.

First claim

The invention claimed is:

1. A microfluidic valve, comprising:
a substrate including a first surface and a second surface opposite to the first surface;
a first layer of polymeric material;
a second layer of polymeric material bonded to the first layer, the second layer arranged between the first layer and the first surface of the substrate;
a microfluidic circuit, including:
an active region;
a first microfluidic conduit and a second microfluidic conduit that are defined in the first layer and are adjacent to each other in the active region;
a chamber that is defined in the first layer, the chamber separating the first microfluidic conduit from the second microfluidic conduit, a portion of the first microfluidic conduit extending in to the chamber;
a wall in the active region that separates the first microfluidic conduit from the chamber, the portion of the first microfluidic conduit being surrounded on at least two sides and an end by the wall, the wall being surrounded on at least two sides and an end by the chamber;
a recess in the second layer in the active region, the recess including sidewalls formed by the second layer and a base formed by the first surface of the substrate; and
a membrane arranged between the first layer and the second layer and delimiting a portion of the microfluidic circuit in the active region, the membrane being made of a polymeric material with particles of magnetic material, the membrane being moveable in response to an actuation stimulus between a closed position in which the first microfluidic conduit is fluidly decoupled from the second microfluidic conduit and an open position in which the membrane is at least in part retracted in the recess and places the first microfluidic conduit in fluid communication with the second microfluidic conduit, the actuation stimulus being a magnetic field;

a first channel formed in the first layer, the first channel placing the first microfluidic conduit of the microfluidic circuit in fluid communication with an environment outside of the first microfluidic conduit; and
a second channel formed in the first layer, the second channel placing the second microfluidic conduit of the microfluidic circuit in fluid communication with an environment outside of the second microfluidic conduit, the first channel being separated from the second channel by the first and second microfluidic conduits, the membrane fluidly isolating the recess from the first microfluidic conduit, the second microfluidic conduit, and the chamber.

2. The microfluidic valve according to claim 1 , wherein the first microfluidic conduit, the second microfluidic conduit, and the chamber are co-planar.

3. The microfluidic valve according to claim 1 , wherein, in the closed position, the membrane rests against the wall.

4. The microfluidic valve according to claim 1 , comprising an actuator device configured to provide the actuation stimulus, the actuator being positioned on the second surface of the substrate.

5. The microfluidic valve according to claim 4 , wherein the actuator device comprises:
a winding in a position corresponding to the recess and to the active region; and
a driving device coupled to the winding.

6. The microfluidic valve according to claim 5 , wherein the driving device is configured to supply a first current to the winding, wherein the first current in the winding generates a first magnetic field that causes the membrane to move into the open position.

7. The microfluidic valve according to claim 6 , wherein the driving device is configured to supply a second current to the winding, wherein the second current in the winding generates a second magnetic field that causes the membrane to move into the closed position.

8. The microfluidic valve according to claim 5 , wherein the actuator device comprises an electromechanical drive configured to move the magnetic material in the membrane between the open position and closed position, in which a force applied to the membrane by effect of the magnetic field generated is not sufficient to displace the membrane towards the recess.

9. The microfluidic valve according to claim 4 , wherein the actuator device comprises a magnet in an active position corresponding to the recess and to the active region, the magnet configured to generate the magnetic field to retract the membrane into the recess.

10. The microfluidic valve according to claim 1 , comprising a micropump coupled to one of the first microfluidic conduit and the second microfluidic conduit.

11. The microfluidic valve according to claim 1 , wherein the wall is U-shaped and located between the first microfluidic conduit and the chamber.

12. The microfluidic valve according to claim 11 , wherein the end of the portion of the first microfluidic conduit is inside an inner surface of the U-shaped wall and the chamber is around an outer surface of the U-shaped wall.

13. The microfluidic valve according to claim 1 wherein the chamber has a circular shape, and the portion of the first microfluidic conduit extends in to the chamber to at least to a center of the chamber.

14. A microfluidic device comprising:
a substrate;
a first layer of polymeric material;
a second layer of polymeric material, the second layer arranged between the substrate and the first layer; and
a microfluidic valve, including:
a first microfluidic conduit and a second microfluidic conduit in the first layer;
a chamber in the first layer, the chamber separating the first microfluidic conduit from the second microfluidic conduit, a portion of the first microfluidic conduit extending in to the chamber;
an opening in the second layer that forms a recess at a surface of the substrate, the recess including sidewalls formed by the second layer and a base formed by the substrate;
a membrane located between the first and second layers and over the opening, the membrane including polymeric material and particles of magnetic material, the membrane fluidly isolating the recess from the first microfluidic conduit, the second microfluidic conduit, and the chamber;
a wall located between the first microfluidic conduit and the chamber, the wall having an end that rests against the membrane, the wall and the membrane being configured to fluidly isolate the first microfluidic conduit from the chamber when the end of the wall rests against the membrane, the wall delimiting a convex shape of the portion of the first microfluidic conduit such that the portion of the first microfluidic conduit is surrounded on at least two sides and an end by the chamber, the wall being surrounded on at least two sides and an end by the chamber; and
an actuator device configured to apply a magnetic field to the membrane to cause the membrane to move away from the end of the wall and allow the first microfluidic conduit and the chamber to be in fluid communication with each other.

15. The microfluidic device according to claim 14 , wherein the first microfluidic conduit, the second microfluidic conduit, and the chamber are co-planar.

16. The microfluidic device according to claim 14 , comprising a control unit coupled to the actuator device and configured to control the actuator device.

17. A process comprising:
in a first layer of polymeric material, forming a first microfluidic conduit, a second microfluidic conduit, and a chamber that are adjacent to each other in a active region, the chamber separating the first microfluidic conduit from the second microfluidic conduit, a portion of the first microfluidic conduit extending in to the chamber, the first microfluidic conduit bein

Assignees

• St Microelectronics Srl

Inventors

• Pugliese Marco
• Ferrara Francesco

Classifications

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• B01L2400/0638

  membrane valves, flap valves · CPC title

• B01L2300/0887

  Laminated structure · CPC title

• B01L2300/0874

  Three dimensional network · CPC title

• Y10T137/85978

  With pump · CPC title