Device for manufacturing polysilicon using horizontal reactor and method for manufacturing same

Patent metadata

Field	Value
Publication number	US-10196273-B2
Application number	US-201515310716-A
Country	US
Kind code	B2
Filing date	May 11, 2015
Priority date	May 13, 2014
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

The present invention relates to a polysilicon production apparatus. The apparatus includes: a horizontal reaction tube positioned in an insulated tube and having an inlet port through which gaseous raw materials including silicon-containing reactant gases and a reducing gas are supplied, an outlet port through which residual gases exit, a reaction surface with which the gaseous raw materials come into contact, and a plurality of bottom openings through which molten polysilicon produced by the reactions of the gaseous raw materials is discharged; one or more internal structures placed in the horizontal reaction tube to provide additional reaction surfaces; and first heating means adapted to heat the reaction surface of the horizontal reaction tube. The present invention also relates to a method for the production of polysilicon using the apparatus.

First claim

What is claimed is:

1. A polysilicon production apparatus comprising:
an insulated tube;
a horizontal reaction tube positioned in the insulated tube, the horizontal reaction tube comprising:
an inlet port through which gaseous raw materials comprising silicon-containing reactant gases and a reducing gas are supplied at one end of the horizontal reaction tube;
an outlet port through which residual gases exit at the opposite end of the horizontal reaction tube;
a reaction surface with which the gaseous raw materials come into contact, and
a plurality of bottom openings through which molten polysilicon produced by the reactions of the gaseous raw materials is discharged out of the horizontal reaction tube;

one or more internal structures placed within the horizontal reaction tube and arranged in a horizontal, a vertical, or an inclined direction within the reaction tube to provide additional reaction surfaces;
a first heater adapted to heat the reaction surface of the horizontal reaction tube; and
a collection container adapted to collect the molten polysilicon discharged through the bottom openings of the horizontal reaction tube.

2. The polysilicon production apparatus according to claim 1 , further comprising a second heater adapted to heat the internal structures placed within the horizontal reaction tube.

3. The polysilicon production apparatus according to claim 1 , wherein the polysilicon collection container further comprises a third heater adapted to maintain the collected polysilicon in a molten state.

4. The polysilicon production apparatus according to claim 1 , wherein the reaction surface is either an inner surface or an outer surface of the horizontal reaction tube or both.

5. The polysilicon production apparatus according to claim 1 , wherein the bottom openings of the horizontal reaction tube are formed in a reaction region where the first heater is provided.

6. The polysilicon production apparatus according to claim 1 , wherein the polysilicon is discharged in the form of droplets through the bottom openings of the horizontal reaction tube and is collected in the collection container.

7. The polysilicon production apparatus according to claim 1 , wherein the reactant gases comprise one or more of monosilane, dichlorosilane, trichlorosilane (TCS), and tetrachlorosilane (STC) and the reducing gas comprises hydrogen.

8. The polysilicon production apparatus according to claim 1 , wherein the internal structures placed within the horizontal reaction tube have a shape selected from among circular rod, angular rod, U-shaped, mesh, and forked-shaped.

9. The polysilicon production apparatus of claim 1 , wherein the first heater is an induction heater or a resistance heater.

10. The polysilicon production apparatus of claim 2 , wherein the second heater is an induction heater or a resistance heater.

11. A polysilicon production method comprising:
feeding through a gas supply port gaseous raw materials comprising reactant gases and a reducing gas into a horizontal reaction tube, which is positioned in an insulated tube, where the horizontal reaction tube comprises one or more internal structures placed within the horizontal reaction tube, the internal structures arranged in a horizontal, a vertical, or an inclined direction within the reaction tube to provide additional reaction surfaces, and the horizontal reaction tube comprises a plurality of openings formed at the bottom of the horizontal reaction tube;
heating an inner surface of the horizontal reaction tube as a reaction surface to a reaction temperature of the gaseous raw materials to deposit polysilicon;
discharging the deposited polysilicon in the form of droplets through the plurality of openings at the bottom of the horizontal reaction tube; and
collecting the discharged polysilicon in the form of droplets in a collection container.

12. The polysilicon production method according to claim 11 , further comprising heating the internal structures placed within the horizontal reaction tube to a reaction temperature of the gaseous raw materials.

13. The polysilicon production method according to claim 11 , further comprising heating the collection container to maintain the collected polysilicon in a liquid state or maintaining the polysilicon collected in the collection container in a solid state.

14. The polysilicon production method according to claim 11 , wherein the method comprises independently controlling the temperatures of the internal structures placed within the horizontal reaction tube.

15. The polysilicon production method according to claim 11 , wherein the reactant gases comprise one or more of monosilane, dichlorosilane, trichlorosilane (TCS), and tetrachlorosilane (STC) and the reducing gas comprises hydrogen.

16. The polysilicon production method according to claim 11 , wherein the internal structures placed within the horizontal reaction tube have a shape selected from among circular rod, angular rod, U-shaped, mesh, and forked-shaped.

Assignees

• Lg Chemical Ltd

Inventors

• Jang Eunsu
• Kim Jeong Kyu
• Kim Yoo Seok
• Yoo Jinhyoung
• Lee Jungwoo

Classifications

• B01J12/02

  for obtaining at least one reaction product which, at normal temperature, is in the solid state · CPC title

• B01J2219/182

  horizontal · CPC title

• C01B33/029 Primary

  by decomposition of monosilane · CPC title

• B01J12/005 Primary

  carried out at high temperatures, e.g. by pyrolysis · CPC title

• B01J19/00

  Chemical, physical or physico-chemical processes in general; Their relevant apparatus · CPC title