Method for producing semiconductor device, and wire-bonding apparatus
US-2016365330-A1 · Dec 15, 2016 · US
US10195685B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10195685-B2 |
| Application number | US-201615005172-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 25, 2016 |
| Priority date | Jan 25, 2016 |
| Publication date | Feb 5, 2019 |
| Grant date | Feb 5, 2019 |
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A capillary alignment tool for installing a new capillary in the transducer on a wire bonding machine. A capillary alignment tool for installing a new capillary in a transducer on wire bonding machine. A method for installing a new capillary in the transducer of a wire bonding machine using the capillary alignment tool.
Opening claim text (preview).
What is claimed is: 1. An apparatus for installing and aligning a wire bonding capillary into a transducer of a wire bonding machine, the apparatus comprising: a first arm with a first end; a second arm with a second end; a first side plate coupled to the first end and a second side plate coupled to the second end, the first and second arms being adapted to grip the sides of the transducer between the first side plate and the second side plate when the apparatus is closed; a top plate coupled to a top side of the first side plate and where the top plate is positioned to be in contact with a top surface of the transducer and to at least partially cover a vertical capillary opening through the transducer when the apparatus is closed; and a bottom plate coupled to a bottom side of the second side plate and where the bottom plate is positioned to be in contact with a bottom surface of the transducer when the apparatus is closed. 2. The apparatus of claim 1 , further comprising a capillary opening in the bottom plate which aligns with the vertical capillary opening when the apparatus is closed. 3. The apparatus of claim 2 , wherein the capillary opening is a beveled capillary opening with a large side of the beveled capillary opening facing a bottom surface of the bottom plate. 4. The apparatus of claim 1 , further comprising a hinge between the first arm and the second arm and wherein the first arm and the second arm are movable toward each other to grip the sides of the transducer between the first side plate and the second side plate. 5. An apparatus for installing and aligning a capillary into a transducer of an ASM Twin Eagle™ wire bonding machine, the apparatus comprising: a first arm coupled to a first end and with a first half of a hinge coupled between the first arm and the first end; a second arm coupled to a second end and with a second half of a hinge coupled between the second arm and the second end; a first side plate coupled to the first end and adapted to grip a first side of the transducer; a second side plate coupled to the second end and adapted to grip a second side of the transducer; a bottom plate coupled to the bottom of the first side plate and adapted to contact a bottom surface of the transducer when the apparatus is closed; a capillary opening in the bottom plate which aligns with a vertical capillary opening in the transducer when the apparatus is closed; a top plate coupled to the top of the second side plate and adapted to contact a top surface of the transducer when the apparatus is closed and where the top plate at least partially covers a vertical capillary opening through the transducer; and the first half hinge mated with the second half hinge with a hinge pin inserted through the first half hinge and the second half hinge forming a completed hinge. 6. The apparatus of claim 5 , wherein the first arm and the second arm are movable toward each other to grip the transducer between the first side plate of the first end and the second side piece of the second end. 7. The apparatus of claim 5 , wherein the top plate and the bottom plate constrain the transducer vertically when the apparatus is closed. 8. The apparatus of claim 5 , wherein the capillary opening in the bottom plate has a funnel shape with the larger opening facing down. 9. The apparatus of claim 5 , further comprising a screw head access opening in the first side plate and a screw access slot in the second side plate. 10. A method of installing a new capillary in a transducer in a wire bonding machine comprising: loosening a capillary set screw and removing a used capillary from the transducer; installing a capillary alignment tool on the end of the transducer where the capillary alignment tool further comprises: a first arm coupled to a first end and with a first half of a hinge coupled between the first arm and the first end; a second arm coupled to a second end and with a second half of a hinge coupled between the second arm and the second end; a first side plate coupled to the first end and adapted to grip a first side of the transducer; a second side plate coupled to the second end and adapted to grip a second side of the transducer; a bottom plate coupled to the bottom of the first side plate and adapted to contact a bottom surface of the transducer when the apparatus is closed; a capillary opening in the bottom plate which aligns with a vertical capillary opening in the transducer when the capillary alignment tool is closed; a top plate coupled to the top of the second side plate and adapted to contact a top surface of the transducer when the capillary alignment tool is closed and where the top plate at least partially covers a vertical capillary opening through the transducer; and the first half hinge mated with the second half hinge with a hinge pin inserted through the first half hinge and the second half hinge forming a completed hinge; inserting a new capillary through the capillary opening and through the vertical capillary opening until the new capillary stops against the top plate; tightening the capillary set screw; and removing the capillary alignment tool. 11. The method of claim 10 , wherein a lead line is inserted through a first end of the capillary and out a second end of the capillary. 12. The method of claim 11 , further comprising applying ultrasonic energy to the lead wire causing it to melt and form a free air ball below the second end of the capillary at a first end of the lead wire. 13. The method of claim 12 , further comprising lowering the capillary into contact with a bond pad of an integrated circuit. 14. The method of claim 13 , further comprising applying pressure and ultrasonic energy to the lead wire to form a ball bond between the bond pad of the integrated circuit and the lead wire. 15. The method of claim 14 , further comprising feeding a length of the lead wire through the capillary while moving the capillary to a position over a lead frame. 16. The method of claim 15 , further comprising lowering the capillary to bring the lead wire into contact with the lead frame. 17. The method of claim 16 , further comprising applying ultrasonic energy to the lead wire causing it to melt and form a bond with the lead frame. 18. The method of claim 17 , wherein the bond is a bond stitch between the bond wire and the lead frame. 19. A method of installing a new capillary in a transducer in a wire bonding machine comprising: loosening a capillary set screw and removing a used capillary from the transducer, installing a capillary alignment tool on an end of the transducer; inserting a new capillary through a capillary opening in the transducer until the new capillary stops against a portion of the capillary alignment tool; tightening the capillary set screw; and removing the capillary alignment tool. 20. The method of claim 19 , wherein a lead line is inserted through a first end of the capillary and out a second end of the capillary. 21. The method of claim 20 , further comprising applying ultrasonic energy to the lead wire causing it to melt and form a free air ball below the second end of the capillary at a first end of the lead wire. 22. The method of claim 21 , further comprising lowering the capillary into contact with a bond pad of an integrated circuit. 23. The method of claim 22 , further comprising applying pressure and ultrasonic energy to the lead wire to form a ball bond between the bond pad
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the connected ends being wedge-shaped · CPC title
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