Semiconductor device

Patent metadata

Field	Value
Publication number	US-10192870-B2
Application number	US-201715831778-A
Country	US
Kind code	B2
Filing date	Dec 5, 2017
Priority date	Jan 19, 2017
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

An HVNMOS having a source follower configuration is disposed in an n − diffusion region that forms an HVJT. The lateral HVNMOS includes a p-type back gate region, source contact region, n + drain region, and gate electrode. The p-type back gate region and source contact region contact a p − isolation region and are separated from p + common potential regions inside the p − isolation region. The source contact region is electrically connected to the COM electrode pad through a source follower resistor R SF . The p + common potential regions are electrically connected to the p-type back gate region and source contact region of the HVNMOS through diffusion resistors provided between the p-type back gate region/source contact region of the HVNMOS and the p + common potential region.

First claim

What is claimed is:

1. A semiconductor device, comprising:
a semiconductor substrate of a first conductivity type;
a first semiconductor region of a second conductivity type, selectively provided in one main surface of the semiconductor substrate;
an isolating structure formed by a pn junction of the semiconductor substrate and the first semiconductor region, the isolating structure isolating regions of differing potentials;
a semiconductor element having: a second semiconductor region of the second conductivity type, selectively provided in the one main surface of the semiconductor substrate so as to be separated from the first semiconductor region and electrically connected to an electrode of a minimum potential through a first resistor; a third semiconductor region of the second conductivity type selectively provided inside the first semiconductor region and having a higher impurity concentration than the first semiconductor region; a gate insulating film provided along the semiconductor substrate between the first semiconductor region and the second semiconductor region; and a gate electrode provided along the gate insulating film, the semiconductor element converting a signal referenced to the minimum potential into a signal referenced to a potential differing from the minimum potential; and
a fourth semiconductor region of the first conductivity type selectively provided in the one main surface of the semiconductor substrate so as to be separated from the second semiconductor region at a prescribed distance and electrically connected to the electrode of the minimum potential, the fourth semiconductor region having a higher impurity concentration than the semiconductor substrate,
wherein the second semiconductor region is electrically connected to the fourth semiconductor region through a second resistor, and
wherein the second resistor comprises a portion of the semiconductor substrate between the second semiconductor region and the fourth semiconductor region.

2. The semiconductor device according to claim 1 , further comprising:
a fifth semiconductor region of the first conductivity type, selectively provided in the one main surface of the semiconductor substrate and contacting the first semiconductor region, the fifth semiconductor region having a higher impurity concentration than the semiconductor substrate,
wherein the isolating structure is formed by a pn junction of the fifth semiconductor region and the first semiconductor region,
wherein the second semiconductor region and the fourth semiconductor region are provided inside the fifth semiconductor region,
wherein the gate insulating film is provided along the fifth semiconductor region between the first semiconductor region and the second semiconductor region, and
wherein the second resistor comprises a portion of the fifth semiconductor region between the second semiconductor region and the fourth semiconductor region.

3. The semiconductor device according to claim 2 , further comprising:
a back-gate region of the first conductivity type, selectively provided inside the first semiconductor region and contacting a portion of the fifth semiconductor region between the second semiconductor region and the fourth semiconductor region, the back-gate region having a higher impurity concentration than the fifth semiconductor region,
wherein the second semiconductor region between the second semiconductor region and the fourth semiconductor region, and
wherein the gate insulating film is provided along the back-gate region between the first semiconductor region and the second semiconductor region.

4. The semiconductor device according to claim 3 , further comprising: a diffusion region of the second conductivity type, selectively provided in a portion of the fifth semiconductor region between the second semiconductor region and the fourth semiconductor region.

5. The semiconductor device according to claim 4 , wherein a potential of the diffusion region is a floating potential or a power supply potential.

6. The semiconductor device according to claim 3 , further comprising: a diffusion region of the second conductivity type, selectively provided in a portion of the fifth semiconductor region between the second semiconductor region and the fourth semiconductor region, the diffusion region being electrically connected to the back-gate region.

7. The semiconductor device according to claim 3 ,
wherein the semiconductor element is disposed along the pn junction that forms the isolating structure, and
wherein, in the one main surface of the semiconductor substrate, the fourth semiconductor region does not face the second semiconductor region in a direction perpendicular to a pn junction interface of the pn junction that forms the isolating structure along which the semiconductor element is disposed.

8. The semiconductor device according to claim 2 , further comprising: a diffusion region of the second conductivity type, selectively provided in a portion of the fifth semiconductor region between the second semiconductor region and the fourth semiconductor region.

9. The semiconductor device according to claim 8 , wherein a potential of the diffusion region is a floating potential or a power supply potential.

10. The semiconductor device according to claim 2 ,
wherein the semiconductor element is disposed along the pn junction that forms the isolating structure, and
wherein, in the one main surface of the semiconductor substrate, the fourth semiconductor region does not face the second semiconductor region in a direction perpendicular to a pn junction interface of the pn junction that forms the isolating structure along which the semiconductor element is disposed.

11. The semiconductor device according to claim 1 , further comprising:
a back-gate region of the first conductivity type, selectively provided inside the first semiconductor region and contacting a portion of the semiconductor substrate between the second semiconductor region and the fourth semiconductor region, the back-gate region having a higher impurity concentration than the semiconductor substrate,
wherein the second semiconductor region is provided inside the back-gate region and contacts a portion of the semiconductor substrate between the second semiconductor region and the fourth semiconductor region, and
wherein the gate insulating film is provided along the back-gate region between the first semiconductor region and the second semiconductor region.

12. The semiconductor device according to claim 11 , further comprising: a diffusion region of the second conductivity type, selectively provided in a portion of the semiconductor substrate between the second semiconductor region and the fourth semiconductor region, the diffusion region being electrically connected to the back-gate region.

13. The semiconductor device according to claim 11 ,
wherein the semiconductor element is disposed along the pn junction that forms the isolating structure, and
wherein, in the one main surface of the semiconductor substrate, the fourth semiconductor region does not face the second semiconductor region in a direction perpendicular to a pn junction interface of the pn junction that forms the isolating structure along which the semiconductor element is disposed.

14. The semiconductor device according to claim 1 , further comprising: a diffusion region of the second conductivity type, selectively provided in a portion of the semiconductor substrate between the second semiconductor region and the fourth semiconductor region.

15. The semiconductor device according to claim 14 , wherein a poten

Assignees

• Fuji Electric Co Ltd

Inventors

• Yamaji Masaharu

Classifications

• H10W10/031

  of isolation regions comprising PN junctions · CPC title

• H10W10/30

  Isolation regions comprising PN junctions · CPC title

• H01L27/0928 Primary

  Electricity · mapped topic

• H01L29/4238

  Electricity · mapped topic

• H01L21/761

  Electricity · mapped topic