Ultra-compact, passive, varactor-based wireless sensor using quantum capacitance effect in graphene

Patent metadata

Field	Value
Publication number	US-10191005-B2
Application number	US-201615368054-A
Country	US
Kind code	B2
Filing date	Dec 2, 2016
Priority date	Apr 14, 2011
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

An electrical device includes at least one graphene quantum capacitance varactor. In some examples, the graphene quantum capacitance varactor includes an insulator layer, a graphene layer disposed on the insulator layer, a dielectric layer disposed on the graphene layer, a gate electrode formed on the dielectric layer, and at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer. In other examples, the graphene quantum capacitance varactor includes an insulator layer, a gate electrode recessed in the insulator layer, a dielectric layer formed on the gate electrode, a graphene layer formed on the dielectric layer, wherein the graphene layer comprises an exposed surface opposite the dielectric layer, and at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.

First claim

The invention claimed is:

1. A sensor comprising:
a graphene quantum capacitance varactor comprising:
an insulator layer;
a dielectric layer;
a gate electrode between the insulator layer and the dielectric layer;
a graphene layer on the dielectric layer, wherein capacitance of the graphene layer changes in response to a sensed electrical charge collected proximate to the graphene layer upon exposure to a sample, and wherein the graphene layer comprises an exposed surface opposite the dielectric layer; and

at least one contact electrode on the graphene layer and making electrical contact with the graphene layer.

2. The sensor of claim 1 , further comprising a readout circuit responsive to the capacitance of the graphene layer and configured to output a signal indicative of the electrical charge.

3. The sensor of claim 2 , wherein the readout circuit comprises an inductor electrically connected to the graphene quantum capacitance varactor, wherein the inductor and the graphene quantum capacitance varactor form an LC oscillator circuit having a resonant frequency responsive to the electrical charge collected by the at least one graphene quantum capacitance varactor.

4. The sensor of claim 1 , wherein the
gate electrode is recessed in the insulator layer.

5. The sensor of claim 1 , wherein the graphene quantum capacitance varactor further comprises a protective insulator formed on the exposed surface of the graphene layer.

6. The sensor of claim 1 , further comprising:
at least one linker molecule attached to the exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer; and
an enzyme attached to the linker molecule.

7. The sensor of claim 6 , wherein the linker molecule comprises 1-pyrenebutanoic acid succinimidyl ester and the enzyme comprises glucose oxidase.

8. The sensor of claim 1 , further comprising:
1,2-epoxy-3-phenoxypropane-derivated dextran (DexP) attached to the exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer; and
Concanavalin A (ConA) conjugated on the DexP.

9. The sensor of claim 1 , further comprising linker molecules attached to an exposed surface of the graphene layer.

10. The sensor of claim 1 , further comprising glucose-sensitive molecules attached to the sensor proximate the graphene layer.

11. The sensor of claim 1 , wherein the gate electrode is a multi-finger structure comprising at least two gate electrode fingers, the sensor further comprising a readout circuit configured to output a signal indicative of a change to the capacitance of the graphene layer.

12. The sensor of claim 11 , wherein the graphene quantum capacitance varactor has an equivalent oxide thickness (EOT) of less than about 5 nanometers (nm).

13. The sensor of claim 11 , wherein the graphene quantum capacitance varactor has a capacitance modulation ratio of greater than about 1.2.

14. The sensor of claim 11 , further comprising linker molecules attached to an exposed surface of the graphene layer.

15. The sensor of claim 14 , wherein the linker molecules attached to the exposed surface of the graphene layer comprise glucose-sensitive molecules.

16. The sensor of claim 11 , wherein the readout circuit comprises an inductor electrically connected to the graphene quantum capacitance varactor, wherein the inductor and the graphene quantum capacitance varactor form an LC oscillator circuit having a resonant frequency responsive to the electrical charge collected by the graphene quantum capacitance varactor.

Assignees

• Univ Minnesota

Inventors

• Koester Steven J

Classifications

• G01N27/221 Primary

  by investigating the dielectric properties (using microwaves G01N22/00; measuring loss factors or dielectric constants per se G01R27/26) · CPC title

• H01L29/93

  Electricity · mapped topic

• H01L31/115

  Electricity · mapped topic

• H01L29/1025

  Electricity · mapped topic

• H01L29/42312

  Electricity · mapped topic