Corrosion control for chamber components

Patent metadata

Field	Value
Publication number	US-10190701-B2
Application number	US-201615110714-A
Country	US
Kind code	B2
Filing date	Apr 6, 2016
Priority date	May 7, 2015
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.

First claim

We claim:

1. A bellows, comprising:
a top mounting flange;
a bottom mounting flange;
a tubular accordion structure coupling the mounting flanges;
a bonding layer disposed on an exterior treated surface of at least the tubular accordion structure, the bonding layer of at least one of chromium, titanium nitride or titanium; and
a coating disposed on the bonding layer, the coating comprised of at least one of polytetrafluoroethylene (PTFE), parylene C, parylene D, diamond-like carbon, yttria stabilized zirconia, alumina, nickel, or aluminum silicon magnesium yttrium oxygen compound.

2. The bellows of claim 1 , wherein the tubular accordion structure is fabricated from at least one of stainless steel or nickel-chromium alloy.

3. The bellows of claim 1 , wherein the coating comprises the diamond-like carbon material and has a thickness of between about 0.5 microns to about 5 microns.

4. The bellows of claim 1 , wherein the coating comprises a plurality of layers.

5. The bellows of claim 1 , wherein the tubular accordion structure has an inside diameter of at least 0.70 inch to about 2.9 inch, and an axial range of motion of between about 1.2 inch to about 3.6 inch.

6. The bellows of claim 4 , wherein the plurality of layers are fabricated from at least two different materials.

7. The bellows of claim 4 , wherein each layer of the plurality of layers of the coating has a thickness of between about 0.25 microns to about 3 microns.

8. The bellows of claim 6 further comprising:
a second bonding layer disposed between at least two of the plurality of layers.

9. The bellows of claim 8 , wherein the second bonding layer is formed from at least one of chromium or titanium or nickel or its alloys.

10. A valve assembly, comprising:
a housing having a valve seat and an interior working volume;
an actuator coupled to the housing;
a stem extending into the interior working volume of the housing, the stem coupled to the actuator;
a valve plug coupled to the stem in the interior working volume of the housing, the valve plug movable by the actuator between positions against and spaced from the valve seat;
a bellows circumscribing the stem and isolating the stem from the interior working volume of the housing, the bellows having a coating exposed to the interior working volume of the housing; and
a bonding layer disposed between the coating and the bellows.

11. The valve assembly of claim 10 , wherein the coating is comprised of at least one of polytetrafluoroethylene (PTFE), parylene C, parylene D, diamond-like carbon, yttria stabilized zirconia, alumina, nickel, or aluminum silicon magnesium yttrium oxygen compound.

12. The valve assembly of claim 10 , wherein the bellows is fabricated from at least one of stainless steel or nickel-chromium alloy.

13. The valve assembly of claim 10 , wherein the coating comprises:
a diamond-like carbon material having a thickness of between about 0.5 microns to about 5 microns.

14. The valve assembly of claim 10 , wherein the coating comprises a plurality of layers of at least two different materials.

15. The valve assembly of claim 10 , wherein the coating on the bellows exposed to the interior working volume comprises:
a metal comprised of nickel.

16. The valve assembly of claim 10 , wherein the coating comprises a plurality of layers with a separate bonding layer between each of the plurality of layers.

17. The valve assembly of claim 10 , wherein an interior surface of the housing exposed to the interior working volume of the housing comprises a valve body coating.

18. The valve assembly of claim 10 , wherein the tubular body further comprises:
a metal coating comprised of nickel.

19. The valve assembly of claim 10 , wherein the housing and the valve plug, further comprises:
a metal coating comprised of nickel.

Assignees

• Applied Materials Inc

Inventors

• Raj Govinda
• Kumar Hanish
• Zhang Lin
• Wu Stanley

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7616 Primary

  characterised by a coating, a hardness or a material · CPC title

• C23C16/4404 Primary

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title

• H01J37/32495

  Means for protecting the vessel against plasma · CPC title

• F16L11/15

  corrugated (F16L11/16 takes precedence) · CPC title