Chamber components with polished internal apertures

Patent metadata

Field	Value
Publication number	US-10189141-B2
Application number	US-201715619024-A
Country	US
Kind code	B2
Filing date	Jun 9, 2017
Priority date	Jun 27, 2014
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

First claim

What is claimed is:

1. A chamber component, comprising:
a ceramic body; and
a plurality of polished apertures in the ceramic body, wherein a roughness of the plurality of polished apertures is less than 32 μin,
wherein the ceramic body comprises a compound that includes a combination of Y 2 O 3 , ZrO 2 , Er 2 O 3 , Gd 2 O 3 , and SiO 2 , and
wherein the at least one aperture of the plurality of apertures is polished by flowing an abrasive media through the at least one aperture, wherein the abrasive media comprises a polymer base and a plurality of abrasive particles, and wherein a viscosity of the abrasive media is between about 150,000 cP and about 750,000 cP.

2. The chamber component of claim 1 , wherein at least one of the plurality of polished apertures has a first diameter at a first region and a second diameter at a second region, wherein the second diameter is less than the first diameter.

3. The chamber component of claim 1 , wherein at least one of the plurality of polished apertures comprises at least one bend within the chamber component.

4. The chamber component of claim 1 , wherein an opening of at least one of the plurality of apertures has a rounded edge.

5. The chamber component of claim 1 , wherein the chamber component is a showerhead gas distribution plate or a nozzle.

6. The chamber component of claim 1 , wherein a diameter of the at least aperture of the plurality of apertures is between about 0.01 inches and about 0.1 inches.

7. The chamber component of claim 1 , wherein flowing the abrasive media through the at least one aperture comprises periodically adjusting a flow direction of the abrasive media through the at least one aperture over a time duration, wherein a length of the time duration is between about 20 minutes and about 60 minutes.

8. The chamber component of claim 1 , wherein the plurality of abrasive particles comprises at least one of silicon carbide, diamond, or boron nitride.

9. The chamber component of claim 1 , wherein an average size of each of the plurality of abrasive particles is between 5 micrometers and 100 micrometers.

10. The chamber component of claim 1 , wherein the abrasive media further comprises an oil-based plasticizer.

11. The chamber component of claim 1 , wherein at least one aperture of the plurality of apertures is formed by:
drilling with a drill through the ceramic article to produce the at least one aperture; and
reaming with a reaming device the at least one aperture with a reaming device to increase a diameter of the at least one aperture prior to performing the polishing.

12. The chamber component of claim 11 , wherein a first grit size of the drill is courser than a second grit size of the reaming device, wherein the first grit size of the drill is between about 100 grit and about 150 grit, and wherein the second grit size of the reaming device is between about 400 grit and about 800 grit.

13. The chamber component of claim 1 , wherein the chamber component is a plasma-resistant component of a semiconductor processing chamber that generates a plasma environment.

14. The chamber component of claim 1 , wherein the chamber component is selected from a group consisting of a substrate support assembly, an electrostatic chuck, a gas distribution plate, a nozzle, a showerhead, a flow equalizer, a cooling base, a gas feeder, a liner kit, and a chamber lid.

15. A semiconductor processing chamber comprising:
a plasma-resistant chamber component having a ceramic body and a plurality of polished apertures in the ceramic body, wherein a roughness of the plurality of polished apertures is less than 32 μin,
wherein the ceramic body comprises one of Y 2 O 3 , Y 4 Al 2 O 9 , or a compound that includes a combination of Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 -ZrO 2 , and
wherein the at least one aperture of the plurality of apertures is polished by flowing an abrasive media through the at least one aperture, wherein the abrasive media comprises a polymer base and a plurality of abrasive particles, and wherein a viscosity of the abrasive media is between about 150,000 cP and about 750,000 cP.

16. The semiconductor processing chamber of claim 15 , wherein the chamber component is selected from a group consisting of a substrate support assembly, an electrostatic chuck, a gas distribution plate, a nozzle, a showerhead, a flow equalizer, a cooling base, a gas feeder, a liner kit, and a chamber lid.

17. A semiconductor processing chamber comprising:
a plasma-resistant chamber component having a ceramic body and a plurality of polished apertures in the ceramic body, wherein a roughness of the plurality of polished apertures is less than 32 μin, and
wherein the ceramic body comprises a compound that includes at least one of Nd 3 Al 5 O 12 , Nd 4 Al 2 O 9 , or NdAlO 3 , and
wherein the at least one aperture of the plurality of apertures is polished by flowing an abrasive media through the at least one aperture, wherein the abrasive media comprises a polymer base and a plurality of abrasive particles, and wherein a viscosity of the abrasive media is between about 150,000 cP and about 750,000 cP.

18. The semiconductor processing chamber of claim 17 , wherein the chamber component is selected from a group consisting of a substrate support assembly, an electrostatic chuck, a gas distribution plate, a nozzle, a showerhead, a flow equalizer, a cooling base, a gas feeder, a liner kit, and a chamber lid.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Firouzdor Vahid
• Koonce David
• Kanungo Biraja Prasad

Classifications

• B24B31/003

  whereby the workpieces are mounted on a holder and are immersed in the abrasive material · CPC title

• B24B31/006 Primary

  for grinding the interior surfaces of hollow workpieces · CPC title

• B24B33/02

  designed for working internal surfaces of revolution, e.g. of cylindrical or conical shapes · CPC title

• B24B5/40

  for grinding tubes internally · CPC title

• B24B31/116

  using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure · CPC title