System and method for creating catalyst OBD limit parts for exhaust aftertreatment applications
US-9528420-B2 · Dec 27, 2016 · US
US10184926B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10184926-B2 |
| Application number | US-201715790837-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 23, 2017 |
| Priority date | Aug 21, 2014 |
| Publication date | Jan 22, 2019 |
| Grant date | Jan 22, 2019 |
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A hydrogen sensor and a method for manufacturing the same are provided. The hydrogen sensor includes a metal oxide layer formed over a substrate, and a catalytic pattern that is formed over the metal oxide layer. Further, a protective layer is formed over the catalytic pattern.
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What is claimed is: 1. A hydrogen sensor, comprising: a substrate; a metal oxide layer formed over the substrate; metal oxide patterns formed on the metal oxide layer; a catalytic pattern formed over the substrate disposed between the metal oxide patterns; and a protective layer formed over the metal oxide pattern and the catalytic pattern, wherein a cavil is formed between an upper portion of the catalytic pattern and the protective layer. 2. The hydrogen sensor according to claim 1 , wherein the catalytic pattern is formed at a bottom of the metal oxide patterns or is formed along a sidewall and bottom of the metal oxide patterns. 3. The hydrogen sensor according to claim 1 , wherein: the metal oxide layer includes one selected from the group consisting of: vanadium, niobium, tantalum, chromium, molybdenum, and tungsten, and the catalytic pattern includes at least one selected from the group consisting of: palladium, iridium, ruthenium, platinum, rhodium, gold, and silver.
using catalysis · CPC title
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