Vacuum valve

Patent metadata

Field	Value
Publication number	US-10184570-B2
Application number	US-201615557605-A
Country	US
Kind code	B2
Filing date	Mar 7, 2016
Priority date	Mar 27, 2015
Publication date	Jan 22, 2019
Grant date	Jan 22, 2019

Abstract

The vacuum valve includes a closure member that can be moved, parallel to a longitudinal movement direction, between an open position in which it unblocks the valve opening and an intermediate position in which it covers the valve opening but is raised off the valve seat, and that can be moved, parallel to a transverse movement direction, between the intermediate position and a closed position in which it bears against the valve seat; a valve rod that bears the closure member is mounted for displacement parallel to the longitudinal and transverse movement directions; a displacement part rigidly connected to the valve rod; and a drive motor which rotates a driveshaft about an axis parallel to the longitudinal movement direction in order to move the closure member between the open position, the intermediate position and the closed position. The drive shaft has, in a first section, a longitudinal displacement cam member of a longitudinal displacement cam mechanism that interacts with a longitudinal displacement engagement member of the longitudinal displacement cam mechanism in order to move the closure member between the open position and the intermediate position, and has, in a second section, a transverse displacement cam member of a transverse displacement cam mechanism that interacts with a transverse displacement engagement member of the transverse displacement cam mechanism in order to move the closure member between the intermediate position and the closed position.

First claim

The invention claimed is:

1. A vacuum valve, comprising
a valve body with a valve opening which has an axis and is surrounded by a valve seat,
a closure member which is adjustable parallel to a longitudinal adjustment direction between an open position, in which said closure member opens up the valve opening, and an intermediate position, in which said closure member covers the valve opening but is raised from the valve seat, and which is adjustable parallel to a transverse adjustment direction between the intermediate position and a closed position, in which said closure member lies against the valve seat,
a valve rod which supports the closure member and is mounted displaceably parallel to the longitudinal adjustment direction and parallel to the transverse adjustment direction,
a displacement part which is connected rigidly to the valve rod,
a drive motor which rotates a drive shaft about an axis of rotation lying parallel to the longitudinal adjustment direction in order to adjust the closure member between the open position, the intermediate position and the closed position, and
the drive shaft has, in a first portion, a longitudinal displacement cam member of a longitudinal displacement cam mechanism that, for the adjustment of the closure member between the open position and the intermediate position, interacts with a longitudinal displacement engagement member of the longitudinal displacement cam mechanism, said longitudinal displacement engagement member being connected to the displacement part so as to be non-displaceable parallel to the longitudinal adjustment direction, and, in a second portion, has a transverse displacement cam member of a transverse displacement cam mechanism that, for the adjustment of the closure member between the intermediate position and the closed position, interacts with a transverse displacement engagement member of the transverse displacement cam mechanism, said transverse displacement engagement member being connected to the displacement part so as to be non-displaceable parallel to the transverse adjustment direction.

2. The vacuum valve as claimed in claim 1 , further comprising a supporting body connected rigidly to the valve body, and wherein, for the displaceable mounting of the valve rod parallel to the longitudinal adjustment direction and parallel to the transverse adjustment direction, the displacement part is mounted so as to be displaceable relative to the supporting body, parallel to the longitudinal adjustment direction and parallel to the transverse adjustment direction.

3. The vacuum valve as claimed in claim 2 , further comprising at least one longitudinal linear guide for the displacement part, said at least one longitudinal linear guide supporting the displacement part displaceably parallel to the longitudinal adjustment direction and being mounted displaceably parallel to the transverse adjustment direction by at least one transverse linear guide.

4. The vacuum valve as claimed in claim 2 , further comprising a slide which is non-displaceable parallel to the transverse adjustment direction mounted displaceably parallel to the longitudinal adjustment direction by at least one longitudinal linear guide, and the slide supports the displacement part displaceably parallel to the transverse adjustment direction, wherein the displacement part is held so as to be non-displaceable in relation to the slide parallel to the longitudinal adjustment direction.

5. The vacuum valve as claimed in claim 1 , wherein the transverse displacement cam member comprises a cam disk with an outer surface for guiding the transverse displacement engagement member, or the transverse displacement cam member has a guide groove that forms a groove guide for the transverse displacement engagement member.

6. The vacuum valve as claimed in claim 5 , the drive shaft has, in the second portion, in addition to the transverse displacement cam member that forms a first transverse displacement cam member, a second transverse displacement cam member to form a double cam disk and which interact with the transverse displacement engagement member that forms a first transverse displacement engagement member and a second transverse displacement engagement member.

7. The vacuum valve as claimed in claim 1 , wherein a cam formed by the longitudinal displacement cam member has a slope-free portion, and the longitudinal displacement engagement member passes into the slope-free portion at an end of the adjustment of the closure member from the open position into the intermediate position.

8. The vacuum valve as claimed in claim 1 , wherein the longitudinal displacement cam mechanism is a cylindrical cam mechanism.

9. The vacuum valve as claimed in claim 1 , wherein the drive shaft is a first drive shaft and further comprising a second drive shaft, the first and second drive shafts which are rotatable about respective axis of rotation by the drive motor or by a respective drive motor and each of the first and second drive shafts have, in the first portion, the longitudinal displacement cam member of a respective longitudinal displacement cam mechanism that in each case interacts with a respective longitudinal displacement engagement member of the respective longitudinal displacement cam mechanism, and which each have, in a second portion, a respective transverse displacement cam member of a respective transverse displacement cam mechanism that interacts in each case with a respective transverse displacement engagement member of the respective transverse displacement cam mechanism.

10. The vacuum valve as claimed in claim 1 , wherein the valve rod has a longitudinal axis that extends parallel to the longitudinal adjustment direction.

11. The vacuum valve as claimed in claim 1 , further comprising a locking device by which the rotation of the drive shaft about the axis of rotation is blockable.

Assignees

• Vat Holding Ag

Inventors

• Bohm Christoph
• Steffen Roman

Classifications

• F16K51/02

  specially adapted for high-vacuum installations · CPC title

• F16K31/5286 Primary

  comprising a sliding valve · CPC title

• F16K31/047

  characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means (F16K31/043 takes precedence) · CPC title

• F16K31/043

  characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means · CPC title

• F16K3/184 Primary

  by means of cams · CPC title