IMC evaporator boat-thermal insulation cartridge assembly

Patent metadata

Field	Value
Publication number	US-10184168-B2
Application number	US-201514600471-A
Country	US
Kind code	B2
Filing date	Jan 20, 2015
Priority date	Jan 20, 2015
Publication date	Jan 22, 2019
Grant date	Jan 22, 2019

Abstract

An IMC evaporator boat-thermal insulation cartridge assembly that includes an IMC evaporator boat and a thermal insulation cartridge, which has a container containing a thermal insulation body containing a cavity. The IMC evaporator boat is received within the cavity so as to define an air space between the IMC evaporator boat and the thermal insulation body. A heater is contained within the air space.

First claim

What is claimed is:

1. An IMC evaporator boat-thermal insulation cartridge assembly comprising:
an IMC evaporator boat formed of BN—TiB 2 or BN—AlN—TiB 2 and having a top surface that contains a metal evaporation pool, the IMC evaporator boat also having side walls, end walls and a bottom surface;
a thermal insulation cartridge comprising a container containing a thermal insulation body, wherein the thermal insulation body contains a cavity defined by a cavity surface, and the cavity surface comprises a frusto-conical cavity section, an arcuate cavity section and end cavity surfaces;
the IMC evaporator boat being received within the cavity, wherein the side walls of the IMC evaporator boat contact the frusto-conical cavity section, and a closed space is defined between the bottom surface of the IMC evaporator boat and the arcuate cavity section; and
a heater contained within the space and isolated from the IMC evaporator boat by the cavity, wherein the heater comprising parallel heating element rods under the bottom surface of the IMC evaporator boat.

2. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein a thermocouple is positioned within the closed space.

3. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the end walls of the IMC evaporator boat contact the end cavity surfaces of the cavity.

4. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the thermal insulation body comprises one of the materials selected from the following group: alumina-silica fibers or alumina fibers.

5. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the thermal insulation body is formed of alumina-silica fibers.

6. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the heater comprises one of the materials selected from the group comprising molybdenum disilicide or tungsten or an intermetallic composite or silicon carbide.

7. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the heating element rods extend through a wall of the container.

8. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the heating element rods comprise molybdenum disilicide.

9. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the heating element rods comprise tungsten.

10. The IMC evaporator boat-thermal insulation cartridge assembly according to claim 1 , wherein the heating element rods comprise silicon carbide.

Assignees

• Kennametal Inc

Inventors

• Lattimer Robinson E

Classifications

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• C23C14/26

  by resistance or inductive heating of the source · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title