Inorganic composition for transferring a fine unevenness

Patent metadata

Field	Value
Publication number	US-10184064-B2
Application number	US-201213983726-A
Country	US
Kind code	B2
Filing date	Jun 18, 2012
Priority date	Jun 21, 2011
Publication date	Jan 22, 2019
Grant date	Jan 22, 2019

Abstract

Disclosed is an inorganic composition for transferring a fine unevenness by which a fine unevenness made of an inorganic material capable of controlling a refractive index can be fabricated through a suitable transfer process. The composition according to the present invention contains a silicone compound and at least two types of metal alkoxides, wherein the metal alkoxides include a metal alkoxide having a metal species M1 (where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al) and a metal alkoxide having a metal species Si. In addition, a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of 0.2≤C M1 /C Si ≤24.

First claim

The invention claimed is:

1. An inorganic composition for transferring a fine unevenness comprising:
a silicone compound; and
at least two metal alkoxides, wherein
the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,
a ratio (C M1 /C Si ) between a molarity (C M1 ) of the metal alkoxide having the metal species M1 and a molarity (C Si ) of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (1): 0.04≤C M1 /C Si ≤4.56, and
the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

2. An inorganic composition for transferring a fine unevenness comprising:
a silicone compound;
at least two metal alkoxides; and
an photopolymerization initiator, wherein
the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,
the metal alkoxide having the metal species Si includes a metal alkoxide having any one of an acryl group, a methacryl group, an acryloyl group, a methacryloyl group, an acryloxy group, a methacryloxy group, a vinyl group, an epoxy group, or an oxetane group in a single molecule,
a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (2): 0.04≤C M1 /C Si ≤4.56, and
the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

3. An inorganic composition for transferring a fine unevenness comprising:
a silicone compound;
at least two metal alkoxides; and
a photoacid generator, wherein
the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,
a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si , of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (3): 0.04≤C M1 /C Si ≤4.56, and
the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

4. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein at least any one of the silicone compound or the metal alkoxides includes an aryl group.

5. The inorganic composition for transferring a fine unevenness according to claim 4 , wherein the aryl group is bound with silicon (Si).

6. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxide is a partially condensed material.

7. The inorganic composition for transferring a fine unevenness according to claim 1 , further containing a fluorine-contained silane coupling agent.

8. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein, when the composition is dissolved in a propylene glycol monomethyl ether solvent at a concentration of 3 weight %, and a small-angle X-ray scattering measurement using X-rays having a wavelength of 0.154 nm is performed for the solution, a radius of inertia computed by applying a Gunier plot to a result of the measurement is 5 nm or shorter.

9. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxides are condensed in a chain of —O-M1-O-M2-O-M3-O-M4-O—, where M1, M2, M3, and M4 denote metal elements, which are identical to each other or different from each other.

10. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxides are condensed into a general formula [—O-M-] n , where M =Ti or Si, and n ≥4.

Assignees

• Koike Jun
• Asahi Chemical Ind

Inventors

• Koike Jun

Classifications

• H01L31/02168

  Electricity · mapped topic

• C09D143/04 Primary

  Homopolymers or copolymers of monomers containing silicon · CPC title

• C09D185/04

  containing boron · CPC title

• C08L83/04 Primary

  Polysiloxanes · CPC title

• C08L83/14

  in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms (C08L83/10 takes precedence) · CPC title