Method for manufacturing piezoelectric substrate
US-9219224-B2 · Dec 22, 2015 · US
US10181556B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10181556-B2 |
| Application number | US-201615086786-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 31, 2016 |
| Priority date | Mar 31, 2015 |
| Publication date | Jan 15, 2019 |
| Grant date | Jan 15, 2019 |
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A piezoelectric/electrostrictive material is composed of Mn and a compound of Pb(Zn, Nb)O3—Pb(Ni, Nb)O3—Pb(Zr, Ti)O3. A ratio of a molar amount of Mn relative to a sum of respective molar amounts of Ni, Zn, Ti, Zr, Nb and Mn is at least 0.001 to no more than 0.015. A ratio of a molar amount of Nb relative to a sum of respective molar amounts of Ni and Zn is at least 2.007 to no more than 2.125.
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What is claimed is: 1. A piezoelectric/electrostrictive material comprising Mn and a compound of Pb(Zn, Nb)O 3 —Pb(Ni, Nb)O 3 —Pb(Zr, Ti)O 3 , wherein a ratio of a molar amount of Mn relative to a sum of respective molar amounts of Ni, Zn, Ti, Zr, Nb and Mn is at least 0.001 to no more than 0.015, and a ratio of a molar amount of Nb relative to a sum of respective molar amounts of Ni and Zn is at least 2.007 to no more than 2.125. 2. The piezoelectric/electrostrictive material according to claim 1 expressed by the general formula Pb x [(Zn 1/3 , Nb 2/3 ) a (Ni 1/3 , Nb 2/3 ) b (Ti c , Zr d ) Mn e Nb f ] O 3 (wherein 0.98≤x≤1.00, 0.2≤a+b≤0.3, 0.35c≤0.45, 0.3≤d≤0.4, 0.001≤e≤0.015, 0.002≤f≤0.025, 2.007≤(2a+2b+f)/(a+b)≤2.125). 3. The piezoelectric/electrostrictive material according to claim 2 , wherein a sintering temperature is no more than 1100 degrees C. 4. The piezoelectric/electrostrictive material according to claim 1 , wherein a sintering temperature is no more than 1100 degrees C. 5. A piezoelectric/electrostrictive body composed of a piezoelectric/electrostrictive material containing Mn and a compound of Pb(Zn, Nb)O 3 —Pb(Ni, Nb)O 3 —Pb(Zr, Ti)O 3 , wherein a ratio of a molar amount of Mn relative to a sum of respective molar amounts of Ni, Zn, Ti, Zr, Nb and Mn is at least 0.001 to no more than 0.015, and a ratio of a molar amount of Nb relative to a sum of respective molar amounts of Ni and Zn is at least 2.007 to no more than 2.125. 6. The piezoelectric/electrostrictive body according to claim 5 wherein, a mechanical quality factor Qm is at least 150. 7. The piezoelectric/electrostrictive body according to claim 6 , wherein a piezoelectric constant d 31 is at least 180 pm/V. 8. The piezoelectric/electrostrictive body according to claim 6 , wherein a Curie temperature is at least 300 degrees C. 9. A resonance driving device comprising; the piezoelectric/electrostrictive body according to claim 6 , and a pair of electrodes connected to the piezoelectric/electrostrictive body. 10. The piezoelectric/electrostrictive body according to claim 5 , wherein a piezoelectric constant d 31 is at least 180 pm/V. 11. The piezoelectric/electrostrictive body according claim 10 , wherein a Curie temperature is at least 300 degrees C. 12. The piezoelectric/electrostrictive body according to claim 5 , wherein a Curie temperature is at least 300 degrees C. 13. A resonance driving device comprising; the piezoelectric/electrostrictive body according to claim 12 , and a pair of electrodes connected to the piezoelectric/electrostrictive body. 14. A resonance driving device comprising; the piezoelectric/electrostrictive body according to claim 10 , and a pair of electrodes connected to the piezoelectric/electrostrictive body. 15. A resonance driving device comprising; the piezoelectric/electrostrictive body according to claim 5 , and a pair of electrodes connected to the piezoelectric/electrostrictive body.
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