Measuring apparatus, on-chip instrumentation device and measuring method
US-12181278-B2 · Dec 31, 2024 · US
US10180397B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10180397-B2 |
| Application number | US-201414913507-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 22, 2014 |
| Priority date | Aug 22, 2013 |
| Publication date | Jan 15, 2019 |
| Grant date | Jan 15, 2019 |
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A THz quantum cascade laser is used to investigate a target by directing a first beam of laser radiation from the laser at the target to thereby produce a second beam of laser radiation by interaction of the first beam with the target. Self-mixing of the first and second beams occurs within the laser and causes variations in a signal such as the operating voltage of the laser. An operating parameter of the laser that affects the interaction of the first beam with, the target is varied. The operating voltage is monitored and processed to determine phase and amplitude changes associated with material properties of the target. Consequently in one embodiment the invention provides for processing the variations in the signal to produce various images of the target.
Opening claim text (preview).
The invention claimed is: 1. A method for investigating a target comprising the steps of: directing a first beam of radiation, from a laser radiation source in a laser cavity, at the target to thereby produce a second beam of laser radiation by interaction of the first beam with the target, directing the second beam of laser radiation into the laser cavity wherein self-mixing of the first and second beams occurs within the laser cavity; varying a parameter affecting the interaction of the first beam with the target; detecting a signal arising from the self-mixing; and processing the signal to thereby determine phase and amplitude changes associated with material properties of the target to derive a refractive index (n) and an extinction coefficient (k) of the target, wherein the method measures both real and imaginary parts concurrently. 2. A method according to claim 1 , wherein the laser is arranged to operate in the terahertz (THz) band. 3. A method according to claim 1 , wherein the laser comprises a quantum cascade laser (QCL). 4. A method according to claim 1 , wherein the step of detecting the signal involves monitoring an electrical signal across terminals of the laser. 5. A method according to claim 1 , wherein the step of varying a parameter includes applying a modulation to a current for driving the laser. 6. A method according to claim 5 , wherein the modulation comprises a continuous wave frequency modulation of the laser beam frequency. 7. A method according to claim 1 , wherein the step of processing the signal includes detecting a phase shift of a waveform of the signal associated with a phase shift imparted by the interaction of the first beam with the target. 8. A method according to claim 7 , wherein the step of processing the signal further includes detecting a change of the waveform of the signal associated with an attenuation imparted by the interaction of the first beam with the target. 9. A method according to claim 1 , wherein the step of varying the parameter may comprise moving the target toward or away from a source of the first beam of laser radiation. 10. A method according to claim 1 , including causing the first beam of laser radiation to interact with a portion of the target having known properties. 11. A method according to claim 10 , including applying known values of n and k of two materials from said portion of the target having known values to thereby derive n and k of a third material of the target, being a material under test. 12. A method according to claim 11 including fitting a mathematical model of said laser self-mixing to data for each of a number of positions of the target to obtain a set of parameter values for each of the positions. 13. A method according to claim 1 , including mechanically scanning the target by moving the target relative to the laser through a plurality of positions to thereby sense variations in the properties of the target as a function of location thereof. 14. A method according to claim 13 , including processing the sensed variations in the properties of the target to produce an image of the target. 15. A method according to claim 14 , including making measurements of variations in the signal at each of a number of positions during the mechanical scanning. 16. A method according to claim 15 including removing effects due to power modulation of the laser from each of said measurements. 17. A method according to claim 15 including processing only a portion of each modulation period of the signal at each scanning position to avoid the effect of transients at edges of a modulation period of the laser, wherein the said portion of the modulation period excludes the edges. 18. A method according to claim 15 including determining a reflection coefficient of the target at each position. 19. A method according to claim 18 wherein the step of determining the reflection coefficient is based on an integral of an absolute value of the signal over time. 20. A method according to claim 19 including producing an image from the target by fitting time domain traces of the signal to a mathematical model of said laser self-mixing to thereby calculate variations in a feedback parameter of the model wherein the image is generated by plotting the feedback parameter for each of a number of the positions. 21. A system for investigating a target comprising: a laser; a target assembly arranged to receive an incident beam from the laser and return a beam back to the laser after interaction of the incident beam with a target of said assembly; a data acquisition assembly responsive to electrical terminals of the laser; and a computational device responsive to the data acquisition assembly, wherein the computational device is programmed to determine phase and amplitude changes associated with the target and imparted on to the beam returned back to the laser after the interaction, wherein the system measures both real and imaginary parts concurrently. 22. A system according to claim 21 wherein the laser is under control of the computational device for operation of the laser and variation of its operating parameters. 23. A system according to claim 21 including a translation assembly arranged to impart a relative motion between the laser and the target. 24. A system according to claim 23 , wherein the translation assembly includes one or more actuators under control of the computational device wherein the computational device is programmed to operate the translation assembly for data acquisition at each of a number of positions of the target. 25. A computer software product comprising a non-transitory machine readable media configured to provide instructions for an electronic processor to: operate a laser to direct a laser beam at a target assembly; acquire electrical data being a function of self-mixing of the laser beam with a reflection thereof subsequent to interaction with the target assembly; and determine phase and amplitude changing properties of a target portion of the target assembly on the basis of the acquired electrical data, wherein the product measures both real and imaginary parts concurrently.
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