Method for forming color filter array, method for manufacturing imaging apparatus, and imaging apparatus

Patent metadata

Field	Value
Publication number	US-10178286-B2
Application number	US-201514838145-A
Country	US
Kind code	B2
Filing date	Aug 27, 2015
Priority date	Aug 29, 2014
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.

First claim

What is claimed is:

1. An imaging apparatus including a plurality of pixels respectively having color filters with the same color,
wherein an average value of thicknesses of the respective color filters of the plurality of pixels is less than 0.75 μm,
wherein the thicknesses of the respective color filters of the plurality of pixels periodically change at an interval of 10 times or more of an interval between the plurality of pixels, and
wherein an amplitude of the change is 2.0% or less of the average value.

2. The imaging apparatus according to claim 1 , wherein each of the color filters is a green color light filter or a red color light filter.

3. The imaging apparatus according to claim 1 , wherein the average value is less than 0.20 times of a size of each of the plurality of pixels.

4. The imaging apparatus according to claim 1 , wherein the amplitude of the change is 1 nm or more and 10 nm or less.

5. The imaging apparatus according to claim 1 , wherein a plurality of aluminum layers is arranged below the color filters,
wherein a passivation film is arranged between the plurality of aluminum layers and the color filters, and
wherein a planarizing film is arranged between an aluminum layer that is closest to the passivation film among the plurality of aluminum layers and the passivation film.

Assignees

• Canon Kk

Inventors

• Ishioka Masao
• Shimoyama Daisuke
• Sumida Takayuki
• Aoki Kei
• Kawabata Yasuhiro
• Inatani Naoki
• Tezuka Tomoyuki
• Iwata Jun
• Kurihara Masaki

Classifications

• H04N25/134

  based on three different wavelength filter elements · CPC title

• H01L27/14621

  Electricity · mapped topic

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• H01L27/14685

  Electricity · mapped topic

• G03F7/40

  Treatment after imagewise removal, e.g. baking · CPC title