Method of promoting electric output of piezoelectric/conductive hybrid polymer and fabricating method of piezoelectric/conductive hybrid polymer thin film

Patent metadata

Field	Value
Publication number	US-10177301-B2
Application number	US-201414265384-A
Country	US
Kind code	B2
Filing date	Apr 30, 2014
Priority date	Dec 27, 2013
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

A method of fabricating a piezoelectric/conductive hybrid polymer thin film is provided, which is promoting an electric output of a piezoelectric polymer and includes: a mixing step including: forming a piezoelectric solution by dissolving a PVDF-TrFE in an active solvent; forming a conductive solution by dissolving a PEDOT:PSS in a water; and forming a piezoelectric/conductive hybrid polymer solution by mixing the piezoelectric solution and the conductive solution; a filming step, wherein the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed; and an anneal step, wherein the piezoelectric/conductive hybrid polymer thin film is recrystallized and a nano-sized protruding structure is formed on a surface of the piezoelectric/conductive hybrid polymer thin film.

First claim

What is claimed is:

1. A method of fabricating a piezoelectric/conductive hybrid polymer thin film, which is for promoting an electric output of a piezoelectric/conductive polymer, the method comprising:
a mixing step, comprising:
forming a piezoelectric solution by dissolving poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) in an active solvent;
forming a conductive solution by dissolving poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) in water; and
forming a piezoelectric/conductive hybrid polymer solution by mixing the piezoelectric solution and the conductive solution;

a filming step, wherein the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed; and
an annealing step, wherein the piezoelectric/conductive hybrid polymer thin film is recrystallized, and a nano-sized protruding structure is formed on a surface of the piezoelectric/conductive hybrid polymer thin film.

2. The method of claim 1 , wherein after the annealing step, the method further comprises:
an imprinting step, wherein a nanograss is formed on the nano-sized protruding structure of the piezoelectric/conductive hybrid polymer thin film.

3. The method of claim 2 , wherein the imprinting step is performed by a thermal nanoimprinting mold process to form the nanograss on the nano-sized protruding structure on the surface of the piezoelectric/conductive hybrid polymer thin film, wherein a height of the nanograss is sub-20 nm.

4. The method of claim 1 , wherein the active solvent is a butanone solvent.

5. The method of claim 4 , wherein the PVDF-TrFE is dissolved in the active solvent at a temperature from 70° C. to 80° C.

6. The method of claim 5 , wherein a weight percentage range of the PEDOT:PSS is 4.3% to 5.2% based on a weight percentage of the conductive solution being 100%.

7. The method of claim 6 , wherein the weight percentage of the PEDOT:PSS in the conductive solution is 4.77%.

8. The method of claim 4 , wherein a weight percentage range of the PEDOT:PSS is 0.78% to 2% based on a weight percentage of the piezoelectric/conductive hybrid polymer solution being 100%.

9. The method of claim 8 , wherein a weight percentage of PEDOT:PSS in the piezoelectric/conductive hybrid polymer solution is 1%.

10. The method of claim 9 , wherein the filming step is performed by heating the piezoelectric/conductive hybrid polymer solution at a temperature of 80° C. for a vaporization of the butanone solvent, and gradiently heating the piezoelectric/conductive hybrid polymer solution at a temperature from 80° C. to 100° C. for a vaporization of the water.

11. The method of claim 10 , wherein the filming step is performed by a casting process.

12. The method of claim 11 , wherein the filming step is performed for 30 seconds to 3 minutes.

13. The method of claim 12 , wherein the filming step is performed for 3 minutes.

14. The method of claim 1 , wherein the annealing step is performed by heating the piezoelectric/conductive hybrid polymer thin film at a recrystallization temperature between a Curie point (Tc) and a melting point (Tm).

15. The method of claim 14 , wherein the recrystallization temperature is 140° C.

16. The method of claim 15 , wherein the annealing step is performed at the recrystallization temperature for 2 hours to 5 hours.

17. The method of claim 16 , wherein the annealing step is performed at the recrystallization temperature for 2 hours.

18. The method of claim 1 , wherein a thickness of the piezoelectric/conductive hybrid polymer thin film is 10 um to 10000 um.

Assignees

• Univ Nat Tsing Hua

Inventors

• Hong Chien-Chong
• Liou Tong-Miin
• Lin Kai-Lun

Classifications

• H01L41/253

  Electricity · mapped topic

• H01L41/317

  Electricity · mapped topic

• H01L41/45

  Electricity · mapped topic

• H01L41/193 Primary

  Electricity · mapped topic

• H10N30/04 Primary

  Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning · CPC title