Method for manufacturing piezoelectric substrate
US-9219224-B2 · Dec 22, 2015 · US
US10177300B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10177300-B2 |
| Application number | US-201515032328-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2015 |
| Priority date | Aug 29, 2014 |
| Publication date | Jan 8, 2019 |
| Grant date | Jan 8, 2019 |
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A piezoelectric ceramic may be slightly deformed by firing, and a manufacturing method therefor, and an electronic component are disclosed. There is provided a piezoelectric ceramic including a plurality of crystal grains including a lead zirconate titanate-type crystal containing Zn, and Bi, and crystal grain boundaries existing between a plurality of the crystal grains, wherein a plurality of the crystal grains include first crystal grains, and wherein the first crystal grains have a content of at least one element of Zn and Bi present in the inside of the first crystal grains that is smaller than the content of the at least one element present in an area including the crystal grain boundaries that are in contact with the crystal grains. The piezoelectric ceramic is slightly deformed by firing and is capable of forming an electronic component which has little warp or deformation even if it is thin.
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The invention claimed is: 1. A piezoelectric ceramic comprising a plurality of crystal grains including a lead zirconate titanate-type crystal containing Zn and Bi, and crystal grain boundaries present between a plurality of the crystal grains, wherein a plurality of the crystal grains include first crystal grains, and wherein the first crystal grains have a content of at least one element of Zn and Bi present in the inside of the first crystal grains that is smaller than the content of the at least one element present in an area including the crystal grain boundaries that are in contact with the first crystal grains. 2. The piezoelectric ceramic according to claim 1 , wherein substantially no amorphous phase and substantially no crystal phase other than the lead zirconate titanate-type crystal are present at the crystal grain boundaries. 3. The piezoelectric ceramic according to claim 1 , wherein the ratio of the number of the first crystal grains in a plurality of the crystal grains is 90% or more. 4. The piezoelectric ceramic according to claim 1 , wherein the piezoelectric ceramic has a porosity of 0.25% or less. 5. The piezoelectric ceramic according to claim 1 , wherein a plurality of the crystal grains have an average grain diameter of 1.0 to 4.0 μm. 6. An electronic component comprising a piezoelectric body containing the piezoelectric ceramic according to claim 1 , and an electrode layer. 7. The electronic component according to claim 6 , wherein the electrode layer comprises Ag as a main component. 8. The electronic component according to claim 7 , wherein the electrode layer further comprises 35% by mass or less of Pd.
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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