Light-emitting diode with multiple N contact structure

Patent metadata

Field	Value
Publication number	US-10177279-B2
Application number	US-201715608141-A
Country	US
Kind code	B2
Filing date	May 30, 2017
Priority date	Jun 1, 2016
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

Provided are a horizontal light emitting diode (LED) device and a method for fabricating the same. The horizontal LED device includes a sapphire substrate; an n-type GaN layer disposed on the sapphire substrate; an activation layer disposed on the n-type GaN layer; a p-type GaN layer disposed on the activation layer; a current spreading layer disposed on the p-type GaN layer; a p-electrode disposed on the current spreading layer; a plurality of holes exposing the n-type GaN layer through the current spreading layer, the p-type GaN layer, and activation layer; and an n-electrode disposed on the exposed n-type GaN layer and being in ohmic contact with the exposed n-type GaN layer at a plurality of positions on bottom surfaces of the plurality of holes.

First claim

What is claimed is:

1. A horizontal light emitting diode (LED) device comprising:
a sapphire substrate;
a n-type GaN layer on the sapphire substrate;
an activation layer on the n-type GaN layer, the activation layer having a current density space distribution or a light emitting intensity space distribution;
a p-type GaN layer on the activation layer;
a current spreading layer on the p-type GaN layer;
a p-electrode on the current spreading layer;
a plurality of holes exposing the n-type GaN layer through the current spreading layer, the p-type GaN layer, and the activation layer; and
an n-electrode on the exposed n-type GaN layer and in ohmic contact with the exposed n-type GaN layer at a bottom surface of each of the plurality of holes,
wherein a plurality of mesas are formed in respective non-etching areas between adjacent holes of the plurality of holes; and either
each respective mesa of the plurality of mesas comprises a respective current density space distribution of a current density intensity such that the current density intensity has a constant progression in the first direction from a pad region of the n-electrode to a distal end of the n-electrode; or
each respective mesa of the plurality of mesas comprises a respective light emitting space distribution of a light emitting intensity such that the light emitting intensity has a constant progression in the first direction from a pad region of the n-electrode to a distal end of the n-electrode.

2. The horizontal LED device as set forth in claim 1 , wherein the p-electrode comprises a p-electrode pad and at least two p-electrode fingers branching from the p-electrode pad to extend in the first direction,
the n-electrode comprises an n-electrode pad and at least one n-electrode finger extending from the n-electrode pad in the first direction,
the at least one n-electrode finger extends between the at least two p-electrode fingers,
the plurality of holes are arranged in the first direction, and
the at least one n-electrode finger is aligned with the plurality of holes.

3. The horizontal LED device as set forth in claim 2 , wherein a contact area between the bottom surface of each of the plurality of holes and the n-electrode finger decreases sequentially in a direction toward the p-electrode pad.

4. The horizontal LED device as set forth in claim 2 , wherein a width of the activation layer between the adjacent holes of the plurality of holes in the first direction is smaller than a mesa width of each of the plurality of holes and greater than a width of the at least one n-electrode finger in a second direction perpendicular to the first direction.

5. The horizontal LED device as set forth in claim 1 , further comprising:
a passivation layer on opposite side surfaces of each of the plurality of holes in the first direction and the current spreading layer between the adjacent holes of the plurality of holes.

6. The horizontal LED device as set forth in claim 5 , wherein the passivation layer comprises a distributed Bragg reflector comprising a multilayer structure having different refractive indices.

7. The horizontal LED device as set forth in claim 5 , wherein the passivation layer comprises a silicon oxide layer or a magnesium fluoride layer, and
the activation layer, the passivation layer, and the p-electrode are on the n-type GaN layer in sequence to provide an omnidirectional reflector (ODR) structure.

8. The horizontal LED device as set forth in claim 4 , wherein the width of the activation layer is constant in the first direction, and
a width of each of each of the plurality of holes along the first direction is different from other ones of the plurality of holes.

9. A method for fabricating a horizontal light emitting diode (LED) device, the method comprising:
forming the horizontal LED device including a mesa structure and an n-electrode finger between p-electrode fingers extending in a first direction to extract a current density space distribution or a light emitting intensity space distribution of the horizontal LED device; and
forming the mesa structure by respectively disposing a plurality of holes between selected positions and aligned in the first direction;
wherein the mesa structure comprises a plurality of mesas formed in respective non-etching areas between adjacent holes of the plurality of holes; and either
each respective mesa of the plurality of mesas comprises a respective current density space distribution of a current density intensity such that the current density intensity has a constant progression in the first direction from a pad region of the n-electrode to a distal end of the n-electrode; or
each respective mesa of the plurality of mesas comprises a respective light emitting space distribution of a light emitting intensity such that the light emitting intensity has a constant progression in the first direction from a pad region of the n-electrode to a distal end of the n-electrode.

10. The method as set forth in claim 9 , wherein fabricating the horizontal LED device comprises:
disposing a n-type GaN layer on a sapphire substrate;
disposing an activation layer on the n-type GaN layer, the activation layer having a current density space distribution or a light emitting intensity space distribution;
disposing a p-type GaN layer on the activation layer;
disposing a current spreading layer on the p-type GaN layer;
disposing a p-electrode on the current spreading layer, the p-electrode including a p-electrode pad and the p-electrode fingers branching from the p-electrode pad, and the plurality of holes exposing the n-type GaN layer through the current spreading layer, the p-type GaN layer, and the activation layer; and
disposing an n-electrode on the exposed n-type GaN layer, the n-electrode including an n-electrode pad and the n-electrode finger extending from the n-electrode pad, and n-electrode being in ohmic contact with the exposed n-type GaN layer at a bottom surface of each of the plurality of holes.

11. The method as set forth in claim 10 , wherein a contact area between the bottom surface of each of the plurality of holes and the n-electrode finger decreases sequentially in a direction toward the p-electrode pad.

12. The method as set forth in claim 10 , wherein a width of the activation layer between the adjacent holes of the plurality of holes in the first direction is smaller than a mesa width of each of the plurality of holes and greater than a width of the n-electrode finger in a second direction perpendicular to the first direction.

13. The method as set forth in claim 9 , further comprising:
disposing a passivation layer on opposite side surfaces of each of the plurality of holes in the first direction.

14. The method as set forth in claim 13 , wherein the passivation layer comprises a distributed Bragg reflector comprising a multilayer structure having different refractive indices.

15. The method as set forth in claim 13 , wherein the passivation layer comprises a silicon oxide layer or a magnesium fluoride layer, and
the activation layer, the passivation layer, and the p-electrode are on the n-type GaN layer in sequence to provide an omnidirectional reflector (ODR) structure.

16. The method as set forth in claim 12 , wherein the width of the activation layer is constant in the first direction, and
a width of each of the plurality of holes along the first direction is different from other ones of the plurality of holes.

17. The method as set forth in claim 9 , wherein the n-electrode finger is aligned with e plurality of holes.

Assignees

• Seong Tae Yeon
• Kim Ki Seok
• Jin Junyong
• Univ Korea Res & Bus Found

Inventors

• Seong Tae Yeon
• Kim Ki Seok
• Jin Junyong

Classifications

• H01L33/10

  Electricity · mapped topic

• H01L33/24

  Electricity · mapped topic

• H01L33/382 Primary

  Electricity · mapped topic

• H01L2933/0016

  Electricity · mapped topic

• H10H20/032

  of electrodes · CPC title