Internal temperature measurement method and internal temperature measurement device

Patent metadata

Field	Value
Publication number	US-10175120-B2
Application number	US-201515124374-A
Country	US
Kind code	B2
Filing date	Feb 19, 2015
Priority date	Mar 13, 2014
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

A method includes measuring a first temperature difference between first heat entry and discharge parts on a first heat transfer path extending from a portion of a surface of the object to the first heat discharge part using a first thermopile, and measuring a second temperature difference between a second heat entry and discharge parts on a second heat transfer path extending from another portion of the surface of the object to the second heat discharge part using a second thermopile, and measuring a reference temperature at a predetermined position on the first or second heat transfer path using a temperature sensor, and calculating the internal temperature of the object using the measured first and second temperature differences, and the reference temperature, and at least one predetermined value excluding a physical property value of a non-heating part of the object located at a surface side of the object.

First claim

The invention claimed is:

1. An internal temperature measurement method for measuring an internal temperature of an object, the method comprising:
measuring a first temperature difference across a first thin film comprising a first heat entry part and a first heat discharge part on a first heat transfer path using a first thermopile, the first heat transfer path extending from a portion of a surface of the object to the first heat discharge part, and measuring a second temperature difference across a second thin film comprising a second heat entry part and a second heat discharge part on a second heat transfer path using a second thermopile, the second heat transfer path extending from another portion of the surface of the object to the second heat discharge part and having a thermal resistance different from a thermal resistance of the first heat transfer path, and measuring a reference temperature using a temperature sensor, the reference temperature being a temperature at a predetermined position on the first heat transfer path or the second heat transfer path; and
calculating the internal temperature of the object using the first temperature difference, the second temperature difference, and the measured reference temperature and at least one predetermined value excluding a physical property value of a non-heating part of the object located at a surface side of the object.

2. The internal temperature measurement method according to claim 1 , wherein
calculating the internal temperature of the object includes calculating the internal temperature of the object using a formula for calculating the internal temperature of the object derived assuming that a temperature of the first heat discharge part is equal to a temperature of the second heat discharge part.

3. The internal temperature measurement method according to claim 1 , wherein
measuring the first temperature difference and the second temperature difference further includes measuring a third temperature difference between the first heat entry part and the second heat entry part using a third thermopile, and
calculating the internal temperature of the object includes calculating the internal temperature of the object using the first temperature difference, the second temperature difference, the third temperature difference, and the measured reference temperature, and the at least one predetermined value.

4. The internal temperature measurement method according to claim 1 , wherein
measuring the first temperature difference and the second temperature difference includes measuring the first temperature difference and the second temperature difference that are associated with the first heat transfer path and the second heat transfer path in which the first heat discharge part and the second heat discharge part are identical or connected to each other.

5. The internal temperature measurement method according to claim 1 , wherein
the at least one predetermined value includes a ratio of a thermal resistance of a portion of the first heat transfer path from the first heat entry part to the first heat discharge part to a thermal resistance of a portion of the second heat transfer path from the second heat entry part to the second heat discharge part or an inverse of the ratio.

6. The internal temperature measurement method according to claim 1 , further comprising:
calculating a parameter associated with a thermal resistance of the non-heating part to be included in a formula for calculating the internal temperature of the object in a nonequilibrium state based on a measurement result obtained in measuring at least the first temperature difference across the first thin film comprising the first heat entry part and the first heat discharge part on the first heat transfer path using the first thermopile, and measuring the second temperature difference across the second thin film comprising the second heat entry part and the second heat discharge part on the second heat transfer path using the second thermopile; and
calculating the internal temperature of the object in the nonequilibrium state based on the formula for calculating the temperature using the calculated parameter.

7. An internal temperature measurement device, comprising:
a substrate having a first surface to be placed in contact with a surface of an object to measure an internal temperature of the object;
a first temperature difference sensor and a second temperature difference sensor arranged on a second surface of the substrate;
a temperature sensor; and
a calculation unit configured to calculate the internal temperature of the object using a temperature difference measured by the first temperature difference sensor, a temperature difference measured by the second temperature difference sensor, a temperature measured by the temperature sensor, and at least one predetermined value excluding a physical property value of a non-heating part of the object located at a surface side of the object,
wherein the first temperature difference sensor includes
a first thin film including a first heat entry part and a first heat discharge part; and
a first thermopile configured to detect a temperature difference between the first heat entry part and the first heat discharge part included in the first thin film, and the first thin film is supported on the substrate with a first thermal conductivity member configured to transfer heat entering the substrate from the object to the first heat entry part included in the first thin film,
the second temperature difference sensor includes
a second thin film including a second heat entry part and a second heat discharge part; and
a second thermopile configured to detect a temperature difference between the second heat entry part and the second heat discharge part included in the second thin film, and the second thin film is supported on the substrate with a second thermal conductivity member configured to transfer heat entering the substrate from the object to the second heat entry part included in the second thin film, and

a thermal resistance of a portion of a heat transfer path extending from a heat entrance of the second thermal conductivity member to the second heat discharge part in the second thin film is different from a thermal resistance of a portion of a heat transfer path extending from a heat entrance of the first thermal conductivity member of the first temperature difference sensor to the first heat discharge part included in the first thin film, and
the temperature sensor is configured to measure a temperature of the second surface of the substrate, a temperature of the first heat entry part of the first temperature difference sensor, or a temperature of the second heat entry part of the second temperature difference sensor.

8. The internal temperature measurement device according to claim 7 , wherein
the calculation unit is configured to calculate the internal temperature of the object using a formula for calculating the internal temperature of the object derived assuming that a temperature of the first heat discharge part is equal to a temperature of the second heat discharge part.

9. The internal temperature measurement device according to claim 7 , further comprising
a connection unit configured to connect the first heat entry part of the first temperature difference sensor and the second heat entry part of the second temperature difference sensor.

10. The internal temperature measurement device according to claim 7 , further comprising
a third thin film configured to connect the first heat entry part of the first temperature difference sensor and the second heat entry part of the second temperature difference sensor, the third thin film

Assignees

• Omron Tateisi Electronics Co

Inventors

• Nakagawa Shinya
• Shimizu Masao
• Hamaguchi Tsuyoshi

Classifications

• G01K7/02

  using thermoelectric elements, e.g. thermocouples · CPC title

• G01K7/427 Primary

  Temperature calculation based on spatial modeling, e.g. spatial inter- or extrapolation · CPC title

• G01K3/14

  in respect of space · CPC title