Fixture to support reel-to-reel inspection of semiconductor devices or other components

Patent metadata

Field	Value
Publication number	US-10167155-B2
Application number	US-201514822723-A
Country	US
Kind code	B2
Filing date	Aug 10, 2015
Priority date	Aug 10, 2015
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

A system includes a component inspection system having a radiation source configured to generate radiation and a radiation detector configured to detect the radiation after the radiation passes through components to be inspected. The system also includes a fixture configured to receive multiple reels that are each configured to receive a tape in or on which the components are located. The fixture includes a base configured to be secured to a support, a shaft, one or more motors mounted to the shaft and configured to rotate the reels, and one or more joints coupling the shaft and base. The one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base.

First claim

What is claimed is:

1. An apparatus comprising:
a fixture configured to receive multiple reels that are each configured to receive a tape in or on which components to be inspected are located;
wherein the fixture comprises:
a base configured to be secured to a support;
a shaft;
one or more motors mounted to the shaft and configured to rotate the reels; and
one or more joints coupling the shaft and the base, wherein the one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base such that the tape is movable into and out of a path of radiation that is generated by a radiation source.

2. The apparatus of claim 1 , wherein:
the base is configured to be secured to different supports of different component inspection systems; and
the one or more joints are configured to allow positioning of the shaft in different positions depending on configurations of the different component inspection systems.

3. The apparatus of claim 1 , further comprising:
a controller configured to drive the one or more motors.

4. The apparatus of claim 1 , wherein the fixture further comprises:
at least one additional motor configured to reorient and reposition the shaft.

5. The apparatus of claim 1 , wherein the base is configured to be removably secured to the support such that the base is removable from a first component inspection system and securable to a second component inspection system having a different configuration from the first component inspection system.

6. The apparatus of claim 1 , wherein the shaft extends linearly from the one or more joints such that the one or more motors are located distally along the shaft from the one or more joints.

7. The apparatus of claim 2 , wherein the one or more joints are configured to allow positioning of the shaft horizontally in a first component inspection system and vertically in a second component inspection system.

8. The apparatus of claim 3 , wherein:
the one or more motors comprise a first motor and a second motor; and
the controller comprises:
a first drive circuit configured to control operation of the first motor; and
a second drive circuit configured to control operation of the second motor.

9. The apparatus of claim 8 , wherein:
the first drive circuit comprises a first transistor having a first gate;
the second drive circuit comprises a second transistor having a second gate; and
the controller further comprises:
a pulse circuit configured to generate pulses in response to trigger inputs; and
a switch configured to selectively direct the pulses to the first and second gates.

10. The apparatus of claim 9 , wherein the controller further comprises a control configured to adjust widths of the pulses.

11. The apparatus of claim 9 , wherein each of the first and second drive circuits further comprises:
a control configured to cause scrolling of the tape; and
a control configured to adjust a speed of the scrolling.

12. A system comprising:
a component inspection system comprising:
a radiation source configured to generate radiation; and

a radiation detector configured to detect the radiation after the radiation passes through components to be inspected; and
a fixture configured to receive multiple reels that are each configured to receive a tape in or on which the components are located;
wherein the fixture comprises:
a base configured to be secured to a support;
a shaft;
one or more motors mounted to the shaft and configured to rotate the reels; and
one or more joints coupling the shaft and the base, wherein the one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base such that the tape is movable into and out of a path of the radiation that is generated by the radiation source and detected by the radiation detector.

13. The system of claim 12 , wherein the one or more joints are configured to allow positioning of the shaft horizontally or vertically depending on an arrangement of the radiation source and the radiation detector in the component inspection system.

14. The system of claim 12 , further comprising:
a controller configured to drive the one or more motors.

15. The system of claim 12 , wherein the one or more joints are configured to allow rotation of the shaft about the longitudinal axis of the shaft so that the component inspection system is able to capture images of the components at multiple angles.

16. The system of claim 14 , wherein:
the one or more motors comprise a first motor and a second motor; and
the controller comprises:
a first drive circuit configured to control operation of the first motor; and
a second drive circuit configured to control operation of the second motor.

17. The system of claim 16 , wherein:
the first drive circuit comprises a first transistor having a first gate;
the second drive circuit comprises a second transistor having a second gate; and
the controller further comprises:
a pulse circuit configured to generate pulses in response to trigger inputs; and
a switch configured to selectively direct the pulses to the first and second gates.

18. The system of claim 17 , wherein the controller further comprises a control configured to adjust widths of the pulses.

19. The system of claim 17 , wherein each of the first and second drive circuits further comprises:
a control configured to cause scrolling of the tape; and
a control configured to adjust a speed of the scrolling.

20. The system of claim 18 , wherein the control is configured to adjust the widths of the pulses to account for variations in (i) sizes of the reels and (ii) a pitch between components in or on the tape.

21. A method comprising:
securing a base of a fixture to a support;
placing a shaft of the fixture into a specified location, wherein one or more joints couple the shaft and the base and one or more motors are mounted to the shaft;
coupling multiple reels to the one or more motors, each reel configured to receive a tape in or on which components to be inspected are located; and
controlling winding and unwinding of the tape to and from the reels to allow a component inspection system to capture one or more images of each component;
wherein the one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base such that the tape is movable into and out of a path of radiation that is generated by a radiation source of the component inspection system.

22. The method of claim 21 , wherein:
the base is configured to be secured to different supports of different component inspection systems; and
the one or more joints are configured to allow positioning of the shaft in different positions depending on configurations of the different component inspection systems.

23. The method of claim 21 , wherein:
the one or more motors comprise a first motor and a second motor; and
controlling the winding and unwinding of the tape to

Assignees

• Raytheon Co

Inventors

• Fasolino Stephen T
• Wheeler Jason L
• Ng Joshua

Classifications

• G01N23/04

  and forming images of the material · CPC title

• G01N2223/6116

  semiconductor wafer · CPC title

• G01V5/00

  Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity · CPC title

• G01N2223/643

  object on conveyor · CPC title

• G01N2223/6113

  printed circuit board [PCB] · CPC title