Method of forming piezo driver electrodes

Patent metadata

Field	Value
Publication number	US-10166777-B2
Application number	US-201615134949-A
Country	US
Kind code	B2
Filing date	Apr 21, 2016
Priority date	Apr 21, 2016
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

A method for forming piezoelectric transducers for inkjet printheads includes: forming at least one piezoelectric layer on a substrate; forming at least one electrode pattern by depositing a conductive material on an exposed surface of the at least one piezoelectric layer; and forming a plurality of individual piezoelectric elements from the at least one piezoelectric layer before or after the forming of the at least one electrode pattern.

First claim

What is claimed is:

1. A method for forming piezoelectric transducers for inkjet printheads, comprising:
forming at least one piezoelectric layer on a substrate;
forming a plurality of first electrodes by depositing, via a printhead, a jettable conductive material as jet droplets on an exposed surface of the at least one piezoelectric layer;
dicing the at least one piezoelectric layer to form a plurality of individual piezoelectric elements from the at least one piezoelectric layer, wherein the dicing of the at least one piezoelectric layer is performed after the depositing of the jettable conductive material, and wherein a dicing blade used for performing the dicing does not contact the jettable conductive material when forming the plurality of individual piezoelectric elements; and
forming a plurality of second electrodes by depositing, via the printhead, a second jettable conductive material as jet droplets on a second exposed surface of each of the plurality of individual piezoelectric elements, wherein each of the plurality of individual piezoelectric elements is disposed between a pair of the first and second electrodes, respectively.

2. The method of claim 1 , wherein the depositing of the jettable conductive material from the printhead is in a predetermined pattern.

3. The method of claim 1 , further comprising placing a pattern-mask over the at least one piezoelectric layer and wherein the jettable conductive material passes through openings of the pattern-mask and forms on the exposed surface of the at least one piezoelectric layer.

4. The method of claim 1 , wherein a pattern-mask is used for preventing the depositing of jettable conductive material on at least one hold-back zone of the at least one piezoelectric layer.

5. The method of claim 1 , wherein the plurality of first electrodes extend from a first edge to a second, opposing edge of a corresponding at least one of the plurality of individual piezoelectric elements.

6. The method of claim 1 , wherein the depositing of the jettable conductive material comprises covering less than all of the exposed surface of the at least one piezoelectric layer.

7. The method of claim 1 , wherein the jettable conductive material is a printhead-jettable conductive material.

8. The method of claim 1 , wherein the jettable conductive material comprises a solution processable or printable silver-base conductive material.

9. The method of claim 1 , wherein the jettable conductive material comprises a silver nanoparticle ink or a silver nanoparticle paste, wherein silver nanoparticles of the silver nanoparticle ink or of the silver nanoparticle paste have a diameter of from about 1 nm to about 50 nm.

10. The method of claim 1 , wherein the substrate comprises a body plate cavity having a diaphragm and an adhesive that bonds to the plurality of second electrodes.

11. A method for forming piezoelectric transducers for inkjet printheads, comprising:
forming at least one piezoelectric layer on a substrate;
forming at least one electrode pattern by depositing, via a printhead, a jettable conductive material as jet droplets on an exposed surface of the at least one piezoelectric layer;
dicing the at least one piezoelectric layer to form a plurality of individual piezoelectric elements from the at least one piezoelectric layer before or after the forming of the at least one electrode pattern, wherein the at least one electrode pattern comprises a plurality of first electrodes disposed on a first surface of each of the plurality of individual piezoelectric elements; and
forming at least one of a second electrode pattern by depositing a second jettable conductive material via the printhead on a second surface of each of the plurality of individual piezoelectric elements,
wherein the second electrode pattern comprises a plurality of second electrodes, and
wherein each of the plurality of individual piezoelectric elements is disposed between one of the plurality of first electrodes and one of the plurality of second electrodes.

12. The method of claim 11 , wherein the dicing of the at least one piezoelectric layer is performed before the depositing of the jettable conductive material.

13. The method of claim 11 , wherein the substrate comprises a body plate cavity having a diaphragm and an adhesive that bonds to the at least one second electrode pattern.

14. The method of claim 11 , further comprising:
forming an adhesive layer on a second substrate;
flip-bonding the plurality of individual piezoelectric elements onto the second substrate such that a top surface of the at least one electrode pattern contacts the adhesive layer.

Assignees

• Xerox Corp

Inventors

• Redding Gary D
• Nystrom Peter J
• Gulvin Peter M
• Cellura Mark A

Classifications

• B41J2/14274

  of stacked structure type, deformed by compression/extension and disposed on a diaphragm · CPC title

• B41J2/1628

  dry etching · CPC title

• C09D11/36

  based on non-aqueous solvents · CPC title

• B41J2/1632

  machining · CPC title

• B41J2/161 Primary

  of film type, deformed by bending and disposed on a diaphragm · CPC title