Linear wafer drive for handling wafers during semiconductor fabrication

Patent metadata

Field	Value
Publication number	US-10163667-B2
Application number	US-5416008-A
Country	US
Kind code	B2
Filing date	Mar 24, 2008
Priority date	Mar 22, 2007
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

First claim

We claim:

1. A linear drive assembly, comprising:
an enclosure having a base plate, the enclosure having:
a first end effector for holding a semiconductor wafer in a first plane above the base plate;
a second end effector for holding a semiconductor wafer in a second plane that is above the first plane, the first and second end effectors configured to move in a common linear direction independently from each other, each of the first and second end effectors includes:
(a) an intermediate stage to be driven in the common linear direction;
(b) an end effector stage supported over and located above a surface of the intermediate stage;
(c) a first bearing between the intermediate stage and the end effector stage to articulate a horizontal movement of the end effector stage with respect to the intermediate stage;
(d) a first pulley and a second pulley connected to the intermediate stage, such that the first and second pulleys move with the intermediate stage when the intermediate stage is driven, wherein the first bearing is located between the first pulley and the second pulley to articulate the horizontal movement of the end effector stage with respect to the intermediate stage;
(e) a belt located around the first pulley and the second pulley, wherein the belt is coupled to a first side of the end effector stage and is fixed relative to the base plate, wherein the belt is further coupled to a second side of the end effector stage, wherein a portion of the end effector stage is attached to the belt between the first pulley and the second pulley to move in the common linear direction between the first pulley and the second pulley;
wherein the intermediate stage is configured to move horizontally in the common linear direction to articulate the horizontal movement the end effector stage in the common linear direction, wherein the first and second pulleys and the belt cause the end effector stage to amplify the horizontal movement of the end effector stage in the common linear direction, relative to the horizontal movement of the intermediate stage in the common linear direction.

2. The linear drive assembly as recited in claim 1 , further comprising:
a rotational drive connected to the base plate, the rotation drive enabling the first end effector and the second end effector to rotate between zero and 180 degrees.

3. The linear drive assembly of claim 1 , wherein each of the first and second end effectors includes:
a second bearing between the intermediate stage and the base plate;
wherein the first and second bearings facilitate the respective horizontal movements of the intermediate stage and the end effector stage in the common linear direction.

4. The linear drive assembly of claim 1 , wherein the first and second pulleys and the belt are sized to define a degree of amplification of the horizontal movement of the end effector stage, relative to the horizontal movement of the intermediate stage.

5. The linear drive assembly of claim 4 , wherein the degree of amplification is two times, such that for a unit of the horizontal movement of the intermediate stage two units of the horizontal movement of the intermediate stage are imparted to the end effector stage.

6. The linear drive assembly of claim 1 , further comprising:
a vertical drive, the vertical drive including a member that extends within the enclosure to vertically move the first end-effector and the second end-effector to indexed positions.

7. The linear drive assembly of claim 1 , further comprising:
an equipment controller that controls a plurality of movements of the first end effector, controls a plurality of movements of the second end effector, controls a rotational drive, and controls a vertical drive, the movements of the first end effector include a rotational movement, a vertical movement, and the horizontal movements.

8. The linear drive assembly of claim 1 , wherein the belt is coupled to the end effector stage between the first and second pulleys, wherein the belt is fixed relative to the base plate between the first and second pulleys.

9. A linear drive assembly, comprising:
an end effector for holding a semiconductor wafer in a plane above a base plate and configured to move in a common linear direction, the end effector includes:
(a) an intermediate stage to be driven in the common linear direction;
(b) an end effector stage supported over and located above a surface of the intermediate stage;
(c) a first bearing between the intermediate stage and the end effector stage to articulate a horizontal movement of the end effector stage with respect to the intermediate stage;
(d) a first pulley and a second pulley connected to the intermediate stage, such that the first and second pulleys move together with the intermediate stage when the intermediate stage is driven, wherein the first bearing is located between the first pulley and the second pulley to articulate the horizontal movement of the end effector stage with respect to the intermediate stage;
(e) a belt located around the first pulley and the second pulley, wherein the belt is coupled to a first side of the end effector stage and is fixed relative to the base plate, wherein the belt is further coupled to a second side of the end effector stage, wherein a portion of the end effector stage is attached to the belt between the first pulley and the second pulley to move in the common linear direction between the first pulley and the second pulley,
wherein the intermediate stage movement is configured to move horizontally in the common linear direction to articulate the horizontal movement the end effector stage in the common linear direction, wherein the first and second pulleys and the belt cause the end effector stage to amplify the horizontal movement of the end effector stage in the common linear direction, relative to the horizontal movement of the intermediate stage in the common linear direction.

10. The linear drive assembly as recited in claim 9 , further comprising:
a rotational drive connected to the base plate, the rotational drive enabling the end effector to rotate between zero and 180 degrees.

11. The linear drive assembly of claim 9 ,
wherein the end effector includes:
a second bearing between the intermediate stage and the base plate;
wherein the first and second bearings facilitate the respective horizontal movements of the intermediate stage and the end effector stage in the common linear direction.

12. The linear drive assembly of claim 9 , wherein the first and second pulleys and the belt are sized to define a degree of amplification of the horizontal movement of the end effector stage, relative to the horizontal movement of the intermediate stage.

13. The linear drive assembly of claim 12 , wherein the degree of amplification is two times, such that for a unit of the horizontal movement of the intermediate stage two units of the horizontal movement of the intermediate stage are imparted to the end effector stage.

14. The linear drive assembly of claim 9 , further comprising:
a vertical drive, the vertical drive including a member that extends within the enclosure to vertically move the end effector to indexed positions.

15. The linear drive assembly of claim 9 , further comprising:
an equipment controller that controls a plurality of movements of the end effector, controls a rotational drive, and controls a vertical drive, the movements of the first end effector include a rotational movement, a vertical movement, and the horizontal movements.

16. The linear drive assembly of claim 9 , further comprising:
a second end e

Assignees

• Price J B
• Keller Jed
• Dulmage Laurence
• Adams David
• Winger Eric
• WISE Lawrence
• Brooks Automation Inc

Inventors

• Price J B
• Keller Jed
• Dulmage Laurence
• Adams David
• Winger Eric
• WISE Lawrence

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/0452

  characterised by the layout of the process chambers · CPC title

• H10P72/0464 Primary

  characterised by the construction of the transfer chamber · CPC title

• H01L21/67196 Primary

  Electricity · mapped topic