Surface texture measuring apparatus and method

Patent metadata

Field	Value
Publication number	US-10161747-B2
Application number	US-201715430593-A
Country	US
Kind code	B2
Filing date	Feb 13, 2017
Priority date	Feb 25, 2016
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a θ axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.

First claim

What is claimed is:

1. A surface texture measuring apparatus comprising:
a measurement sensor configured to measure, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object, while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in the circumferential direction of the cylinder portion;
a normal direction displacer configured to displace, in the normal direction, the measurement sensor such that the measurement sensor measures the surface texture of a first measurement region;
a circumferential direction displacer configured to displace the measurement sensor in the circumferential direction, after measurement of the surface texture of the first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and
a controller configured to adjust a normal direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the normal direction, the controller further configured to adjust the measurement position based on measurement results of the surface texture of the first measurement region.

2. The surface texture measuring apparatus according to claim 1 , wherein:
the measurement sensor is further configured to measure the surface texture in a predetermined measurement range in the normal direction, and
the controller is further configured to adjust a normal direction position of the measurement range for measuring the surface texture of the second measurement region based on the measurement results of the surface texture of the first measurement region.

3. The surface texture measuring apparatus according to claim 1 , wherein the controller is further configured to:
find an estimated distance in the normal direction between a center of rotation of the measurement sensor in the circumferential direction and the first measurement region based on the measurement results of the surface texture of the first measurement region, and
adjust a normal direction measurement position for measuring the surface texture of the second measurement region based on the estimated distance.

4. The surface texture measuring apparatus according to claim 3 , wherein:
the measurement sensor is further configured to measure a three-dimensional shape as the surface texture of the first measurement region, and
the controller is further configured to find the estimated distance based on the three-dimensional shape of the first measurement region.

5. The surface texture measuring apparatus according to claim 3 , wherein the controller is further configured to find the estimated distance based on one of an average value and a median value of measured values for at least a partial region of the first measurement region.

6. The surface texture measuring apparatus according to claim 1 , further comprising:
an intersecting direction displacer configured to displace the measurable object in a first plane that includes the normal direction and the circumferential direction, in an intersecting direction intersecting with the normal direction and the circumferential direction; and
an orthogonal direction displacer configured to move the measurement sensor opposite the interior wall by displacing the measurement sensor in an orthogonal direction orthogonal to the first plane.

7. The surface texture measuring apparatus according to claim 1 , wherein the measurement sensor is an optical interference sensor configured to measure the surface texture using data on brightness of interference fringes formed by optical interference.

8. The surface texture measuring apparatus according to claim 1 , wherein the measurement sensor is an image sensor configured to measure the surface texture by capturing an image of the interior wall.

9. The surface texture measuring apparatus according to claim 1 , wherein the measurement sensor is a confocal sensor configured to measure the surface texture by focusing light on the interior wall.

10. The surface texture measuring apparatus according to claim 1 , wherein the measurement sensor is a sensor configured to measure the surface texture by detecting a peak in contrast of a captured image of the interior wall.

11. A surface texture measuring method comprising:
measuring, without contact, a surface texture of a first measurement region from among a plurality of measurement regions divided in a circumferential direction of a cylinder portion of a measurable object while displacing a measurement sensor in a normal direction of an interior wall of the cylinder portion;
displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of the first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and
adjusting a normal direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the normal direction, the adjustment of the measurement position being based on measurement results of the surface texture of the first measurement region.

Assignees

• Mitutoyo Corp

Inventors

• Sakai Hiroshi
• Ito Tetsuya
• Motohashi Ken

Classifications

• G01B5/061

  height gauges · CPC title

• G01B11/2441 Primary

  using interferometry · CPC title

• G01B11/303

  using photoelectric detection means · CPC title

• G01B11/0608

  Height gauges · CPC title

• G01B5/12

  internal diameters · CPC title