Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
US-9410662-B2 · Aug 9, 2016 · US
Linkage rod including limited-displacement flexible mechanism
US10161561B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10161561-B2 |
| Application number | US-201615280359-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 29, 2016 |
| Priority date | Jul 30, 2015 |
| Publication date | Dec 25, 2018 |
| Grant date | Dec 25, 2018 |
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- Title
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Abstract
Official abstract text for this publication.
A linkage rod including a limited-displacement flexible mechanism has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linkage rod including at least one limited-displacement flexible mechanism, wherein the limited-displacement flexible mechanism comprises at least one limited-displacement flexible joint which comprises: a flexible member; and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member.
First claim
Opening claim text (preview).
The invention claimed is: 1. A linkage rod, comprising: at least one limited-displacement flexible joint which comprises: a flexible member shaped like a plate, and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member; and a length adjusting mechanism comprising a screw member which is screwed into two side walls of the linkage rod, the two side walls extending along a longitudinal axis of the linkage rod and facing to each other at a distance, wherein rotating the screw member changes the distance between the two side walls so that the length of the linkage rod becomes longer or shorter. 2. The linkage rod according to claim 1 , wherein the length adjusting mechanism further comprises: an adjusting roller provided in an opening of the linkage rod, wherein the screw member is fixed to the adjusting roller at its rotation center, wherein the screw member has a right-handed screw section and a left-handed screw section in both ends, which are screwed into the two side walls, respectively, and rotating the adjusting roller pinches or pulls the opening to change the length of the linkage rod depending on a rotation direction of the adjusting roller. 3. A bipod comprising two linkage rods, wherein each of the two linkage rods comprises: at least one limited-displacement flexible joint which comprises: a flexible member shaped like a plate, and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member; and a length adjusting mechanism comprising a screw member which is screwed into two side walls of the linkage rod, the two side walls extending along a longitudinal axis of the linkage rod and facing to each other at a distance, wherein rotating the screw member changes the distance between the two side walls so that the length of the linkage rod becomes longer or shorter. 4. The bipod according to claim 3 , wherein the length adjusting mechanism further comprises in each linkage rod: an adjusting roller provided in an opening of the linkage rod, wherein the screw member is fixed to the adjusting roller at its rotation center, wherein the screw member has a right-handed screw section and a left-handed screw section in both ends, which are screwed into the two side walls, respectively, and rotating the adjusting roller pinches or pulls the opening to change the length of the linkage rod depending on a rotation direction of the adjusting roller. 5. A linkage rod comprising: a rod including two side walls extending along a longitudinal axis of the rod and facing to each other at a distance; and a length adjusting mechanism comprising a screw member which is screwed into the two side walls of the rod, wherein rotating the screw member changes the distance between the two side walls so that the length of the linkage rod becomes longer or shorter. 6. The linkage rod according to claim 5 , wherein the length adjusting mechanism further comprises: an adjusting roller provided in an opening of the rod, wherein the screw member fixed to the adjusting roller at its rotation center, wherein the screw member has a right-handed screw section and a left-handed screw section in both ends, which are screwed into the two side walls, respectively, and rotating the adjusting roller pinches or pulls the opening to change the length of the linkage rod depending on a rotation direction of the adjusting roller.
Assignees
Inventors
Classifications
comprising means for aligning the optical axis (G02B7/1821 takes precedence) · CPC title
- F16M11/121Primary
constituted of several dependent joints · CPC title
Common movement by two screws or two nuts, e.g. two connected screws with opposite thread direction · CPC title
without ladder-tape, e.g. with lazy-tongs, with screw spindle · CPC title
Motorised alignment · CPC title
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- What does patent US10161561B2 cover?
- A linkage rod including a limited-displacement flexible mechanism has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linkage rod including at least one limited-displacement flexible mechanism, wherein the limited-displacement flexible mechanism comprises at least one limited-displacement flexible joint which comprises: a flexible me…
- Who is the assignee on this patent?
- Nec Corp
- What technology area does this patent fall under?
- Primary CPC classification F16M11/121. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Dec 25 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).