Organic layer deposition assembly, organic layer deposition device including the same, and method of manufacturing organic light-emitting display device using the organic layer deposition assembly

Patent metadata

Field	Value
Publication number	US-10158074-B2
Application number	US-201615390908-A
Country	US
Kind code	B2
Filing date	Dec 27, 2016
Priority date	Dec 24, 2015
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

An organic layer deposition assembly for depositing a deposition material on a substrate includes a deposition source configured to spray the deposition material, a deposition source nozzle arranged in one side of the deposition source and including deposition source nozzles arranged in a first direction, a patterning slit sheet arranged to face the deposition source nozzle and having patterning slits in a second direction that crosses the first direction, and a correction sheet arranged between the deposition source nozzle and the patterning slit sheet and configured to block at least a part of the deposition material sprayed from the deposition source.

First claim

What is claimed is:

1. A method of manufacturing an organic light emitting display device including an organic layer deposition assembly for depositing an organic layer on a substrate, the method comprising:
fixing the substrate to a moving unit, wherein the fixing is performed by a loading unit;
transferring the moving unit to which the substrate is fixed to a chamber via a first transfer unit installed to penetrate the chamber;
forming the organic layer by depositing a deposition material sprayed from the organic layer deposition assembly on the substrate while the substrate relatively moves with respect to the organic layer deposition assembly in a state wherein an organic layer deposition assembly and the substrate that are arranged in the chamber are spaced apart from each other by a predetermined degree;
separating the substrate from which deposition is completed from the moving unit, the separating is performed by an unloading unit; and
transferring the moving unit separated from the substrate to the loading unit via a second transfer unit installed to penetrate the chamber,
wherein the organic layer deposition assembly comprises:
a deposition source configured to spray the deposition material;
a deposition source nozzle arranged in one side of the deposition source and including deposition source nozzles arranged in a first direction;
a patterning slit sheet arranged to face the deposition source nozzle and including patterning slits in a second direction that crosses the first direction; and
a correction sheet arranged between the deposition source nozzle and the patterning slit sheet and configured to block at least a part of the deposition material sprayed from the deposition source;
wherein the organic layer deposition assembly is configured to perform deposition while the substrate moves in the first direction with respect to the organic layer deposition assembly,
wherein the patterning slits comprise a first patterning slit and a second patterning slit spaced apart from each other by a predetermined distance in the first direction and in the second direction,
wherein a line crossing a center of the first patterning slit in the second direction and a line crossing a center of the second patterning slit in the second direction are spaced apart from each other by a predetermined distance, and
wherein a line connecting the center of each adjacent patterning slit in the second direction is a single zigzag pattern.

2. The method of claim 1 , wherein a plurality of organic layer deposition assemblies are provided in the chamber, each of the plurality of organic layer deposition assemblies being configured to continuously perform deposition on the substrate.

3. The method of claim 2 , wherein the moving unit is configured to move cyclically between the first transfer unit and the second transfer unit.

4. The method of claim 2 , wherein the first transfer unit and the second transfer unit are vertically arranged in parallel to each other.

5. The method of claim 2 , wherein the second transfer unit is configured to sequentially move the moving unit to the unloading unit and the loading unit.

Assignees

• Samsung Display Co Ltd

Inventors

• Cho Youngsun
• Kim Daeyong
• Kim Jongbum
• Yang Jongho
• Oh Yoonchan

Classifications

• B05B12/22 Primary

  movable relative to the spray area · CPC title

• B05B12/36

  Side shields, i.e. shields extending in a direction substantially parallel to the spray jet · CPC title

• C23C14/042

  using masks · CPC title

• H01L51/56

  Electricity · mapped topic

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title