Image sensors with light channeling reflective layers therein

Patent metadata

Field	Value
Publication number	US-10157948-B2
Application number	US-201615232650-A
Country	US
Kind code	B2
Filing date	Aug 9, 2016
Priority date	Aug 10, 2015
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

An image sensor includes a two-dimensional array of image sensor pixels, which are formed in a semiconductor layer. Each image sensor pixel is formed in a substrate having a corresponding semiconductor region therein. Each semiconductor region contains at least first and second photoelectric conversion elements, which are disposed at side-by-side locations therein. An electrically insulating isolation region is also provided, which extends at least partially through the semiconductor region and at least partially between the first and second photoelectric conversion elements, which may be configured respectively as first and second semiconductor regions of first conductivity type (e.g., N-type). At least one optically reflective region is also provided, which extends at least partially through the semiconductor region and surrounds at least a portion of at least one of the first and second photoelectric conversion elements. A semiconductor floating diffusion (FD) region (e.g., N-type region) is provided within the semiconductor region.

First claim

What is claimed is:

1. An image sensor pixel, comprising:
a substrate having a semiconductor region therein containing at least first and second photoelectric conversion elements disposed side-by-side in the semiconductor region and an electrically insulating isolation region that extends at least partially through the semiconductor region and at least partially between the first and second photoelectric conversion elements;
a micro-lens on a light receiving surface of said substrate;
a semiconductor floating diffusion region, which extends in the semiconductor region and between the first and second photoelectric conversion elements; and
an optically reflective region extending at least partially through the semiconductor region and surrounding at least a portion of at least one of the first and second photoelectric conversion elements;
wherein the micro-lens vertically overlaps with the first photoelectric conversion element, the second photoelectric conversion element, and the electrically insulating isolation region.

2. The image sensor pixel of claim 1 , wherein the semiconductor floating diffusion region and the electrically insulating isolation region extend opposite each other within the semiconductor region.

3. The image sensor pixel of claim 1 , wherein the semiconductor region has a trench therein that surrounds at least uppermost portions of the first and second photoelectric conversion elements on four sides thereof; wherein said optically reflective region at least partially fills the trench and surrounds the uppermost portions of the first and second photoelectric conversion elements when viewed in a direction normal to a surface of the semiconductor region.

4. The image sensor pixel of claim 1 , wherein said electrically insulating isolation region comprises an optically reflective material therein.

5. The image sensor pixel of claim 1 , wherein said semiconductor floating diffusion region is vertically aligned to a center of said micro-lens; and wherein both the first and second photoelectric conversion elements extend opposite the micro-lens.

6. An image sensor comprising:
a semiconductor layer having an array of micro-lenses on a light receiving surface thereof;
a first isolation layer disposed in the semiconductor layer to define a unit pixel region of the semiconductor layer;
a first photoelectric conversion element and a second photoelectric conversion element that are disposed in the semiconductor layer of the unit pixel region; and
a second isolation layer disposed in the semiconductor layer of the unit pixel region, the second isolation layer disposed between the first photoelectric conversion element and the second photoelectric conversion element and aligned vertically to a center of a corresponding micro-lens within the array of micro-lenses,
wherein the first isolation layer surrounds the first photoelectric conversion element and the second photoelectric conversion element, and
wherein the first isolation layer comprises a vertical reflective layer and an air gap within the vertical reflective layer.

7. The image sensor of claim 6 , wherein the first isolation layer comprises: first patterns extending in one direction; and second patterns disposed between the first patterns so as to be connected to the first patterns, and
wherein the second isolation layer is connected to the first patterns of the first isolation layer and is spaced apart from the second patterns of the first isolation layer.

8. The image sensor of claim 7 , wherein the second isolation layer comprises an additional vertical reflective layer,
wherein the additional vertical reflective layer is connected to the vertical reflective layers included in the first patterns of the first isolation layer.

9. The image sensor of claim 6 , wherein the first isolation layer comprises: first patterns extending in one direction; and second patterns disposed between the first patterns so as to be connected to the first patterns, and
wherein the second isolation layer is spaced apart from the first patterns and the second patterns of the first isolation layer.

10. The image sensor of claim 6 , wherein the second isolation layer comprises an additional vertical reflective layer; and an insulating layer disposed between the additional vertical reflective layer and the semiconductor layer.

11. The image sensor of claim 6 , wherein the first isolation layer further comprises a vertical insulating layer covering a surface of the vertical reflective layer, and
wherein the vertical insulating layer includes the same material as the second isolation layer.

12. The image sensor of claim 6 , wherein the semiconductor layer comprises: a first surface on which light is incident; and a second surface opposite to the first surface, and
wherein a distance between a bottom surface of the first isolation layer and the second surface of the semiconductor layer is smaller than a distance between a bottom surface of the second isolation layer and the second surface of the semiconductor layer.

13. The image sensor of claim 6 , wherein the semiconductor layer comprises:
a first surface on which light is incident; and
a second surface opposite to the first surface,
wherein the first isolation layer penetrates the semiconductor layer, and
wherein a bottom surface of the second isolation layer is spaced apart from the second surface of the semiconductor layer.

14. The image sensor of claim 6 , further comprising:
a floating diffusion region disposed in the semiconductor layer of the unit pixel region,
wherein the floating diffusion region is disposed between the first photoelectric conversion element and the second photoelectric conversion element,
wherein the floating diffusion region vertically overlaps with the second isolation layer but does not vertically overlap with the first isolation layer, and
wherein the floating diffusion region is vertically aligned to the center of the corresponding micro-lens within the array of micro-lenses.

15. The image sensor of claim 6 , wherein the semiconductor layer comprises: a first surface on which light is incident; and a second surface opposite to the first surface, the image sensor further comprising:
an interconnection structure disposed on the second surface of the semiconductor layer;
a color filter disposed on the first surface of the semiconductor layer and vertically overlapping with the first and second photoelectric conversion elements; and
wherein the array of micro-lenses is on the color filter.

16. The image sensor of claim 6 , wherein both the first and second photoelectric conversion elements extend opposite the corresponding micro-lens within the array of micro-lenses.

17. An image sensor comprising:
a semiconductor layer;
a first photoelectric conversion element and a second photoelectric conversion element disposed in the semiconductor layer;
a semiconductor floating diffusion region extending between the first and second photoelectric conversion elements;
a first isolation layer disposed in the semiconductor layer, the first isolation layer surrounding the first and second photoelectric conversion elements;
a second isolation layer disposed in the semiconductor layer, the second isolation layer isolating the first and second photoelectric conversion elements from each other; and
a color filter vertically overlapping with both the first photoelectric conversion element and the second photoelectric conversion element when viewed from a plan view,
wherein the first isolation layer comprises a vertical reflective laye

Assignees

• Samsung Electronics Co Ltd

Inventors

• Lee Kyungho
• An Hyuk
• Choi Hyuk Soon

Classifications

• H01L27/14629 Primary

  Electricity · mapped topic

• H01L27/1464

  Electricity · mapped topic

• H01L27/14621

  Electricity · mapped topic

• H01L27/14627

  Electricity · mapped topic

• H01L27/14636

  Electricity · mapped topic