Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system

Patent metadata

Field	Value
Publication number	US-10157726-B2
Application number	US-201113699975-A
Country	US
Kind code	B2
Filing date	Apr 29, 2011
Priority date	May 27, 2010
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

First claim

The invention claimed is:

1. A cathodoluminescence detection system comprising:
a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending said radiation to an analysis device, said collection optic being arranged in a vacuum chamber in which a pressure in the vacuum chamber is below atmospheric pressure,
an adjustment device configured to adjust the light radiation arranged downstream of the collection optic and said light radiation at the input of the analysis device, at least part of the adjustment device being arranged in an environment in which a pressure is greater than the pressure in said vacuum chamber, and
a first tube in the form of an outer cylinder aligned relative to the axis of the collection optic and integral with said collection optic, said outer cylinder comprising a window seal ensuring that the pressure is maintained in the vacuum chamber in which said collection optic is arranged; and
a second tube in the form of an inner cylinder enclosed by and centered in the outer cylinder and configured to receive the adjustment device with a view to injecting said light radiation into an optical fiber or into a detector,
said inner cylinder being arranged downstream from said window seal in a direction of a path of the light radiation so that said inner cylinder is at a pressure greater than the pressure in said vacuum chamber.

2. The system according to claim 1 , further comprising a seal arranged between said collection optic and the adjustment device and capable of ensuring that said vacuum chamber is leak tight while permitting the light radiation to pass through.

3. The system according to claim 1 , wherein the adjustment device comprises at least one lens arranged upstream of an optical fiber and capable of sending the light radiation into said optical fiber.

4. The system according to claim 1 , wherein the collection optic comprises a parabolic mirror.

5. The system according to claim 1 , wherein the collection optic comprises a plane mirror or an elliptical mirror associated with at least one optical lens.

6. The system according to claim 1 , wherein the inner cylinder is removably mounted in the outer cylinder and rotates freely relative to said outer cylinder.

7. The system according to claim 1 , wherein the adjustment device is configured to adjust the angle and size of the light radiation collected to the size and numerical aperture of a detector or an optical fiber.

8. The system according to claim 1 , wherein the adjustment device comprises a diaphragm arranged to let the light radiation coming from the collection optic through to the analysis device and block at least one undesirable optical signal.

9. The system according to claim 1 , further comprising a source of emission of a light beam propagating in the opposite direction to the direction of propagation of the light radiation, said light beam being directed towards the sample by the collection optic.

10. The system according to claim 1 , further comprising a light analyzer configured to analyze the light radiation arranged downstream of the adjustment device.

11. The system according to claim 10 , wherein the analysis device comprise a spectrometer, a CCD camera or a photomultiplier.

12. The system according to claim 1 , wherein the collection optic is mounted movably in at least one dimension, said system also comprising positioning device capable of moving said collection optic in at least one dimension.

13. The system according to claim 12 , wherein the positioning device comprise a stage mounted movably in at least one dimension, the collection optic being securely mounted on said stage, said system also comprising at least one positioning component capable of moving said stage in at least one dimension.

14. A microscope comprising:
a source ( 102 ) of emission of a charged particle beam, and a cathodoluminescence detection system according to claim 1 .

15. The microscope according to claim 14 , further comprising one of:
a bright field detector,
a dark field detector,
a EELS detector,
a camera for imaging or diffraction, or
a EDX detector.

Assignees

• Kociak Mathieu
• Zagonel Luiz Fernando
• Tence Marcel
• Mazzucco Stefano
• Centre Nat Rech Scient
• Univ Paris Sud 11

Inventors

• Kociak Mathieu
• Zagonel Luiz Fernando
• Tence Marcel
• Mazzucco Stefano

Classifications

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/256

  using scanning beams · CPC title

• H01J2237/2482

  Optical means · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/023

  Means for mechanically adjusting components not otherwise provided for · CPC title