Wafer processing apparatus and wafer processing method
US-2024395512-A1 · Nov 28, 2024 · US
US10157710B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10157710-B2 |
| Application number | US-201515537091-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 21, 2015 |
| Priority date | Dec 19, 2014 |
| Publication date | Dec 18, 2018 |
| Grant date | Dec 18, 2018 |
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A process of forming a thin film photoactive layer of an optoelectronic device comprising: providing a substrate having a surface comprising or coated with a metal M selected from at least one of Pb, Sn, Ge, Si, Ti, Bi, or In; and converting the metal surface or metal coating of the substrate to a perovskite layer.
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The invention claimed is: 1. A process of forming a thin film photoactive layer of an optoelectronic device comprising: providing a substrate having a metallic surface comprising or coated with a metal M selected from at least one of Pb, Sn, Ge, Si, Ti, Bi, or In; and converting the metallic surface of the substrate to a perovskite layer comprising an organo-metal halide perovskite, wherein the converting comprises: applying onto the surface of the substrate at least one perovskite precursor comprising at least one compound having a formula AX, or at least one reaction constituent for forming at least one compound having the formula AX, to form the perovskite layer, wherein A comprises a nitrogen-containing organic cation and X is selected from at least one of F, Cl, Br or I. 2. A process according to claim 1 , further comprising, prior to the converting step, providing the substrate with a metallic coating comprising the metal M to form the metallic surface. 3. A process according to claim 2 , wherein the coating comprising metal M is provided by a process comprising at least one of: a deposition method including at least one of electrodeposition, electrophoretic deposition, electroplating, or electroless deposition; a physical coating method including at least one of sputter, cold spray; or application of solid film or layer to the substrate; or an evaporative coating method. 4. A process according to claim 2 , wherein the metal coating comprising the metal M has a thickness between 25 and 200 nm. 5. A process according to claim 3 , wherein the coating comprising metal M is deposited on the substrate with a metal deposition rate of between 0.1 and 2 Angstrom/second. 6. A process according to claim 1 , wherein the converting step comprises: contacting the metallic surface with a vapor X selected from a halide vapor comprising at least one of F, Cl, Br or I, or an acetic acid vapor, to form a coating comprising metal compound MX 2 on the substrate; and thereafter applying at least one perovskite precursor to the substrate to form the perovskite layer. 7. A process according to claim 6 , wherein the metallic surface is contacted with a vapor X at between 50 and 200° C. 8. A process according to claim 1 , wherein the perovskite precursor comprises at least one perovskite precursor vapor and the converting step includes forming the perovskite layer by vapor deposition. 9. A process according to claim 8 , wherein the perovskite vapor deposition process comprises: exposing the substrate to a perovskite precursor vapor comprising the perovskite precursor or one or more reactants for producing said perovskite precursor; and allowing deposition of the perovskite precursor vapor onto the metal compound MX 2 coating on the substrate, to produce the perovskite layer thereon. 10. A process according to claim 9 , wherein the perovskite vapor deposition is allowed to continue until a solid layer of perovskite is formed with a thickness of from 100 nm to 100 μm. 11. A process according to claim 1 , wherein the perovskite precursor is a perovskite precursor solution comprising at least one perovskite precursor dissolved in a coating solvent. 12. A process according to claim 1 , wherein A in the perovskite precursor AX comprises an organic cation having a formula R 1 R 2 R 3 R 4 N, wherein: R 1 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; R 2 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; R 3 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; and R 4 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl. 13. A process according to claim 1 , wherein A in the perovskite precursor AX comprises an organic cation having a formula R 5 R 6 N═CH—NR 7 R 8 , and wherein: R 5 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; R 6 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; R 7 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl; and R 8 is hydrogen, unsubstituted or substituted C1-C20 alkyl, or unsubstituted or substituted aryl. 14. A process according to claim 1 , wherein the perovskite layer comprises at least one of CH 3 NH 3 MX 3 or HC(NH 2 ) 2 MX 3 , in which, M is selected from Pb, Sn, Tl, Bi, or In; and X is selected from at least one of F, Cl, Br or I. 15. A process according to claim 1 , wherein the perovskite layer comprises at least one of CH 3 NH 3 PbX 3 or HC(NH 2 ) 2 PbX 3 , in which X is selected from at least one of F, Cl, Br or I. 16. A process according to claim 1 , wherein the perovskite layer comprises CH 3 NH 3 MCl x I 3-x , in which M is selected from at least one of Pb, Sn, Ge, Si, Ti, Bi, or In, preferably M is Pb. 17. A process according to claim 1 , wherein the nitrogen containing organic cation comprises an ammonium group.
Reactive treatment · CPC title
Coating with metals · CPC title
After-treatment of electroplated surfaces · CPC title
of lead · CPC title
Sequential heat treatment · CPC title
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