Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10156779-B2
Application number	US-201715856675-A
Country	US
Kind code	B2
Filing date	Dec 28, 2017
Priority date	Mar 27, 2015
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

In an electro-optical device, a light-transmitting cover is disposed in mirrors, and when light is applied toward the mirrors through the light-transmitting cover, the temperature of the light-transmitting cover tires to increase due to the applied light. Here, in the electro-optical device, first metal portions that are in contact with the light-transmitting cover and the element substrate are formed. For this reason, it is possible to release the heat of the light-transmitting cover to a substrate through the first metal portions and the element substrate.

First claim

What is claimed is:

1. An electro-optical device comprising:
a first substrate;
an element substrate that is mounted on the first substrate, the element substrate being a second substrate;
a mirror that is provided on a first surface of the element substrate;
a drive element that is provided on the first surface of the element substrate to drive the mirror;
a light-transmitting cover that has light transmitting properties, and is provided such that the mirror is positioned between the light-transmitting cover and the element substrate; and
a metal portion that is a metal frame being in contact with the first substrate and the light-transmitting cover, and includes an end plate portion facing the first substrate, and a square body portion protruding toward the first substrate from an outer periphery of the end plate portion, wherein
an opening is formed in a position of the end plate portion which overlaps with the light-transmitting cover in planar view, and
the opening is formed at a surface of the light-transmitting cover that is opposite to a surface of the light-transmitting cover facing the mirror.

2. The electro-optical device according to claim 1 ,
wherein the metal frame is fixed to the light-transmitting cover and the first substrate.

3. The electro-optical device according to claim 1 , further comprising:
a sealing resin that is in contact with a lateral surface of the element substrate and a lateral surface of the light-transmitting cover between the metal portion and the first substrate.

4. An electronic apparatus including the electro-optical device according to claim 1 , the device comprising:
a light source unit that applies light-source light to the mirror.

5. An electro-optical device comprising:
a first substrate;
an element substrate that is mounted on the first substrate, the element substrate being a second substrate;
a mirror that is provided on a first surface of the element substrate;
a drive element that is provided on the first surface of the element substrate to drive the mirror;
a light-transmitting cover that has light transmitting properties, and is provided such that the mirror is positioned between the light-transmitting cover and the element substrate;
a sealing resin that is in contact with a lateral surface of the element substrate and a lateral surface of the light-transmitting cover; and
a light-transmitting inorganic material layer that is laminated on at least a part of a surface of the light-transmitting cover opposite to a surface of the light-transmitting cover facing the mirror and a surface of the sealing resin opposite to a surface of the sealing resin facing the first substrate, and is in contact with the first substrate.

6. The electro-optical device according to claim 5 , wherein the light-transmitting inorganic material layer is a metal oxide film and has a thermal conductivity higher than the sealing resin.

7. A method of manufacturing an electro-optical device, the method comprising:
providing a light-transmitting cover having light transmitting properties on an element substrate that includes a mirror and a drive element which drives the mirror on a first surface, the mirror being positioned between the light-transmitting cover and the element substrate;
mounting the element substrate on a first substrate, the element substrate being a second substrate; and
forming a metal portion into contact with the light-transmitting cover and the first substrate,
the metal portion being a metal frame and including an end plate portion facing the first substrate, and a square body portion protruding toward the first substrate from an outer periphery of the end plate portion;
forming an opening in a position of the end plate portion which overlaps with the light-transmitting cover in planar view; and
forming the opening at a surface of the light-transmitting cover that is opposite to a surface of the light-transmitting cover facing the mirror.

Assignees

• Seiko Epson Corp

Inventors

• Hanaoka Terunao

Classifications

• G03B21/16 Primary

  Cooling; Preventing overheating · CPC title

• B81B3/00

  Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G03B21/008

  using micromirror devices · CPC title