3d stacked piezoresistive pressure sensor
US-2016320255-A1 · Nov 3, 2016 · US
US10156490B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10156490-B2 |
| Application number | US-201414896652-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2014 |
| Priority date | Jun 7, 2013 |
| Publication date | Dec 18, 2018 |
| Grant date | Dec 18, 2018 |
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A composite piezoelectric coating (CPC) method includes entraining a powder in a first carrier gas stream; heating a second carrier gas stream to a predetermined temperature; combining the first carrier gas stream and second carrier gas stream into a combined carrier gas stream; ejecting the combined carrier gas stream at a target at a predetermined velocity, and consolidating the powder on the target by impact of the ejected combined carrier gas stream with the target.
Opening claim text (preview).
What is claimed is: 1. A pressure transducer comprising: a first electrode; a second electrode; and a composite piezoelectric coating (CPC) configured to: during an active mode, expand or contract in size based on a voltage applied across the first electrode and second electrode; and during a passive mode, generate a voltage across the first electrode and second electrode based on an applied pressure, wherein the CPC is disposed on a target via consolidation of a powder entrained in a carrier gas stream by impact of the carrier gas stream with the target, wherein the powder further comprises: a first quantity of a first powder of a piezoelectric material; and a second quantity of a second powder combined with the first quantity of the first powder, wherein the first quantity of the first powder and the second quantity of the second powder are selected so that a percolated matrix of the first powder is formed in the powder consolidated on the target, and wherein the percolated matrix of the first powder forms a continuous conduction path within a volume of the CPC. 2. The pressure transducer of claim 1 , wherein the target is one selected from a ball, a dart, a seat, a flow control valve, a multi-cycle valve, a cylindrical downhole part, the inside of a hollow cylinder, an internal surface of a well, and a layer in a transducer. 3. The pressure transducer of claim 1 , wherein the piezoelectric material is one selected from the lead zirconate titanate family. 4. The pressure transducer of claim 1 , wherein the second powder is one selected from polypropylene, polyimide, polytetrafluoroethylene, Polyvinylidene fluoride (PVDF), P(VDF-tetrafluoroethylene), phenolics, epoxies, Peek, Pek, and silicon based material. 5. A system of pressure transducers, comprising: a first pressure transducer comprising: a first electrode; a second electrode; and a first composite piezoelectric coating (CPC) configured to: expand or contract in response to a first voltage applied across a first electrode and a second electrode; and transmit the expansion or contraction as a pressure wave; a second pressure transducer comprising: a third electrode; a fourth electrode; and a second composite piezoelectric coating (CPC) configured to: receive the transmitted pressure wave as an expansion or contraction; and generate a second voltage across a third electrode and fourth electrode, wherein at least one of the first CPC and second CPC is disposed on a target via consolidation of a powder entrained in a carrier gas stream upon impact of the carrier gas stream with the target, wherein the powder further comprises: a first quantity of a first powder of a piezoelectric material; and a second quantity of a second powder combined with the first quantity of the first powder, wherein the first quantity of the first powder and the second quantity of the second powder are selected so that a percolated matrix of the first powder is formed in the powder consolidated on the target, and wherein the percolated matrix of the first powder forms a continuous conduction path within a volume of the at least one of the first CPC and second CPC. 6. The system of claim 5 , wherein the target is one selected from a ball, a dart, a seat, a flow control valve, a multi-cycle valve, a cylindrical downhole part, the inside of a hollow cylinder, an internal surface of a well, and a layer in a transducer. 7. A method of measuring pressure over an area, comprising: expanding or contracting a composite piezoelectric coating (CPC) in response to an applied pressure; and generating a voltage across a first and a second electrode based on the expansion or contraction of the CPC; wherein the composite piezoelectric coating is disposed over a large enough area to sense multiple pressures within the area, and wherein the CPC contains a percolated matrix of piezoelectric material particles that is surrounded by a second material, the percolated matrix of piezoelectric material particles forming a continuous conduction path within a volume of the CPC.
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